KR102381838B1 - 정전 용량 측정용 측정기, 및 측정기를 이용하여 처리 시스템에 있어서의 반송 위치 데이터를 교정하는 방법 - Google Patents

정전 용량 측정용 측정기, 및 측정기를 이용하여 처리 시스템에 있어서의 반송 위치 데이터를 교정하는 방법 Download PDF

Info

Publication number
KR102381838B1
KR102381838B1 KR1020170075800A KR20170075800A KR102381838B1 KR 102381838 B1 KR102381838 B1 KR 102381838B1 KR 1020170075800 A KR1020170075800 A KR 1020170075800A KR 20170075800 A KR20170075800 A KR 20170075800A KR 102381838 B1 KR102381838 B1 KR 102381838B1
Authority
KR
South Korea
Prior art keywords
electrode
sensors
base substrate
sensor
electrodes
Prior art date
Application number
KR1020170075800A
Other languages
English (en)
Korean (ko)
Other versions
KR20170142905A (ko
Inventor
기페이 스기타
도모히데 미나미
Original Assignee
도쿄엘렉트론가부시키가이샤
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 도쿄엘렉트론가부시키가이샤 filed Critical 도쿄엘렉트론가부시키가이샤
Publication of KR20170142905A publication Critical patent/KR20170142905A/ko
Application granted granted Critical
Publication of KR102381838B1 publication Critical patent/KR102381838B1/ko

Links

Images

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
    • G01D5/14—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage
    • G01D5/24—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying capacitance
    • G01D5/241—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying capacitance by relative movement of capacitor electrodes
    • G01D5/2412—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying capacitance by relative movement of capacitor electrodes by varying overlap
    • G01D5/2415—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying capacitance by relative movement of capacitor electrodes by varying overlap adapted for encoders
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
    • G01D5/14—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage
    • G01D5/24—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying capacitance
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D18/00—Testing or calibrating apparatus or arrangements provided for in groups G01D1/00 - G01D15/00
    • G01D18/001—Calibrating encoders
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67242—Apparatus for monitoring, sorting or marking
    • H01L21/67259—Position monitoring, e.g. misposition detection or presence detection
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
    • H01L22/20—Sequence of activities consisting of a plurality of measurements, corrections, marking or sorting steps
    • H01L22/26—Acting in response to an ongoing measurement without interruption of processing, e.g. endpoint detection, in-situ thickness measurement

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Power Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Drying Of Semiconductors (AREA)
  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
KR1020170075800A 2016-06-20 2017-06-15 정전 용량 측정용 측정기, 및 측정기를 이용하여 처리 시스템에 있어서의 반송 위치 데이터를 교정하는 방법 KR102381838B1 (ko)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
JP2016121714 2016-06-20
JPJP-P-2016-121714 2016-06-20
JP2016207649A JP6712939B2 (ja) 2016-06-20 2016-10-24 静電容量測定用の測定器、及び、測定器を用いて処理システムにおける搬送位置データを較正する方法
JPJP-P-2016-207649 2016-10-24

Publications (2)

Publication Number Publication Date
KR20170142905A KR20170142905A (ko) 2017-12-28
KR102381838B1 true KR102381838B1 (ko) 2022-04-04

Family

ID=60892229

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020170075800A KR102381838B1 (ko) 2016-06-20 2017-06-15 정전 용량 측정용 측정기, 및 측정기를 이용하여 처리 시스템에 있어서의 반송 위치 데이터를 교정하는 방법

Country Status (3)

Country Link
JP (1) JP6712939B2 (ja)
KR (1) KR102381838B1 (ja)
TW (1) TWI724185B (ja)

