JPWO2008084811A1 - 回路部材接続用接着剤及びこれを用いた半導体装置 - Google Patents
回路部材接続用接着剤及びこれを用いた半導体装置 Download PDFInfo
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- JPWO2008084811A1 JPWO2008084811A1 JP2008553105A JP2008553105A JPWO2008084811A1 JP WO2008084811 A1 JPWO2008084811 A1 JP WO2008084811A1 JP 2008553105 A JP2008553105 A JP 2008553105A JP 2008553105 A JP2008553105 A JP 2008553105A JP WO2008084811 A1 JPWO2008084811 A1 JP WO2008084811A1
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Classifications
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Abstract
Description
前記回路部材接続用接着剤が、
熱可塑性樹脂、架橋性樹脂及び該架橋性樹脂に架橋構造を形成させる硬化剤を含有する樹脂組成物と、
該樹脂組成物中に分散された複合酸化物粒子と、を含む回路部材接続用接着剤。
前記回路部材接続用接着剤が、
熱可塑性樹脂、架橋性樹脂及び該架橋性樹脂に架橋構造を形成させる硬化剤を含有する樹脂組成物と、
該樹脂組成物中に分散された、コージェライト粒子を含有する複合酸化物粒子と、を含む回路部材接続用接着剤。
前記架橋性樹脂がエポキシ樹脂であり、
前記硬化剤がマイクロカプセル型硬化剤である(1)〜(12)のいずれかに記載の回路部材接続用接着剤。
(初期発熱量−加熱後発熱量)/(初期発熱量)×100
架橋性樹脂としてエポキシ樹脂NC7000(日本化薬株式会社製、商品名)15重量部、この架橋性樹脂と反応する硬化剤としてフェノールアラルキル樹脂XLC−LL(三井化学株式会社製、商品名)15重量部、分子量100万以下、Tg40℃以下、かつ架橋性樹脂と反応可能な官能基を側鎖に少なくとも1カ所含む共重合性樹脂としてエポキシ基含有アクリルゴムHTR−860P−3(ナガセケムテックス株式会社製、商品名、重量平均分子量30万)20重量部、マイクロカプセル型硬化剤としてHX−3941HP(旭化成株式会社製、商品名)50重量部及びシランカップリング剤SH6040(東レ・ダウコーニングシリコーン製、商品名)を用い、表1記載の組成でトルエンと酢酸エチルの混合溶媒中に溶解し、接着樹脂組成物のワニスを得た。
実施例1と同様に表1記載の組成で、実施例1と同様の工程を経て接着樹脂組成物のワニスを作製した後、透過性確認用フィルムを作製すると共に、回路部材接続用接着剤の絶縁性接着剤層を得た。
実施例1〜4と同様に表1記載の組成で、実施例1と同様の工程を経て接着樹脂組成物のワニスを得た。このワニスにホウ酸アルミニウム(9Al2O3・2B2O3、四国化成工業株式会社製、比重3.0、線膨張係数2.6×−6/℃、屈折率1.62)を使用した以外は実施例1と同様の工程を経て透過性確認用フィルムを作製すると共に、回路部材接続用接着剤の絶縁性接着剤層を得た。
実施例1と同様に表1記載の組成で、実施例1と同様の工程を経てコージェライト粒子入り接着樹脂組成物のワニスを調整し、セパレータフィルム上に厚み45μmの回路部材接続用接着剤を得た。
架橋性樹脂としてエポキシ樹脂EP1032H60(ジャパンエポキシレジン株式会社製、商品名)、フェノキシ樹脂YP50S(東都化成株式会社製、商品名、重量平均分子量7万)、マイクロカプセル型硬化剤としてHX−3941HP(旭化成株式会社製、商品名)及びシランカップリング剤SH6040(東レ・ダウコーニングシリコーン製、商品名)を表1記載の組成で混ぜ、トルエンと酢酸エチルの混合溶媒中に溶解し、接着樹脂組成物のワニスを得た。
