KR20080051162A - 에피택셜 산화물막, 압전막, 압전막 소자, 압전막 소자를이용한 액체 토출 헤드 및 액체 토출 장치 - Google Patents
에피택셜 산화물막, 압전막, 압전막 소자, 압전막 소자를이용한 액체 토출 헤드 및 액체 토출 장치 Download PDFInfo
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- KR20080051162A KR20080051162A KR20087008258A KR20087008258A KR20080051162A KR 20080051162 A KR20080051162 A KR 20080051162A KR 20087008258 A KR20087008258 A KR 20087008258A KR 20087008258 A KR20087008258 A KR 20087008258A KR 20080051162 A KR20080051162 A KR 20080051162A
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- H—ELECTRICITY
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Abstract
Description
실시예 1 | 실시예 2 | 비교예 1 | |
압전 상수(pC/N) | -169 | -158 | -70 |
Claims (28)
- 에피택셜 산화물막에 있어서,일반식 ABO3으로 표시되는 페로브스카이트 복합 산화물로 이루어지고,서로에 대해 결정 방위 편차를 갖는 A 도메인과 B 도메인을 적어도 가지고,상기 A 도메인과 상기 B 도메인과의 결정 방위 편차가 5°미만인것을 특징으로 하는 에피택셜 산화물막.
- 제1항에 있어서, 상기 에피택셜 산화물막 중에, 상기 A 도메인 및 상기 B 도메인에 더하여 C 도메인 및 D 도메인을 더 가지고, 이들 도메인이 결정 방위 편차가 있고, 상기 C 도메인과 상기 D 도메인과의 결정 방위 편차가 5°미만인 에피택셜 산화물막.
- 제1항에 있어서, 상기 A 도메인과 상기 B 도메인과의 결정 방위 편차가 2°미만인 에피택셜 산화물막.
- 제3항에 있어서, 상기 에피택셜 산화물막 중에, 상기 A 도메인 및 상기 B 도메인에 더하여 C 도메인 및 D 도메인을 더 가지고, 이들 도메인이 결정 방위 편차가 있고, 상기 C 도메인과 상기 D 도메인과의 결정 방위 편차가 2°미만인 에피택 셜 산화물막.
- 적어도 정방정을 갖는 <100> 배향의 에피택셜 산화물막에 있어서,일반식 ABO3으로 표시되는 페로브스카이트 복합 산화물로 이루어지고,서로에 대해 결정 방위 편차를 갖는 A 도메인과 B 도메인과 C 도메인과 D 도메인을 적어도 가지고,상기 A 도메인 및 상기 B 도메인은 [001] 배향이고, 상기 C 도메인 및 상기 D 도메인은 [100] 배향이고,상기 A 도메인과 상기 C 도메인은 적어도 쌍정의 거울상 관계를 가지고, 상기 쌍정의 쌍정면이 {110}이고,상기 B 도메인과 상기 D 도메인은 적어도 쌍정의 거울상 관계를 가지고, 상기 쌍정의 쌍정면이 {110}인것을 특징으로 하는 에피택셜 산화물막.
- 제5항에 있어서, 상기 A 도메인과 상기 B 도메인과의 결정 방위 편차가 5°미만이고, 상기 C 도메인과 상기 D 도메인과의 결정 방위 편차가 5°미만인 것을 특징으로 하는 에피택셜 산화물막.
- 제5항에 있어서, 상기 A 도메인과 상기 B 도메인과의 결정 방위 편차가 2° 미만이고, 상기 C 도메인과 상기 D 도메인과의 결정 방위 편차가 2°미만인 것을 특징으로 하는 에피택셜 산화물막.
- 제3항에 있어서, 티탄산납 또는 지르콘산 티탄산납을 주성분으로 하는 에피택셜 산화물막.
- 제7항에 있어서, 티탄산납 또는 지르콘산 티탄산납을 주성분으로 하는 에피택셜 산화물막.
- 제5항에 있어서, 상기 A 도메인과 상기 B 도메인과의 결정 방위 편차를 X°, 상기 C 도메인과 상기 D 도메인과의 결정 방위 편차를 Y°라 한 경우,X=Y의 관계를 만족시키는 에피택셜 산화물막.
- 제5항에 있어서, 적어도 정방정을 갖는 <100> 배향의 에피택셜막인 산화물막에 있어서,상기 A 도메인의 [100] 방위의 막 면내 방향 벡터 성분과 상기 B 도메인의 [001] 방위의 막 면내 방향 벡터 성분과의 막 면내 방향의 회전 편차를 V°, 상기 C 도메인의 [001] 방위의 면 내 방향 벡터 성분과 상기 D 도메인의 [100] 방위의 막 면내 방향 벡터 성분과의 막 면내 방향의 회전 편차를 W°라 한 경우,0<V=W≤45의 관계를 만족시키는 에피택셜 산화물막.
