KR100477055B1 - 화학적 처리장치와 도금처리장치 및 화학적 처리방법 - Google Patents
화학적 처리장치와 도금처리장치 및 화학적 처리방법 Download PDFInfo
- Publication number
- KR100477055B1 KR100477055B1 KR10-2002-0016429A KR20020016429A KR100477055B1 KR 100477055 B1 KR100477055 B1 KR 100477055B1 KR 20020016429 A KR20020016429 A KR 20020016429A KR 100477055 B1 KR100477055 B1 KR 100477055B1
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- South Korea
- Prior art keywords
- plating
- liquid
- cup
- processing
- closed
- Prior art date
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- 238000007747 plating Methods 0.000 title claims abstract description 477
- 238000000034 method Methods 0.000 title claims abstract description 168
- 238000012993 chemical processing Methods 0.000 title description 17
- 239000007788 liquid Substances 0.000 claims abstract description 360
- 238000012545 processing Methods 0.000 claims abstract description 282
- 239000000126 substance Substances 0.000 claims abstract description 45
- 238000003860 storage Methods 0.000 claims description 19
- 230000008859 change Effects 0.000 claims description 16
- 239000004065 semiconductor Substances 0.000 abstract description 115
- 230000008569 process Effects 0.000 abstract description 103
- 230000007547 defect Effects 0.000 abstract description 57
- 238000004519 manufacturing process Methods 0.000 abstract description 56
- 230000014759 maintenance of location Effects 0.000 abstract description 51
- 238000007772 electroless plating Methods 0.000 description 47
- 239000010410 layer Substances 0.000 description 45
- 239000000758 substrate Substances 0.000 description 39
- 235000012431 wafers Nutrition 0.000 description 34
- 239000010931 gold Substances 0.000 description 33
- KDLHZDBZIXYQEI-UHFFFAOYSA-N Palladium Chemical compound [Pd] KDLHZDBZIXYQEI-UHFFFAOYSA-N 0.000 description 26
- 229910052737 gold Inorganic materials 0.000 description 26
- 238000009826 distribution Methods 0.000 description 23
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 20
- 239000000243 solution Substances 0.000 description 20
- 230000010349 pulsation Effects 0.000 description 18
- 238000001994 activation Methods 0.000 description 17
- 239000002253 acid Substances 0.000 description 14
- 238000007789 sealing Methods 0.000 description 14
- 230000000694 effects Effects 0.000 description 13
- 229910052763 palladium Inorganic materials 0.000 description 13
- 230000004913 activation Effects 0.000 description 10
- 238000009713 electroplating Methods 0.000 description 10
- 238000005530 etching Methods 0.000 description 10
- 239000010949 copper Substances 0.000 description 9
- 238000010586 diagram Methods 0.000 description 8
- 239000002699 waste material Substances 0.000 description 8
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 7
- 229910052802 copper Inorganic materials 0.000 description 7
- 230000000149 penetrating effect Effects 0.000 description 7
- 239000000654 additive Substances 0.000 description 6
- 238000005238 degreasing Methods 0.000 description 6
- 150000002343 gold Chemical class 0.000 description 6
- JBRZTFJDHDCESZ-UHFFFAOYSA-N AsGa Chemical compound [As]#[Ga] JBRZTFJDHDCESZ-UHFFFAOYSA-N 0.000 description 5
- 229910001218 Gallium arsenide Inorganic materials 0.000 description 5
- 230000000996 additive effect Effects 0.000 description 5
- 238000007599 discharging Methods 0.000 description 5
- 229910052751 metal Inorganic materials 0.000 description 5
- 239000002184 metal Substances 0.000 description 5
- 238000001020 plasma etching Methods 0.000 description 5
- 239000003381 stabilizer Substances 0.000 description 5
