JPWO2018216309A1 - 固体撮像素子、固体撮像素子の製造方法及び電子機器 - Google Patents
固体撮像素子、固体撮像素子の製造方法及び電子機器 Download PDFInfo
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- 238000003384 imaging method Methods 0.000 title claims abstract description 41
- 238000004519 manufacturing process Methods 0.000 title claims description 16
- 239000011737 fluorine Substances 0.000 claims abstract description 40
- 229910052731 fluorine Inorganic materials 0.000 claims abstract description 40
- 239000000758 substrate Substances 0.000 claims abstract description 28
- 238000006243 chemical reaction Methods 0.000 claims abstract description 23
- 239000004065 semiconductor Substances 0.000 claims abstract description 15
- YCKRFDGAMUMZLT-UHFFFAOYSA-N Fluorine atom Chemical compound [F] YCKRFDGAMUMZLT-UHFFFAOYSA-N 0.000 claims description 38
- 238000000034 method Methods 0.000 claims description 17
- 238000005468 ion implantation Methods 0.000 claims description 9
- 230000010354 integration Effects 0.000 claims description 4
- PXGOKWXKJXAPGV-UHFFFAOYSA-N Fluorine Chemical compound FF PXGOKWXKJXAPGV-UHFFFAOYSA-N 0.000 abstract 1
- 238000009792 diffusion process Methods 0.000 description 17
- 238000002513 implantation Methods 0.000 description 16
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 15
- 239000012535 impurity Substances 0.000 description 15
- 229910052710 silicon Inorganic materials 0.000 description 15
- 239000010703 silicon Substances 0.000 description 15
- 150000002500 ions Chemical class 0.000 description 7
- 230000003321 amplification Effects 0.000 description 6
- 239000010410 layer Substances 0.000 description 6
- 238000003199 nucleic acid amplification method Methods 0.000 description 6
- 238000002347 injection Methods 0.000 description 5
- 239000007924 injection Substances 0.000 description 5
- 239000011229 interlayer Substances 0.000 description 4
- 230000002093 peripheral effect Effects 0.000 description 4
- 229910021332 silicide Inorganic materials 0.000 description 4
- FVBUAEGBCNSCDD-UHFFFAOYSA-N silicide(4-) Chemical compound [Si-4] FVBUAEGBCNSCDD-UHFFFAOYSA-N 0.000 description 4
- 125000006850 spacer group Chemical group 0.000 description 3
- 239000003990 capacitor Substances 0.000 description 2
- 238000005229 chemical vapour deposition Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000009826 distribution Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000002955 isolation Methods 0.000 description 2
- 239000011159 matrix material Substances 0.000 description 2
- 230000001681 protective effect Effects 0.000 description 2
- 238000001004 secondary ion mass spectrometry Methods 0.000 description 2
- 229910052581 Si3N4 Inorganic materials 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- 229910008284 Si—F Inorganic materials 0.000 description 1
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 1
- NRTOMJZYCJJWKI-UHFFFAOYSA-N Titanium nitride Chemical compound [Ti]#N NRTOMJZYCJJWKI-UHFFFAOYSA-N 0.000 description 1
- 238000009825 accumulation Methods 0.000 description 1
- 239000010941 cobalt Substances 0.000 description 1
- 229910017052 cobalt Inorganic materials 0.000 description 1
- GUTLYIVDDKVIGB-UHFFFAOYSA-N cobalt atom Chemical compound [Co] GUTLYIVDDKVIGB-UHFFFAOYSA-N 0.000 description 1