- 제5항에 있어서, 막 두께가 0.6 μm 이상인 에피택셜 산화물막.
- 에피택셜 산화물막으로 이루어지는 압전막에 있어서,일반식 ABO3으로 표시되는 페로브스카이트 복합 산화물로 이루어지고,서로에 대해 결정 방위 편차를 갖는 A 도메인과 B 도메인을 적어도 가지고,상기 A 도메인과 상기 B 도메인과의 결정 방위 편차가 5°미만인것을 특징으로 하는 압전막.
- 제13항에 있어서, 상기 에피택셜 산화물막 중에, 상기 A 도메인 및 상기 B 도메인에 더하여 C 도메인 및 D 도메인을 더 가지고, 이들 도메인이 결정 방위 편차가 있고, 상기 C 도메인과 상기 D 도메인과의 결정 방위 편차가 5°미만인 압전막.
- 제13항에 있어서, 상기 A 도메인과 상기 B 도메인과의 결정 방위 편차가 2°미만인 압전막.
- 제15항에 있어서, 상기 에피택셜 산화물막 중에, 상기 A 도메인 및 상기 B 도메인에 더하여 C 도메인 및 D 도메인을 더 가지고, 이들 도메인이 결정 방위 편차가 있고, 상기 C 도메인과 상기 D 도메인과의 결정 방위 편차가 2°미만인 압전막.
- 적어도 정방정을 갖는 <100> 배향의 에피택셜 산화물막으로 이루어지는 압전막에 있어서,일반식 ABO3으로 표시되는 페로브스카이트 복합 산화물로 이루어지고,서로에 대해 결정 방위 편차를 갖는 A 도메인과 B 도메인과 C 도메인과 D 도메인을 적어도 가지고,상기 A 도메인 및 상기 B 도메인은 [001] 배향이고, 상기 C 도메인 및 상기 D 도메인은 [100] 배향이고,상기 A 도메인과 상기 C 도메인은 적어도 쌍정의 거울상 관계를 가지고, 상기 쌍정의 쌍정면이 {110}이고,상기 B 도메인과 상기 D 도메인은 적어도 쌍정의 거울상 관계를 가지고, 상기 쌍정의 쌍정면이 {110}인것을 특징으로 하는 압전막.
- 제17항에 있어서, 상기 A 도메인과 상기 B 도메인과의 결정 방위 편차가 5° 미만이고, 상기 C 도메인과 상기 D 도메인과의 결정 방위 편차가 5°미만인 것을 특징으로 하는 압전막.
- 제17항에 있어서, 상기 A 도메인과 상기 B 도메인과의 결정 방위 편차가 2°미만이고, 상기 C 도메인과 상기 D 도메인과의 결정 방위 편차가 2°미만인 것을 특징으로 하는 압전막.
- 제15항에 있어서, 상기 에피택셜 산화물막의 주성분이 티탄산납 또는 지르콘산 티탄산납인 압전막.
- 제19항에 있어서, 상기 에피택셜 산화물막의 주성분이 티탄산납 또는 지르콘산 티탄산납인 압전막.
- 제17항에 있어서, 상기 A 도메인과 상기 B 도메인과의 결정 방위 편차를 X°, 상기 C 도메인과 상기 D 도메인과의 결정 방위 편차를 Y°라 한 경우,X=Y의 관계를 만족시키는 압전막.
- 제17항에 있어서, 적어도 정방정을 갖는 <100> 배향의 에피택셜막인 산화물막에 있어서,상기 A 도메인의 [100] 방위의 막 면내 방향 벡터 성분과 상기 B 도메인의 [001] 방위의 막 면내 방향 벡터 성분과의 막 면내 방향의 회전 편차를 V°, 상기 C 도메인의 [001] 방위의 면 내 방향 벡터 성분과 상기 D 도메인의 [100] 방위의 막 면내 방향 벡터 성분과의 막 면내 방향의 회전 편차를 W°라 한 경우,0<V=W≤45의 관계를 만족시키는 압전막.
- 제13항에 있어서, 90° 도메인 구조를 갖는 압전막.
- 제17항에 있어서, 막 두께가 0.6 μm 이상인 압전막.
- 적어도 정방정을 갖는 <100> 배향의 에피택셜 산화물막으로 이루어지는 압전막과, 상기 압전막에 접하는 한쌍의 전극을 갖는 압전막 소자이며,상기 압전막이일반식 ABO3으로 표시되는 페로브스카이트 복합 산화물로 이루어지고,서로에 대해 결정 방위 편차를 갖는 A 도메인과 B 도메인과 C 도메인과 D 도메인을 적어도 가지고,상기 A 도메인 및 상기 B 도메인은 [001] 배향이고, 상기 C 도메인 및 상기 D 도메인은 [100] 배향이고,상기 A 도메인과 상기 C 도메인은 적어도 쌍정의 거울상 관계를 가지고, 상기 쌍정의 쌍정면이 {110}이고,상기 B 도메인과 상기 D 도메인은 적어도 쌍정의 거울상 관계를 가지고, 상기 쌍정의 쌍정면이 {110}인것을 특징으로 하는 압전막 소자.