- 230000002378 acidificating effect Effects 0.000 description 4
- 239000002738 chelating agent Substances 0.000 description 4
- 239000008139 complexing agent Substances 0.000 description 4
- 238000006386 neutralization reaction Methods 0.000 description 4
- 238000002360 preparation method Methods 0.000 description 4
- 238000006467 substitution reaction Methods 0.000 description 4
- WSFSSNUMVMOOMR-UHFFFAOYSA-N Formaldehyde Chemical compound O=C WSFSSNUMVMOOMR-UHFFFAOYSA-N 0.000 description 3
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 3
- 239000003054 catalyst Substances 0.000 description 3
- 239000003638 chemical reducing agent Substances 0.000 description 3
- 230000000737 periodic effect Effects 0.000 description 3
- RFFLAFLAYFXFSW-UHFFFAOYSA-N 1,2-dichlorobenzene Chemical compound ClC1=CC=CC=C1Cl RFFLAFLAYFXFSW-UHFFFAOYSA-N 0.000 description 2
- HZAXFHJVJLSVMW-UHFFFAOYSA-N 2-Aminoethan-1-ol Chemical compound NCCO HZAXFHJVJLSVMW-UHFFFAOYSA-N 0.000 description 2
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 2
- ZAMOUSCENKQFHK-UHFFFAOYSA-N Chlorine atom Chemical compound [Cl] ZAMOUSCENKQFHK-UHFFFAOYSA-N 0.000 description 2
- XFXPMWWXUTWYJX-UHFFFAOYSA-N Cyanide Chemical compound N#[C-] XFXPMWWXUTWYJX-UHFFFAOYSA-N 0.000 description 2
- LSNNMFCWUKXFEE-UHFFFAOYSA-N Sulfurous acid Chemical compound OS(O)=O LSNNMFCWUKXFEE-UHFFFAOYSA-N 0.000 description 2
- 230000000903 blocking effect Effects 0.000 description 2
- 229910052799 carbon Inorganic materials 0.000 description 2
- 239000003795 chemical substances by application Substances 0.000 description 2
- 239000000460 chlorine Substances 0.000 description 2
- 229910052801 chlorine Inorganic materials 0.000 description 2
- 239000011651 chromium Substances 0.000 description 2
- 150000001875 compounds Chemical class 0.000 description 2
- 239000007789 gas Substances 0.000 description 2
- SRCZENKQCOSNAI-UHFFFAOYSA-H gold(3+);trisulfite Chemical compound [Au+3].[Au+3].[O-]S([O-])=O.[O-]S([O-])=O.[O-]S([O-])=O SRCZENKQCOSNAI-UHFFFAOYSA-H 0.000 description 2
- 230000007246 mechanism Effects 0.000 description 2
- 238000005498 polishing Methods 0.000 description 2
- NNFCIKHAZHQZJG-UHFFFAOYSA-N potassium cyanide Chemical compound [K+].N#[C-] NNFCIKHAZHQZJG-UHFFFAOYSA-N 0.000 description 2
- 238000007788 roughening Methods 0.000 description 2
- 229910052710 silicon Inorganic materials 0.000 description 2
- 239000010703 silicon Substances 0.000 description 2
- GEHJYWRUCIMESM-UHFFFAOYSA-L sodium sulfite Chemical compound [Na+].[Na+].[O-]S([O-])=O GEHJYWRUCIMESM-UHFFFAOYSA-L 0.000 description 2
- 239000010936 titanium Substances 0.000 description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 2
- ROFVEXUMMXZLPA-UHFFFAOYSA-N Bipyridyl Chemical group N1=CC=CC=C1C1=CC=CC=N1 ROFVEXUMMXZLPA-UHFFFAOYSA-N 0.000 description 1
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 1
- KCXVZYZYPLLWCC-UHFFFAOYSA-N EDTA Chemical compound OC(=O)CN(CC(O)=O)CCN(CC(O)=O)CC(O)=O KCXVZYZYPLLWCC-UHFFFAOYSA-N 0.000 description 1
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 1
- 241000080590 Niso Species 0.000 description 1
- ISWSIDIOOBJBQZ-UHFFFAOYSA-N Phenol Chemical compound OC1=CC=CC=C1 ISWSIDIOOBJBQZ-UHFFFAOYSA-N 0.000 description 1
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 1
- 230000003213 activating effect Effects 0.000 description 1
- 150000004996 alkyl benzenes Chemical class 0.000 description 1
- 229940077388 benzenesulfonate Drugs 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 229910052804 chromium Inorganic materials 0.000 description 1