- 230000000295 complement effect Effects 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- -1 fluorine ions Chemical class 0.000 description 1
- 229910044991 metal oxide Inorganic materials 0.000 description 1
- 150000004706 metal oxides Chemical class 0.000 description 1
- 230000007935 neutral effect Effects 0.000 description 1
- 229910021334 nickel silicide Inorganic materials 0.000 description 1
- RUFLMLWJRZAWLJ-UHFFFAOYSA-N nickel silicide Chemical compound [Ni]=[Si]=[Ni] RUFLMLWJRZAWLJ-UHFFFAOYSA-N 0.000 description 1
- 230000000149 penetrating effect Effects 0.000 description 1
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 1
- 229920005591 polysilicon Polymers 0.000 description 1
- 229920006395 saturated elastomer Polymers 0.000 description 1
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 1
- 229910052814 silicon oxide Inorganic materials 0.000 description 1
- 239000010936 titanium Substances 0.000 description 1
- 229910052719 titanium Inorganic materials 0.000 description 1
- 229910021341 titanium silicide Inorganic materials 0.000 description 1
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 1
- 239000010937 tungsten Substances 0.000 description 1
- 229910052721 tungsten Inorganic materials 0.000 description 1
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- H01L21/78—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices
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- H01L21/8232—Field-effect technology
- H01L21/8234—MIS technology, i.e. integration processes of field effect transistors of the conductor-insulator-semiconductor type
- H01L21/8238—Complementary field-effect transistors, e.g. CMOS
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- H01L27/144—Devices controlled by radiation
- H01L27/146—Imager structures
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- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
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- H04N25/60—Noise processing, e.g. detecting, correcting, reducing or removing noise
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- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
- H04N25/00—Circuitry of solid-state image sensors [SSIS]; Control thereof
- H04N25/70—SSIS architectures; Circuits associated therewith
- H04N25/71—Charge-coupled device [CCD] sensors; Charge-transfer registers specially adapted for CCD sensors
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Abstract
Description
本発明の一実施形態に係る固体撮像素子1は、CMOS型イメージセンサである。CMOS型イメージセンサは、一般に、受光領域と、フローティングディフュージョン部(FD部)と、アナログ‐デジタル変換回路部(Analog Digital Converter、以下、「ADC回路部」と称する。)とを有する。受光領域は、画像光の光電変換を行い、フローティングディフュージョン部は、光電変換により得られた信号電荷を電圧信号に変換し、ADC回路部は、変換された信号電荷をアナログ‐デジタル変換する。受光領域、フローティングディフュージョン部及びADC回路部は共通基板上に設けられる。
図2は、ADC回路部12の概略構成を示す平面図である。
図3は、Comparator26の構成を示す回路図である。図3に示すように、Comparator26は、p型MOSトランジスタ32及びn型MOSトランジスタ33から構成されるCMOSトランジスタであるインバータ回路31を含む。
固体撮像素子1は、固体撮像素子1を画像入力デバイスとして撮像部に用いた、例えばデジタルビデオカメラおよびデジタルスチルカメラなどのデジタルカメラや監視カメラなどの画像入力カメラ、スキャナ装置、ファクシミリ装置、テレビジョン電話装置、カメラ付き携帯電話装置などの電子機器に適用可能である。
本実施形態によれば、ADC回路部12を構成する回路、特に、Comparator26に含まれるインバータ回路へフッ素注入することにより、ADC回路部起因の1/fノイズを低減することができる。これにより、固体撮像素子及びその製造方法、並びに、低ノイズ性能を有する固体撮像素子を用いた電子機器を実現することができる。