- 토출구, 토출구와 연통하는 개별 액실, 상기 개별 액실에 대응하여 설치된 압전 소자, 및 상기 개별 액실과 상기 압전 소자 사이에 설치된 진동판을 가지며, 상기 진동판에 의해 생기는 상기 개별 액실 내의 부피 변화에 의해서 상기 개별 액실 내의 액체를 상기 토출구로부터 토출하는 액체 토출 헤드이며,상기 압전 소자가 적어도 정방정을 갖는 <100> 배향의 에피택셜 산화물막으로 이루어지는 압전막, 및 상기 압전막에 접하는 한쌍의 전극을 가지고,상기 압전막이일반식 ABO3으로 표시되는 페로브스카이트 복합 산화물로 이루어지고,서로에 대해 결정 방위 편차를 갖는 A 도메인과 B 도메인과 C 도메인과 D 도메인을 적어도 가지고,상기 A 도메인 및 상기 B 도메인은 [001] 배향이고, 상기 C 도메인 및 상기 D 도메인은 [100] 배향이고,상기 A 도메인과 상기 C 도메인은 적어도 쌍정의 거울상 관계를 가지고, 상 기 쌍정의 쌍정면이 {110}이고,상기 B 도메인과 상기 D 도메인은 적어도 쌍정의 거울상 관계를 가지고, 상기 쌍정의 쌍정면이 {110}인것을 특징으로 하는 액체 토출 헤드.
- 토출구, 토출구와 연통하는 개별 액실, 상기 개별 액실에 대응하여 설치된 압전 소자, 및 상기 개별 액실과 상기 압전 소자 사이에 설치된 진동판을 가지며, 상기 진동판에 의해 생기는 상기 개별 액실 내의 부피 변화에 의해서 상기 개별 액실 내의 액체를 상기 토출구로부터 토출하는 액체 토출 헤드를 갖는 액체 토출 장치이며,상기 압전 소자가 적어도 정방정을 갖는 <100> 배향의 에피택셜 산화물막으로 이루어지는 압전막, 및 상기 압전막에 접하는 한쌍의 전극을 가지고,상기 압전막이일반식 ABO3으로 표시되는 페로브스카이트 복합 산화물로 이루어지고,서로에 대해 결정 방위 편차를 갖는 A 도메인과 B 도메인과 C 도메인과 D 도메인을 적어도 가지고,상기 A 도메인 및 상기 B 도메인은 [001] 배향이고, 상기 C 도메인 및 상기 D 도메인은 [100] 배향이고,상기 A 도메인과 상기 C 도메인은 적어도 쌍정의 거울상 관계를 가지고, 상 기 쌍정의 쌍정면이 {110}이고,상기 B 도메인과 상기 D 도메인은 적어도 쌍정의 거울상 관계를 가지고, 상기 쌍정의 쌍정면이 {110}인것을 특징으로 하는 액체 토출 장치.
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KR20087008258A KR100978145B1 (ko) | 2005-09-05 | 2006-09-05 | 에피택셜 산화물막, 압전막, 압전막 소자, 압전막 소자를이용한 액체 토출 헤드 및 액체 토출 장치 |
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US (1) | US7804231B2 (ko) |
EP (2) | EP1923927B1 (ko) |
JP (1) | JP5041765B2 (ko) |
KR (1) | KR100978145B1 (ko) |
CN (1) | CN101258620B (ko) |
WO (1) | WO2007029850A1 (ko) |
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- 2006-09-05 WO PCT/JP2006/317944 patent/WO2007029850A1/ja active Application Filing
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Publication number | Publication date |
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CN101258620A (zh) | 2008-09-03 |
WO2007029850A1 (ja) | 2007-03-15 |
US7804231B2 (en) | 2010-09-28 |
CN101258620B (zh) | 2010-06-09 |
EP1923927A1 (en) | 2008-05-21 |
JP2007288123A (ja) | 2007-11-01 |
US20080012054A1 (en) | 2008-01-17 |
EP2549558B1 (en) | 2015-02-25 |
JP5041765B2 (ja) | 2012-10-03 |
EP1923927B1 (en) | 2013-11-06 |
EP1923927A4 (en) | 2012-07-18 |
KR100978145B1 (ko) | 2010-08-25 |
EP2549558A1 (en) | 2013-01-23 |
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