JPS647637A - Multilayer interconnection for integrated circuit - Google Patents

Multilayer interconnection for integrated circuit

Info

Publication number
JPS647637A
JPS647637A JP16122487A JP16122487A JPS647637A JP S647637 A JPS647637 A JP S647637A JP 16122487 A JP16122487 A JP 16122487A JP 16122487 A JP16122487 A JP 16122487A JP S647637 A JPS647637 A JP S647637A
Authority
JP
Japan
Prior art keywords
wiring
layer
inter
holes
film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP16122487A
Other languages
English (en)
Inventor
Shuji Asai
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp filed Critical NEC Corp
Priority to JP16122487A priority Critical patent/JPS647637A/ja
Publication of JPS647637A publication Critical patent/JPS647637A/ja
Pending legal-status Critical Current

Links

Landscapes

  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
JP16122487A 1987-06-30 1987-06-30 Multilayer interconnection for integrated circuit Pending JPS647637A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP16122487A JPS647637A (en) 1987-06-30 1987-06-30 Multilayer interconnection for integrated circuit

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP16122487A JPS647637A (en) 1987-06-30 1987-06-30 Multilayer interconnection for integrated circuit

Publications (1)

Publication Number Publication Date
JPS647637A true JPS647637A (en) 1989-01-11

Family

ID=15730987

Family Applications (1)

Application Number Title Priority Date Filing Date
JP16122487A Pending JPS647637A (en) 1987-06-30 1987-06-30 Multilayer interconnection for integrated circuit

Country Status (1)

Country Link
JP (1) JPS647637A (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5095235A (en) * 1989-12-04 1992-03-10 Mitsubishi Denki K.K. Vehicle ac generator

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5095235A (en) * 1989-12-04 1992-03-10 Mitsubishi Denki K.K. Vehicle ac generator

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