KR102160429B1 - 비전도성 반투명 메탈릭 컬러 박막 및 이의 제조방법 - Google Patents

비전도성 반투명 메탈릭 컬러 박막 및 이의 제조방법 Download PDF

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Publication number
KR102160429B1
KR102160429B1 KR1020180008295A KR20180008295A KR102160429B1 KR 102160429 B1 KR102160429 B1 KR 102160429B1 KR 1020180008295 A KR1020180008295 A KR 1020180008295A KR 20180008295 A KR20180008295 A KR 20180008295A KR 102160429 B1 KR102160429 B1 KR 102160429B1
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KR
South Korea
Prior art keywords
color
translucent
layer
thin film
forming step
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KR1020180008295A
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English (en)
Korean (ko)
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KR20190089584A (ko
Inventor
백우성
이상문
채장우
정건수
변나은
Original Assignee
주식회사 셀코스
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Application filed by 주식회사 셀코스 filed Critical 주식회사 셀코스
Priority to KR1020180008295A priority Critical patent/KR102160429B1/ko
Priority to PCT/KR2018/006686 priority patent/WO2019146847A1/ko
Priority to CN201880087326.9A priority patent/CN111630202B/zh
Publication of KR20190089584A publication Critical patent/KR20190089584A/ko
Application granted granted Critical
Publication of KR102160429B1 publication Critical patent/KR102160429B1/ko

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    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/0015—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterized by the colour of the layer
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/0021—Reactive sputtering or evaporation
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/0641—Nitrides
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/08—Oxides
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/34—Sputtering

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  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Laminated Bodies (AREA)
  • Surface Treatment Of Glass (AREA)
  • Physical Vapour Deposition (AREA)
KR1020180008295A 2018-01-23 2018-01-23 비전도성 반투명 메탈릭 컬러 박막 및 이의 제조방법 KR102160429B1 (ko)

Priority Applications (3)

Application Number Priority Date Filing Date Title
KR1020180008295A KR102160429B1 (ko) 2018-01-23 2018-01-23 비전도성 반투명 메탈릭 컬러 박막 및 이의 제조방법
PCT/KR2018/006686 WO2019146847A1 (ko) 2018-01-23 2018-06-14 비전도성 반투명 메탈릭 컬러 박막 및 이의 제조방법
CN201880087326.9A CN111630202B (zh) 2018-01-23 2018-06-14 非导电性金属色彩半透明膜及其制备方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR1020180008295A KR102160429B1 (ko) 2018-01-23 2018-01-23 비전도성 반투명 메탈릭 컬러 박막 및 이의 제조방법

Publications (2)

Publication Number Publication Date
KR20190089584A KR20190089584A (ko) 2019-07-31
KR102160429B1 true KR102160429B1 (ko) 2020-09-29

Family

ID=67395795

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020180008295A KR102160429B1 (ko) 2018-01-23 2018-01-23 비전도성 반투명 메탈릭 컬러 박막 및 이의 제조방법

Country Status (3)

Country Link
KR (1) KR102160429B1 (zh)
CN (1) CN111630202B (zh)
WO (1) WO2019146847A1 (zh)

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2619838B2 (ja) * 1989-09-08 1997-06-11 新日本製鐵株式会社 セラミックスコーティング金属板
JP2000241070A (ja) * 1999-02-22 2000-09-08 Kazuichi Kusakabe 冷蔵室内が見える家庭用冷蔵庫
JP2005099271A (ja) * 2003-09-24 2005-04-14 Toppan Printing Co Ltd 半透過型液晶表示装置用カラーフィルタ及びその製造方法
KR20100103296A (ko) * 2009-03-13 2010-09-27 삼성테크윈 주식회사 제품의 하우징에 형성되는 박막
KR101131962B1 (ko) * 2010-05-28 2012-03-29 (주)위너테크 비전도 박막 코팅체 및 제조 장치
CN102477527B (zh) * 2010-11-23 2014-07-30 鸿富锦精密工业（深圳）有限公司 壳体的制作方法及由该方法制得的壳体
KR101287903B1 (ko) * 2011-06-30 2013-07-19 한국기계연구원 색상을 가지는 표면처리물 및 이의 제조 방법
JP2013086466A (ja) * 2011-10-21 2013-05-13 Asahi Glass Co Ltd 前面板および前面板の製造方法
US20160147125A1 (en) * 2014-11-24 2016-05-26 Freescale Semiconductor, Inc. Electronic devices wth transparent conducting electrodes, and methods of manufacture thereof
KR101856835B1 (ko) * 2016-01-05 2018-05-10 엘지전자 주식회사 냉장고
KR101862564B1 (ko) * 2016-01-05 2018-05-30 엘지전자 주식회사 냉장고
KR101748996B1 (ko) 2016-06-20 2017-06-19 엘지전자 주식회사 전면 패널 및 이를 구비한 냉장고 도어

Also Published As

Publication number Publication date
CN111630202B (zh) 2022-10-11
CN111630202A (zh) 2020-09-04
WO2019146847A1 (ko) 2019-08-01
KR20190089584A (ko) 2019-07-31

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