JPWO2020256094A1 - プラズマ処理装置およびプラズマ処理方法 - Google Patents
プラズマ処理装置およびプラズマ処理方法 Download PDFInfo
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- JPWO2020256094A1 JPWO2020256094A1 JP2021526900A JP2021526900A JPWO2020256094A1 JP WO2020256094 A1 JPWO2020256094 A1 JP WO2020256094A1 JP 2021526900 A JP2021526900 A JP 2021526900A JP 2021526900 A JP2021526900 A JP 2021526900A JP WO2020256094 A1 JPWO2020256094 A1 JP WO2020256094A1
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- H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
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- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Computer Hardware Design (AREA)
- General Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Inorganic Chemistry (AREA)
- Electromagnetism (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Drying Of Semiconductors (AREA)
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- Chemical Vapour Deposition (AREA)
Abstract
Description
101…真空容器
102…シャワープレート
102a…ガス導入孔
103…誘電体窓
104…処理室
105…導波管
106…電界発生用電源
107…磁場発生コイル
108…電極基材
109…半導体ウエハ
110…真空排気口
111…導電体膜
112…接地箇所
113…サセプタリング
116…プラズマ
120…ウエハ載置用電極
120a…載置面
120b…上面
120c…貫通孔
120d…凹み部
124…高周波電源
125…高周波フィルタ
126…直流電源
127…高周波電源
128,129…整合器
130…負荷インピーダンス可変ボックス
131…導体リング
132…締結ネジ
133…給電ボス
134…Oリング
135…梁状部材
136…絶縁性ネジ
137…上部サセプタリング
138…当たり面
139…絶縁リング
139a,139d…貫通孔
140…誘電体膜
141…空間
142…絶縁性スリーブ
143…絶縁性皮膜
144…絶縁ボス
145…シール部材
146…電極ベース
147…連結コラム
148…案内部材
149…空間
150…絶縁プレート
151…接地プレート
152…冷媒流路
153…撚り線
160…電界・磁界形成部
161…給電コネクタ
162,163…締結ネジ
164…蓋部材。
Claims (8)
- 真空容器内部に配置された処理室と、当該処理室内部に配置されその上面に処理対象のウエハが載置される試料台と、当該試料台の前記上面の外周側でこれを囲んで配置され高周波電力が供給される導体製のリング状電極と、当該リング状電極の上方で載せられてこれを覆う誘電体製のカバーと、前記試料台を構成して円板または円筒形状を有した基材と、当該基材の外周側部分に配置された貫通孔内に吊り下げられて配置されその上端部に前記リング状電極と接続されてこれに位置決めされたコネクタ部を有した棒状部材と、前記貫通孔の下方の前記試料台下方で隙間を空けて配置された水平方向に延在する梁状の部材であってその一端が前記棒状部材の下端部と連結され他端が前記試料台に対して位置決めされ前記棒状部材を前記他端について前記リング状電極に対して上向きに付勢する梁状の部材と、給電経路を介して前記棒状部材に接続され前記リング状電極に高周波電力を供給する高周波電源とを備えたプラズマ処理装置。
- 請求項1に記載のプラズマ処理装置であって、
前記梁状の部材の前記他端が前記基材の中央部の下方で前記試料台に対して位置決めされたプラズマ処理装置。 - 請求項1または2に記載のプラズマ処理装置であって、
前記棒状部材が前記給電経路を構成するプラズマ処理装置。 - 請求項1乃至3の何れかに記載のプラズマ処理装置であって、
前記梁状の部材が前記棒状部材を上向きに付勢する板バネであるプラズマ処理装置。 - 請求項1乃至4の何れかに記載のプラズマ処理装置であって、
金属製の前記梁状の部材が前記給電経路を構成するプラズマ処理装置。 - 請求項1乃至5の何れかに記載のプラズマ処理装置であって、
前記試料台の前記上面を覆って前記ウエハが載せられる誘電体製の膜とこの誘電体製の膜内部に配置され前記ウエハの処理中に高周波電力が供給される膜状の電極とを備え、前記基材が接地電位と電気的に接続されたプラズマ処理装置。 - 請求項1乃至6の何れかに記載のプラズマ処理装置であって、
前記試料台内部に配置され前記ウエハを加熱するヒータを備えたプラズマ処理装置。 - 真空容器内部の処理室内に配置された試料台上に処理対象のウエハを配置し、前記処理室内にプラズマを形成して前記ウエハを処理するプラズマ処理方法であって、
前記処理中に前記試料台の内部に配置された電極に第1の高周波電力を供給しつつ、前記試料台の前記ウエハの外周側に配置された誘電体製のリング状カバーの下方で当該リング状カバーに覆われたリング状の電極に第2の高周波電力を供給する工程を備え、
前記試料台の内部を貫通する貫通孔の内部に配置され前記リング状の電極と接続された導電体製の棒状の部材およびその一端部が当該棒状の部材の下端部と接続され他端部前記試料台に対して位置が固定された導電体製の板状のバネ部材を通して前記高周波電力を前記リング状の電極に供給するプラズマ処理方法。
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