実施例1で得た絶縁性接着剤層に、さらに、ポリスチレンを核とする粒子の表面に厚み0.2μmのニッケル層を設け、ニッケル層の外側に、厚み0.04μmの金層を設けた平均粒径3μmの導電粒子を混ぜる以外は上記と同様の手順で表2記載の組成で透過性確認用フィルムを作製し、セパレータ上に厚み5μmの回路部材接続用接着剤の粒子層を得た。絶縁性接着剤層と粒子層をラミネータで貼り合せ、厚み25μmの回路部材接続用異方導電接着剤を得た。
実施例2〜4で得た絶縁性接着剤層に、さらに、ポリスチレンを核とする粒子の表面に厚み0.2μmのニッケル層を設け、これ以外は実施例8と同様の工程を経て厚み25μmの回路部材接続用異方導電接着剤を得た。
実施例5で得た絶縁性接着剤層に、さらに、ポリスチレンを核とする粒子の表面に厚み0.2μmのニッケル層を設け、これ以外は実施例8と同様の工程を経て厚み25μmの回路部材接続用異方導電接着剤を得た。
架橋性樹脂としてエポキシ樹脂NC7000(日本化薬株式会社製、商品名)、架橋性樹脂と反応する硬化剤としてフェノールアラルキル樹脂XLC−LL(三井化学株式会社製、商品名)、分子量100万以下、Tg40℃以下、かつ架橋性樹脂と反応可能な官能基を側鎖に少なくとも1カ所含む共重合性樹脂としてエポキシ基含有アクリルゴムHTR−860−3(ナガセケムテックス株式会社製、商品名、重量平均分子量30万)、マイクロカプセル型硬化剤としてHX−3941HP(旭化成株式会社製、商品名)及びシランカップリング剤SH6040(東レ・ダウコーニングシリコーン製、商品名)を用いて、表3記載の組成でトルエンと酢酸エチルの混合溶媒中に溶解し、接着樹脂組成物のワニスを得た。
比較例1と同様に表3記載の組成で、比較例1と同様の工程を経て接着樹脂組成物のワニスを作製した後、透過性確認用フィルムを作製すると共に、回路部材接続用接着剤の絶縁性接着剤層を得た。
比較例1及び比較例2と同様に表3記載の組成で、比較例1と同様の工程を経て接着樹脂組成物のワニスを得た後、セパレータフィルム(PETフィルム)上ロールコータを用いて塗布し、70℃のオーブンで10分間乾燥させて、セパレータ上に厚み20μmの回路部材接続用接着剤の絶縁性接着剤層を得た。
架橋性樹脂としてエポキシ樹脂NC7000(日本化薬株式会社製、商品名)、分子量100万以下、Tg40℃以下、かつ架橋性樹脂と反応可能な官能基を側鎖に少なくとも1カ所含む共重合性樹脂としてエポキシ基含有アクリルゴムHTR−860P−3(ナガセケムテックス株式会社製、商品名、重量平均分子量30万)、硬化剤として2PHZ(四国化成工業製株式会社製、商品名)、シランカップリング剤SH6062(東レ・ダウコーニングシリコーン製、商品名)、及びA1160(日本ユニカー株式会社製、商品名)及びシリカ微粒子アエロジル(登録商標)R805(日本アエロジル株式会社製、商品名、一次粒径17nm)を表3記載の組成でトルエンと酢酸エチルの混合溶媒中に溶解し、接着樹脂組成物のワニスを得た。
架橋性樹脂としてエポキシ樹脂NC7000(日本化薬株式会社製、商品名)、架橋性樹脂と反応する硬化剤としてフェノールアラルキル樹脂XLC−LL(三井化学株式会社製、商品名)、マイクロカプセル型硬化剤の代わりに液状エポキシ樹脂エピコート828(ジャパンエポキシレジン社製、商品名)及び硬化剤2PHZ(四国化成工業株式会社製、商品名)、分子量100万以下、Tg40℃以下、かつ架橋性樹脂と反応可能な官能基を側鎖に少なくとも1カ所含む共重合性樹脂としてエポキシ基含有アクリルゴムHTR−860P−3(ナガセケムテックス株式会社製、商品名、重量平均分子量30万)、シランカップリング剤SH6040(東レ・ダウコーニングシリコーン製、商品名)及びシリカ微粒子アエロジル(登録商標)R805(日本アエロジル工業製、商品名、一次粒径17nm)を表3記載の組成でトルエンと酢酸エチルの混合溶媒中に溶解し、接着樹脂組成物のワニスを得た。
