KR102381838B1 - 정전 용량 측정용 측정기, 및 측정기를 이용하여 처리 시스템에 있어서의 반송 위치 데이터를 교정하는 방법 - Google Patents
정전 용량 측정용 측정기, 및 측정기를 이용하여 처리 시스템에 있어서의 반송 위치 데이터를 교정하는 방법 Download PDFInfo
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- KR102381838B1 KR102381838B1 KR1020170075800A KR20170075800A KR102381838B1 KR 102381838 B1 KR102381838 B1 KR 102381838B1 KR 1020170075800 A KR1020170075800 A KR 1020170075800A KR 20170075800 A KR20170075800 A KR 20170075800A KR 102381838 B1 KR102381838 B1 KR 102381838B1
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- South Korea
- Prior art keywords
- electrode
- sensors
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- sensor
- electrodes
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
- G01D5/14—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage
- G01D5/24—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying capacitance
- G01D5/241—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying capacitance by relative movement of capacitor electrodes
- G01D5/2412—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying capacitance by relative movement of capacitor electrodes by varying overlap
- G01D5/2415—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying capacitance by relative movement of capacitor electrodes by varying overlap adapted for encoders
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
- G01D5/14—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage
- G01D5/24—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying capacitance
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D18/00—Testing or calibrating apparatus or arrangements provided for in groups G01D1/00 - G01D15/00
- G01D18/001—Calibrating encoders
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67242—Apparatus for monitoring, sorting or marking
- H01L21/67259—Position monitoring, e.g. misposition detection or presence detection
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
- H01L22/20—Sequence of activities consisting of a plurality of measurements, corrections, marking or sorting steps
- H01L22/26—Acting in response to an ongoing measurement without interruption of processing, e.g. endpoint detection, in-situ thickness measurement
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- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Power Engineering (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Drying Of Semiconductors (AREA)
- Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Applications Claiming Priority (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2016121714 | 2016-06-20 | ||
JPJP-P-2016-121714 | 2016-06-20 | ||
JP2016207649A JP6712939B2 (ja) | 2016-06-20 | 2016-10-24 | 静電容量測定用の測定器、及び、測定器を用いて処理システムにおける搬送位置データを較正する方法 |
JPJP-P-2016-207649 | 2016-10-24 |
Publications (2)
Publication Number | Publication Date |
---|---|
KR20170142905A KR20170142905A (ko) | 2017-12-28 |
KR102381838B1 true KR102381838B1 (ko) | 2022-04-04 |
Family
ID=60892229
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR1020170075800A KR102381838B1 (ko) | 2016-06-20 | 2017-06-15 | 정전 용량 측정용 측정기, 및 측정기를 이용하여 처리 시스템에 있어서의 반송 위치 데이터를 교정하는 방법 |
Country Status (3)
Country | Link |
---|---|
JP (1) | JP6712939B2 (ja) |
KR (1) | KR102381838B1 (ja) |
TW (1) | TWI724185B (ja) |
Families Citing this family (14)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP7037964B2 (ja) * | 2018-03-09 | 2022-03-17 | 東京エレクトロン株式会社 | 測定器、及びフォーカスリングを検査するためのシステムの動作方法 |
JP7029983B2 (ja) * | 2018-03-09 | 2022-03-04 | 東京エレクトロン株式会社 | 測定器及び測定器のずれ量を求める方法 |
US10794681B2 (en) | 2018-09-04 | 2020-10-06 | Applied Materials, Inc. | Long range capacitive gap measurement in a wafer form sensor system |
US11521872B2 (en) * | 2018-09-04 | 2022-12-06 | Applied Materials, Inc. | Method and apparatus for measuring erosion and calibrating position for a moving process kit |
US11404296B2 (en) | 2018-09-04 | 2022-08-02 | Applied Materials, Inc. | Method and apparatus for measuring placement of a substrate on a heater pedestal |
US11342210B2 (en) * | 2018-09-04 | 2022-05-24 | Applied Materials, Inc. | Method and apparatus for measuring wafer movement and placement using vibration data |
US10847393B2 (en) | 2018-09-04 | 2020-11-24 | Applied Materials, Inc. | Method and apparatus for measuring process kit centering |
JP2020085452A (ja) * | 2018-11-15 | 2020-06-04 | オムロン株式会社 | 近接センサユニットおよび距離観測装置 |
JP7129325B2 (ja) * | 2018-12-14 | 2022-09-01 | 東京エレクトロン株式会社 | 搬送方法及び搬送システム |
JP2020115499A (ja) * | 2019-01-17 | 2020-07-30 | 東京エレクトロン株式会社 | プラズマ処理装置、及びリング部材の位置ずれ測定方法 |
WO2021185939A1 (en) * | 2020-03-20 | 2021-09-23 | Asml Netherlands B.V. | Method, apparatus, and system for dynamically controlling an electrostatic chuck during an inspection of wafer |
JP7514695B2 (ja) | 2020-08-18 | 2024-07-11 | 株式会社安川電機 | アライメント装置、基板搬送システム、アライメント方法、及び基板搬送方法 |
JP2022068582A (ja) | 2020-10-22 | 2022-05-10 | 東京エレクトロン株式会社 | 搬送位置データの較正方法 |
JP2022107401A (ja) | 2021-01-08 | 2022-07-21 | 東京エレクトロン株式会社 | 測定器及び測定方法 |
Family Cites Families (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0866375A3 (en) * | 1997-03-17 | 2000-05-24 | Nikon Corporation | Article positioning apparatus and exposing apparatus having the same |
JP3697477B2 (ja) * | 2001-08-06 | 2005-09-21 | ソニー株式会社 | 基板収納容器測定装置および基板収納容器測定用治具 |
JP2009054993A (ja) * | 2007-08-02 | 2009-03-12 | Tokyo Electron Ltd | 位置検出用治具 |
JP4460592B2 (ja) * | 2007-08-07 | 2010-05-12 | 小島プレス工業株式会社 | 車両搭載機器操作装置 |
JP4956328B2 (ja) * | 2007-08-24 | 2012-06-20 | 東京エレクトロン株式会社 | 搬送アームの移動位置の調整方法及び位置検出用治具 |
KR101016229B1 (ko) * | 2008-11-06 | 2011-02-25 | 한양대학교 산학협력단 | 초정밀 리니어 스테이지의 운동오차 측정방법 및 측정시스템 |
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2016
- 2016-10-24 JP JP2016207649A patent/JP6712939B2/ja active Active
-
2017
- 2017-06-15 KR KR1020170075800A patent/KR102381838B1/ko active IP Right Grant
- 2017-06-19 TW TW106120306A patent/TWI724185B/zh active
Also Published As
Publication number | Publication date |
---|---|
JP6712939B2 (ja) | 2020-06-24 |
JP2017228754A (ja) | 2017-12-28 |
KR20170142905A (ko) | 2017-12-28 |
TW201803004A (zh) | 2018-01-16 |
TWI724185B (zh) | 2021-04-11 |
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