- 229910000365 copper sulfate Inorganic materials 0.000 description 1
- ARUVKPQLZAKDPS-UHFFFAOYSA-L copper(II) sulfate Chemical compound [Cu+2].[O-][S+2]([O-])([O-])[O-] ARUVKPQLZAKDPS-UHFFFAOYSA-L 0.000 description 1
- 238000005520 cutting process Methods 0.000 description 1
- 238000005868 electrolysis reaction Methods 0.000 description 1
- 239000012530 fluid Substances 0.000 description 1
- IZLAVFWQHMDDGK-UHFFFAOYSA-N gold(1+);cyanide Chemical compound [Au+].N#[C-] IZLAVFWQHMDDGK-UHFFFAOYSA-N 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 239000011229 interlayer Substances 0.000 description 1
- 238000005304 joining Methods 0.000 description 1
- 235000021190 leftovers Nutrition 0.000 description 1
- 239000011259 mixed solution Substances 0.000 description 1
- 230000003472 neutralizing effect Effects 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- LGQLOGILCSXPEA-UHFFFAOYSA-L nickel sulfate Chemical compound [Ni+2].[O-]S([O-])(=O)=O LGQLOGILCSXPEA-UHFFFAOYSA-L 0.000 description 1
- 229910000363 nickel(II) sulfate Inorganic materials 0.000 description 1
- 229920000620 organic polymer Polymers 0.000 description 1
- PIBWKRNGBLPSSY-UHFFFAOYSA-L palladium(II) chloride Chemical compound Cl[Pd]Cl PIBWKRNGBLPSSY-UHFFFAOYSA-L 0.000 description 1
- OFNHPGDEEMZPFG-UHFFFAOYSA-N phosphanylidynenickel Chemical compound [P].[Ni] OFNHPGDEEMZPFG-UHFFFAOYSA-N 0.000 description 1
- ACVYVLVWPXVTIT-UHFFFAOYSA-M phosphinate Chemical compound [O-][PH2]=O ACVYVLVWPXVTIT-UHFFFAOYSA-M 0.000 description 1
- 238000003672 processing method Methods 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 235000010265 sodium sulphite Nutrition 0.000 description 1
- ZWZLRIBPAZENFK-UHFFFAOYSA-J sodium;gold(3+);disulfite Chemical compound [Na+].[Au+3].[O-]S([O-])=O.[O-]S([O-])=O ZWZLRIBPAZENFK-UHFFFAOYSA-J 0.000 description 1
- 239000004094 surface-active agent Substances 0.000 description 1
- 229910052719 titanium Inorganic materials 0.000 description 1
- 238000005406 washing Methods 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/20—Deposition of semiconductor materials on a substrate, e.g. epitaxial growth solid phase epitaxy
-
- C—CHEMISTRY; METALLURGY
- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
- C25D17/00—Constructional parts, or assemblies thereof, of cells for electrolytic coating
- C25D17/001—Apparatus specially adapted for electrolytic coating of wafers, e.g. semiconductors or solar cells
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/40—Forming printed elements for providing electric connections to or between printed circuits
- H05K3/42—Plated through-holes or plated via connections
- H05K3/423—Plated through-holes or plated via connections characterised by electroplating method
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Life Sciences & Earth Sciences (AREA)
- Sustainable Development (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Electrochemistry (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Electroplating Methods And Accessories (AREA)
- Chemically Coating (AREA)
- Electrodes Of Semiconductors (AREA)
- Manufacturing Of Printed Wiring (AREA)
Abstract
Description
Claims (3)
- 소정 압력과 유속으로 내부에서 처리액을 유통하면서 피처리 부재를 화학적 처리를 하는 폐쇄형 처리 컵과, 상기 처리액을 저장하는 액 저장 탱크와, 상기 액 저장 탱크로부터 상기 처리액을 상기 폐쇄형 처리 컵에 공급하는 펌프를 구비하고, 상기 펌프가 상기 폐쇄형 처리 컵내의 처리액의 압력과 유속의 적어도 한쪽을 주기적으로 변화시키도록 구성된 것을 특징으로 하는 화학적 처리장치.
- 소정 압력과 유속으로 내부에서 도금액을 유통하면서 피도금 부재를 도금처리를 하는 폐쇄형 도금 처리 컵과, 상기 도금액을 저장하는 액 저장 탱크와, 상기 액 저장 탱크로부터 상기 도금액을 상기 폐쇄형 도금 처리 컵에 공급하는 펌프를 구비하고, 상기 펌프가 상기 폐쇄형 도금 처리 컵내의 도금액의 압력과 유속의 적어도 한쪽을 주기적으로 변화시키도록 구성된 것을 특징으로 하는 도금처리장치.