実施例1のコージェライト粒子をシリカ微粒子アエロジル(登録商標)R805(日本アエロジル株式会社製、商品名、一次粒径17nm)に代えた以外は、表3記載の組成で、実施例1と同様の工程を経て接着樹脂組成物のワニスを作製した後、透過性確認用フィルムを作製すると共に、回路部材接続用接着剤の絶縁性接着剤層を得た。
比較例1〜6で得た絶縁性接着剤層に、さらに、ポリスチレンを核とする粒子の表面に厚み0.2μmのニッケル層を設け、ニッケル層の外側に、厚み0.04μmの金層を設けた平均粒径3μmの導電粒子を混ぜる以外は上記と同様の手順で表2記載の組成で透過性確認用フィルムを作製し、該透過性確認用フィルム上に厚み5μmの回路部材接続用接着剤の粒子層を得た。絶縁性接着剤層と粒子層をラミネータで貼り合せ、厚み25μmの回路部材接続用異方導電接着剤を得た。
ジェイシーエム製のダイアタッチフィルムマウンターの吸着ステージを80℃に加熱後、吸着ステージ上に金めっきバンプが形成された厚さ150μm、直径6インチの半導体ウェハをバンプ側を上に向けて搭載した。
ダイシングフレームに固定された半導体ウェハ/回路部材接続用接着剤/ダイシングテープ積層体を、株式会社ディスコ製フルオートマチックダイシングソーDFD6361(商品名)に半導体ウェハのバックグラインド面を上に向けて搭載した。IRカメラによってウェハを透過してスクライブラインの位置合わせを行った。
回路部材接続用接着剤付き半導体チップのバックグラインド面を、株式会社アルテクス製、超音波フリップチップボンダーSH−50MP(商品名)の吸着ヘッド側に向けてチップを吸引し、モリテックス社製のハロゲン光源及びライトガイドによって回路部材接続用接着剤層側から光を照射し、半導体チップ表面に形成された位置合わせマークを識別して位置合わせを行った。
各実施例及び各比較例記載の回路部材接続用接着剤をセパレータごと180℃に設定したオーブンに3時間放置し、加熱硬化処理を行った。加熱硬化後のフィルムをセパレータからはく離し、30mm×2mmの大きさに切断した。セイコーインスツルメンツ株式社製のTMA/SS6100(商品名)を用い、チャック間20mmに設定後、測定温度範囲20℃〜300℃、昇温速度5℃/min、断面積に対し0.5MPa圧力となる荷重条件で引張り試験モードにて熱機械分析を行い、線膨張係数を求めた。
各実施例及び各比較例記載の回路部材接続用接着剤をアルミ製測定容器に2〜10mg計量した後、株式会社パーキンエルマー製のDSC Pylis1(商品名)で30〜300℃まで20℃/minの昇温速度で発熱量測定を行い、これを初期発熱量とした。
(初期発熱量−加熱後発熱量)/(初期発熱量)×100
Claims (15)
- 突出した接続端子を有する半導体チップと配線パターンの形成された基板との間に介在させて、加圧・加熱することにより、相対向させた前記接続端子と前記配線パターンを電気的に接続すると共に、前記半導体チップと前記基板を接着する回路部材接続用接着剤であって、
熱可塑性樹脂、架橋性樹脂及び該架橋性樹脂に架橋構造を形成させる硬化剤を含有する樹脂組成物と、
該樹脂組成物中に分散された複合酸化物粒子と、を含む回路部材接続用接着剤。 - 前記樹脂組成物と前記複合酸化物粒子の屈折率差が±0.06の範囲内である請求項1記載の回路部材接続用接着剤。
- 前記複合酸化物粒子が、屈折率1.5〜1.7であり2種類以上の金属元素を含む複合酸化物からなる粒子である請求項1又は2記載の回路部材接続用接着剤。
- 前記複合酸化物粒子が、アルミニウム及びマグネシウムから選ばれる少なくとも1種類の金属元素と、該金属元素以外の金属元素又はメタロイド元素とを含む酸化物からなる粒子である請求項1〜3のいずれか一項に記載の回路部材接続用接着剤。
- 前記メタロイド元素が、ケイ素及び/又はホウ素である請求項4記載の回路部材接続用接着剤。