Families Citing this family (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP7037964B2 (ja) * 2018-03-09 2022-03-17 東京エレクトロン株式会社 測定器、及びフォーカスリングを検査するためのシステムの動作方法
JP7029983B2 (ja) * 2018-03-09 2022-03-04 東京エレクトロン株式会社 測定器及び測定器のずれ量を求める方法
US10794681B2 (en) 2018-09-04 2020-10-06 Applied Materials, Inc. Long range capacitive gap measurement in a wafer form sensor system
US11521872B2 (en) * 2018-09-04 2022-12-06 Applied Materials, Inc. Method and apparatus for measuring erosion and calibrating position for a moving process kit
US11404296B2 (en) 2018-09-04 2022-08-02 Applied Materials, Inc. Method and apparatus for measuring placement of a substrate on a heater pedestal
US11342210B2 (en) * 2018-09-04 2022-05-24 Applied Materials, Inc. Method and apparatus for measuring wafer movement and placement using vibration data
US10847393B2 (en) 2018-09-04 2020-11-24 Applied Materials, Inc. Method and apparatus for measuring process kit centering
JP2020085452A (ja) * 2018-11-15 2020-06-04 オムロン株式会社 近接センサユニットおよび距離観測装置
JP7129325B2 (ja) * 2018-12-14 2022-09-01 東京エレクトロン株式会社 搬送方法及び搬送システム
JP2020115499A (ja) * 2019-01-17 2020-07-30 東京エレクトロン株式会社 プラズマ処理装置、及びリング部材の位置ずれ測定方法
WO2021185939A1 (en) * 2020-03-20 2021-09-23 Asml Netherlands B.V. Method, apparatus, and system for dynamically controlling an electrostatic chuck during an inspection of wafer
JP7514695B2 (ja) 2020-08-18 2024-07-11 株式会社安川電機 アライメント装置、基板搬送システム、アライメント方法、及び基板搬送方法
JP2022068582A (ja) 2020-10-22 2022-05-10 東京エレクトロン株式会社 搬送位置データの較正方法
JP2022107401A (ja) 2021-01-08 2022-07-21 東京エレクトロン株式会社 測定器及び測定方法

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0866375A3 (en) * 1997-03-17 2000-05-24 Nikon Corporation Article positioning apparatus and exposing apparatus having the same
JP3697477B2 (ja) * 2001-08-06 2005-09-21 ソニー株式会社 基板収納容器測定装置および基板収納容器測定用治具
JP2009054993A (ja) * 2007-08-02 2009-03-12 Tokyo Electron Ltd 位置検出用治具
JP4460592B2 (ja) * 2007-08-07 2010-05-12 小島プレス工業株式会社 車両搭載機器操作装置
JP4956328B2 (ja) * 2007-08-24 2012-06-20 東京エレクトロン株式会社 搬送アームの移動位置の調整方法及び位置検出用治具
KR101016229B1 (ko) * 2008-11-06 2011-02-25 한양대학교 산학협력단 초정밀 리니어 스테이지의 운동오차 측정방법 및 측정시스템

Also Published As

Publication number Publication date
JP6712939B2 (ja) 2020-06-24
JP2017228754A (ja) 2017-12-28
KR20170142905A (ko) 2017-12-28
TW201803004A (zh) 2018-01-16
TWI724185B (zh) 2021-04-11

Similar Documents

Publication Publication Date Title
KR102381838B1 (ko) 정전 용량 측정용 측정기, 및 측정기를 이용하여 처리 시스템에 있어서의 반송 위치 데이터를 교정하는 방법
KR102520285B1 (ko) 측정기의 어긋남량을 구하는 방법, 및, 처리 시스템에 있어서의 반송 위치 데이터를 교정하는 방법
KR102636225B1 (ko) 측정기를 교정하는 방법 및 케이스
US10634479B2 (en) Measuring instrument for measuring electrostatic capacity and method of calibrating transfer position data in processing system by using measuring instrument
KR102299122B1 (ko) 정전 용량을 나타내는 데이터를 취득하는 방법
KR102675477B1 (ko) 반송 방법 및 반송 시스템
CN110243273B (zh) 测定器和用于检查聚焦环的***的动作方法
CN110246796B (zh) 测定器和求出测定器的偏离量的方法
CN108693409B (zh) 静电电容测量用的测量器
TW202232108A (zh) 測定器及測定方法
KR20230099647A (ko) 측정기
KR20220053476A (ko) 반송 위치 데이터의 교정 방법

Legal Events

Date Code Title Description
A201 Request for examination
E902 Notification of reason for refusal
AMND Amendment
E601 Decision to refuse application
AMND Amendment
X701 Decision to grant (after re-examination)
GRNT Written decision to grant