- 한쪽의 개구가 개방되고 다른 쪽의 개구가 막힌 복수의 블라인드 홀을 갖는 피처리 부재에 대하여, 상기 각 블라인드 홀의 내표면을 포함하는 표면을 화학적 처리를 하는 화학적 처리방법에 있어서,폐쇄형 처리 컵내에 처리액을 소정 압력과 유속으로 유통시키는 것, 상기 각 블라인드 홀의 개방된 한쪽의 개구가 처리액에 접하도록 하여 상기 폐쇄형 처리 컵내에 상기 피처리 부재를 배치하는 것 및 상기 폐쇄형 처리 컵내를 유통하는 처리액의 압력과 유속의 적어도 한쪽을 주기적으로 변화시키는 것을 포함하고 있는 것을 특징으로 하는 화학적 처리방법.
Applications Claiming Priority (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2001103431 | 2001-04-02 | ||
JPJP-P-2001-00103431 | 2001-04-02 | ||
JP2001363086A JP2002363788A (ja) | 2001-04-02 | 2001-11-28 | 化学的処理装置とメッキ処理装置および化学的処理方法とメッキ処理方法と残渣除去処理方法ならびにそれを用いた半導体装置の製造方法およびプリント基板の製造方法 |
JPJP-P-2001-00363086 | 2001-11-28 |
Publications (2)
Publication Number | Publication Date |
---|---|
KR20020077811A KR20020077811A (ko) | 2002-10-14 |
KR100477055B1 true KR100477055B1 (ko) | 2005-03-17 |
Family
ID=18956495
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR10-2002-0016429A KR100477055B1 (ko) | 2001-04-02 | 2002-03-26 | 화학적 처리장치와 도금처리장치 및 화학적 처리방법 |
Country Status (4)
Country | Link |
---|---|
US (3) | US20020139684A1 (ko) |
JP (1) | JP2002363788A (ko) |
KR (1) | KR100477055B1 (ko) |
TW (1) | TWI237070B (ko) |
Families Citing this family (19)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6881437B2 (en) | 2003-06-16 | 2005-04-19 | Blue29 Llc | Methods and system for processing a microelectronic topography |
WO2004114386A2 (en) * | 2003-06-16 | 2004-12-29 | Blue29 Corporation | Methods and system for processing a microelectronic topography |
US6860944B2 (en) * | 2003-06-16 | 2005-03-01 | Blue29 Llc | Microelectronic fabrication system components and method for processing a wafer using such components |
US7883739B2 (en) * | 2003-06-16 | 2011-02-08 | Lam Research Corporation | Method for strengthening adhesion between dielectric layers formed adjacent to metal layers |
CN100393917C (zh) * | 2003-12-26 | 2008-06-11 | 台湾积体电路制造股份有限公司 | 化学电镀方法和装置 |
KR100832705B1 (ko) * | 2006-12-23 | 2008-05-28 | 동부일렉트로닉스 주식회사 | 시스템 인 패키지의 비아 도금방법 및 그 시스템 |
US7776741B2 (en) * | 2008-08-18 | 2010-08-17 | Novellus Systems, Inc. | Process for through silicon via filing |
US9109295B2 (en) | 2009-10-12 | 2015-08-18 | Novellus Systems, Inc. | Electrolyte concentration control system for high rate electroplating |
US10472730B2 (en) | 2009-10-12 | 2019-11-12 | Novellus Systems, Inc. | Electrolyte concentration control system for high rate electroplating |
CN103880127A (zh) * | 2012-12-21 | 2014-06-25 | 陈晓波 | 一种等离子管式液体表面放电水处理装置 |
JP2015178661A (ja) * | 2014-03-19 | 2015-10-08 | 株式会社荏原製作所 | 無電解めっき方法 |
CN104328465B (zh) * | 2014-11-10 | 2017-05-24 | 浙江振有电子股份有限公司 | Hdi印制线路板高均匀性通孔电镀装置 |
US20200303748A1 (en) * | 2017-04-24 | 2020-09-24 | University Of North Texas | Nanomanufacturing of metallic glasses for energy conversion and storage |
TWI774797B (zh) | 2017-07-10 | 2022-08-21 | 美商應用材料股份有限公司 | 具有減少的夾帶空氣的電鍍系統 |
US10692735B2 (en) | 2017-07-28 | 2020-06-23 | Lam Research Corporation | Electro-oxidative metal removal in through mask interconnect fabrication |
CN111560638B (zh) * | 2020-07-06 | 2021-06-29 | 苏州清飙科技有限公司 | 晶圆电镀设备 |
CN112813482B (zh) * | 2020-12-30 | 2021-11-02 | 泉芯集成电路制造(济南)有限公司 | 芯片电镀***及芯片电镀控制方法 |