本発明の態様1に係る固体撮像素子1は、画素領域11と、画素領域11に配置された画素51から出力される電圧信号をアナログ‐デジタル変換するアナログ‐デジタル変換回路部12とを備え、アナログ‐デジタル変換回路部12は、シリコン基板100とシリコン基板100上に配置されたゲート酸化膜102との界面の近傍にフッ素が集積されているMOSトランジスタ(p型MOSトランジスタ32及び/又はn型MOSトランジスタ33)を含む。
11 画素領域
12 アナログ‐デジタル変換回路部
13 周辺回路部
22 RAMP
23 ColumnA/D
24 Gray Code Counter
25 Capacitor
26 Comparator(比較器)
27 W−Latch
31 インバータ回路
32 p型MOSトランジスタ
33 n型MOSトランジスタ
50 Sensor Array
51 画素
100 シリコン基板(半導体基板)
101 素子分離領域
102 ゲート酸化膜
103 ゲート電極
104 低濃度不純物拡散領域
105 注入保護膜
106 サイドウォールスペーサ
107 レジスト膜
108 注入ダメージ層
109 注入保護膜
110 高濃度不純物拡散領域
111 シリサイド膜
112 ストッパ層
113 層間絶縁膜
114 コンタクトプラグ
115 配線
Claims (10)
- 画素領域と、
前記画素領域に配置された画素から出力される電圧信号をアナログ‐デジタル変換するアナログ‐デジタル変換回路部と
を備え、
前記アナログ‐デジタル変換回路部は、半導体基板と当該半導体基板上に配置されたゲート酸化膜との界面の近傍にフッ素が集積されているMOSトランジスタを含むことを特徴とする固体撮像素子。 - 前記MOSトランジスタは、前記界面に存在するダングリングボンドがフッ素により終端されていることを特徴とする請求項1に記載の固体撮像素子。
- 前記半導体基板、前記ゲート酸化膜及び前記ゲート酸化膜上に配置されたゲート電極における、前記半導体基板に対して垂直な方向に沿ったフッ素濃度プロファイルは、前記界面の近傍において最大値をとることを特徴とする請求項1又は2に記載の固体撮像素子。
- 前記ゲート電極から前記半導体基板に向う方向に沿ったイオン注入によるフッ素の平均飛程は、前記ゲート電極の内部における、前記ゲート電極の中間厚位置から前記ゲート電極と前記ゲート酸化膜との界面までの範囲にあることを特徴とする請求項3に記載の固体撮像素子。
- 前記アナログ‐デジタル変換回路部は、前記画素から出力される電圧信号のレベルが基準値に達しているか否かを判断する比較器を含み、
前記比較器は、前記MOSトランジスタを含むCMOSトランジスタから構成されたインバータ回路であることを特徴とする請求項1から4のいずれか1項に記載の固体撮像素子。 - 請求項1から5のいずれか1項に記載の固体撮像素子の製造方法であって、
半導体基板上に、ゲート酸化膜及びゲート電極を、この順で形成する形成工程と、
前記半導体基板と前記ゲート酸化膜との界面の近傍にフッ素を集積する集積工程と
を含むことを特徴とする固体撮像素子の製造方法。 - 前記集積工程において、前記ゲート電極に含まれるフッ素を前記界面の近傍まで熱拡散させて前記界面に存在するダングリングボンドをフッ素で終端することを特徴とする請求項6に記載の固体撮像素子の製造方法。
- 前記集積工程において、前記ゲート電極から前記ゲート酸化膜に向う方向に沿ったイオン注入により前記ゲート電極にフッ素を導入することを特徴とする請求項7に記載の固体撮像素子の製造方法。
- 前記イオン注入のドーズ量は、1×1015/cm2以上、1×1016/cm2以下であることを特徴とする請求項8に記載の固体撮像素子の製造方法。
- 請求項1〜5のいずれか1項に記載の固体撮像素子を備える電子機器。
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Citations (7)
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---|---|---|---|---|
JPH02159069A (ja) * | 1988-12-12 | 1990-06-19 | Nippon Telegr & Teleph Corp <Ntt> | 半導体装置の製造方法 |
JPH11103050A (ja) * | 1997-09-29 | 1999-04-13 | Fujitsu Ltd | 半導体装置及びその製造方法 |
JP2005311487A (ja) * | 2004-04-19 | 2005-11-04 | Sony Corp | 固体撮像装置および固体撮像装置の駆動方法 |
JP2007200976A (ja) * | 2006-01-24 | 2007-08-09 | Matsushita Electric Ind Co Ltd | 半導体装置の製造方法 |
JP2008300779A (ja) * | 2007-06-04 | 2008-12-11 | Elpida Memory Inc | 半導体装置及びその製造方法 |
JP2011229120A (ja) * | 2010-03-30 | 2011-11-10 | Sony Corp | 固体撮像装置、固体撮像装置の信号処理方法、及び、電子機器 |
JP2015090971A (ja) * | 2013-11-07 | 2015-05-11 | ルネサスエレクトロニクス株式会社 | 固体撮像素子およびその製造方法 |
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JP2004356554A (ja) * | 2003-05-30 | 2004-12-16 | Semiconductor Leading Edge Technologies Inc | 半導体装置及び半導体装置の製造方法 |
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Patent Citations (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH02159069A (ja) * | 1988-12-12 | 1990-06-19 | Nippon Telegr & Teleph Corp <Ntt> | 半導体装置の製造方法 |
JPH11103050A (ja) * | 1997-09-29 | 1999-04-13 | Fujitsu Ltd | 半導体装置及びその製造方法 |
JP2005311487A (ja) * | 2004-04-19 | 2005-11-04 | Sony Corp | 固体撮像装置および固体撮像装置の駆動方法 |
JP2007200976A (ja) * | 2006-01-24 | 2007-08-09 | Matsushita Electric Ind Co Ltd | 半導体装置の製造方法 |
JP2008300779A (ja) * | 2007-06-04 | 2008-12-11 | Elpida Memory Inc | 半導体装置及びその製造方法 |
JP2011229120A (ja) * | 2010-03-30 | 2011-11-10 | Sony Corp | 固体撮像装置、固体撮像装置の信号処理方法、及び、電子機器 |
JP2015090971A (ja) * | 2013-11-07 | 2015-05-11 | ルネサスエレクトロニクス株式会社 | 固体撮像素子およびその製造方法 |
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