- 前記複合酸化物粒子が、比重が4以下の複合酸化物からなる粒子である、請求項1〜5のいずれか一項に記載の回路部材接続用接着剤。
- 突出した接続端子を有する半導体チップと配線パターンの形成された基板との間に介在させて、加圧・加熱することにより、相対向させた前記接続端子と前記配線パターンを電気的に接続すると共に、前記半導体チップと前記基板を接着する回路部材接続用接着剤であって、
熱可塑性樹脂、架橋性樹脂及び該架橋性樹脂に架橋構造を形成させる硬化剤を含有する樹脂組成物と、
該樹脂組成物中に分散された、コージェライト粒子を含有する複合酸化物粒子と、を含む回路部材接続用接着剤。 - 前記複合酸化物粒子が、平均粒子径15μm以下の複合酸化物粒子である請求項1〜7のいずれか一項に記載の回路部材接続用接着剤。
- 前記樹脂組成物100重量部に対して前記複合酸化物粒子を25〜200重量部含有する請求項1〜8のいずれか一項に記載の回路部材接続用接着剤。
- 未硬化時の可視光平行透過率が、15〜100%である請求項1〜9のいずれか一項に記載の回路部材接続用接着剤。
- 180℃で20秒間加熱した後の示差走査熱量計測定での反応率が、80%以上である請求項1〜10のいずれか一項に記載の回路部材接続用接着剤。
- 硬化後の40℃〜100℃の線膨張係数が、70×10−6/℃以下である請求項1〜11のいずれか一項に記載の回路部材接続用接着剤。
- 前記熱可塑性樹脂が、重量平均分子量100万以下、ガラス転移温度40℃以下で、かつ前記架橋性樹脂と反応性の官能基を側鎖に有する共重合性樹脂であり、
前記架橋性樹脂がエポキシ樹脂であり、
前記硬化剤がマイクロカプセル型硬化剤である請求項1〜12のいずれか一項に記載の回路部材接続用接着剤。 - 平均粒径3〜5μmの導電粒子が分散された、請求項1〜13のいずれか一項に記載の回路部材接続用接着剤。
- 請求項1〜14のいずれか一項に記載の回路部材接続用接着剤により、接続端子を有する半導体チップと配線パターンの形成された基板とが電気的に接続された電子部品を備える半導体装置。
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CN102010679A (zh) | 2011-04-13 |
JP5487619B2 (ja) | 2014-05-07 |
KR101122471B1 (ko) | 2012-03-21 |
TW201233765A (en) | 2012-08-16 |
CN102051141A (zh) | 2011-05-11 |
CN101578698B (zh) | 2011-04-20 |
CN102051143A (zh) | 2011-05-11 |
TWI485227B (zh) | 2015-05-21 |
US8044524B2 (en) | 2011-10-25 |
US20100013078A1 (en) | 2010-01-21 |
US20110121447A1 (en) | 2011-05-26 |
CN102051142A (zh) | 2011-05-11 |
US20110127667A1 (en) | 2011-06-02 |
KR20110074634A (ko) | 2011-06-30 |
TWI493014B (zh) | 2015-07-21 |
CN102010679B (zh) | 2013-05-08 |
CN102051141B (zh) | 2014-12-17 |
TW200902672A (en) | 2009-01-16 |
WO2008084811A1 (ja) | 2008-07-17 |
KR20090122920A (ko) | 2009-12-01 |
CN101578698A (zh) | 2009-11-11 |
US20110133346A1 (en) | 2011-06-09 |
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