CN113873774B (zh) * | 2021-09-15 | 2023-08-29 | 江苏贺鸿电子有限公司 | 一种印刷电路板制作的水平沉铜装置 |
CN113930813B (zh) * | 2021-11-17 | 2022-04-08 | 珠海市创智芯科技有限公司 | 一种应用于晶圆级封装的电镀铜溶液及其电镀工艺 |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
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JPS609129A (ja) * | 1983-06-29 | 1985-01-18 | Fujitsu Ltd | ウエツト処理装置 |
KR970059847U (ko) * | 1996-04-10 | 1997-11-10 | 반도체 웨이퍼 처리액 공급장치 | |
KR980012052A (ko) * | 1996-07-18 | 1998-04-30 | 문정환 | 반도체 웨이퍼 습식 처리장치 |
KR20010003515A (ko) * | 1999-06-23 | 2001-01-15 | 김무 | 반도체 기질 도금장치 및 방법 |
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US5290423A (en) * | 1992-04-27 | 1994-03-01 | Hughes Aircraft Company | Electrochemical interconnection |
US5520205A (en) * | 1994-07-01 | 1996-05-28 | Texas Instruments Incorporated | Apparatus for wafer cleaning with rotation |
DE19534521C1 (de) * | 1995-09-06 | 1996-11-21 | Atotech Deutschland Gmbh | Verfahren und Vorrichtung zum Behandeln von sich in Werkstücke erstreckende Löcher oder Vertiefungen mit flüssigen Behandlungsmitteln und Anwendung des Verfahrens zur Behandlung von Leiterplatten |
JP3490238B2 (ja) * | 1997-02-17 | 2004-01-26 | 三菱電機株式会社 | メッキ処理装置およびメッキ処理方法 |
JP3462970B2 (ja) * | 1997-04-28 | 2003-11-05 | 三菱電機株式会社 | メッキ処理装置およびメッキ処理方法 |
TW405158B (en) * | 1997-09-17 | 2000-09-11 | Ebara Corp | Plating apparatus for semiconductor wafer processing |
US6616774B2 (en) * | 1997-12-26 | 2003-09-09 | Spc Electronics | Wafer cleaning device and tray for use in wafer cleaning device |
EP1055020A2 (en) * | 1998-02-12 | 2000-11-29 | ACM Research, Inc. | Plating apparatus and method |
US6395152B1 (en) * | 1998-07-09 | 2002-05-28 | Acm Research, Inc. | Methods and apparatus for electropolishing metal interconnections on semiconductor devices |
EP1070159A4 (en) * | 1998-10-14 | 2004-06-09 | Faraday Technology Inc | ELECTRIC COATING OF METALS IN SMALL CUTOUTS USING MODULATED ELECTRICAL FIELDS |
US6454918B1 (en) * | 1999-03-23 | 2002-09-24 | Electroplating Engineers Of Japan Limited | Cup type plating apparatus |
-
2001
- 2001-08-02 US US09/919,875 patent/US20020139684A1/en not_active Abandoned
- 2001-11-28 JP JP2001363086A patent/JP2002363788A/ja active Pending
-
2002
- 2002-03-05 TW TW091104068A patent/TWI237070B/zh not_active IP Right Cessation
- 2002-03-11 US US10/093,417 patent/US20020139663A1/en not_active Abandoned
- 2002-03-26 KR KR10-2002-0016429A patent/KR100477055B1/ko active IP Right Grant
-
2003
- 2003-09-16 US US10/662,475 patent/US20040060824A1/en not_active Abandoned
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS609129A (ja) * | 1983-06-29 | 1985-01-18 | Fujitsu Ltd | ウエツト処理装置 |
KR970059847U (ko) * | 1996-04-10 | 1997-11-10 | 반도체 웨이퍼 처리액 공급장치 | |
KR980012052A (ko) * | 1996-07-18 | 1998-04-30 | 문정환 | 반도체 웨이퍼 습식 처리장치 |
KR20010003515A (ko) * | 1999-06-23 | 2001-01-15 | 김무 | 반도체 기질 도금장치 및 방법 |
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US20020139663A1 (en) | 2002-10-03 |
JP2002363788A (ja) | 2002-12-18 |
US20020139684A1 (en) | 2002-10-03 |
TWI237070B (en) | 2005-08-01 |
US20040060824A1 (en) | 2004-04-01 |
KR20020077811A (ko) | 2002-10-14 |
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