JPS6461635A - Semiconductor pressure sensor - Google Patents
Semiconductor pressure sensorInfo
- Publication number
- JPS6461635A JPS6461635A JP21952087A JP21952087A JPS6461635A JP S6461635 A JPS6461635 A JP S6461635A JP 21952087 A JP21952087 A JP 21952087A JP 21952087 A JP21952087 A JP 21952087A JP S6461635 A JPS6461635 A JP S6461635A
- Authority
- JP
- Japan
- Prior art keywords
- chip
- pressure
- semiconductor
- pipe
- sealing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Measuring Fluid Pressure (AREA)
Abstract
PURPOSE:To simplify the structure of the semiconductor pressure sensor, to eliminate heat influence to a chip, and to improve pressure detection characteristics by forming a pressure conducting pipe of a material which is close in coefficient of heat expansion to a semiconductor chip and sealing the chip directly to the upper end of the pipe. CONSTITUTION:The pressure conducting pipe 2 is formed of the material whose coefficient of heat expansion approximates to that of the semiconductor single crystal chip 4 where a pressure sensing diaphragm 6 is formed. Then the semiconductor chip 4 is joined directly with the upper end of the pressure conducting pipe 2 by sealing and the pipe 2 and stem 1 are sealed hermetically with sealing glass 14. Consequently, the structure is simplified greatly, the temperature influence to the chip 4 in case of temperature variation is eliminated, and variation difference of the heat stress of the diaphragm to electrodes is eliminated to improve the pressure detection characteristics.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP21952087A JPS6461635A (en) | 1987-09-02 | 1987-09-02 | Semiconductor pressure sensor |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP21952087A JPS6461635A (en) | 1987-09-02 | 1987-09-02 | Semiconductor pressure sensor |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS6461635A true JPS6461635A (en) | 1989-03-08 |
Family
ID=16736758
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP21952087A Pending JPS6461635A (en) | 1987-09-02 | 1987-09-02 | Semiconductor pressure sensor |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6461635A (en) |
-
1987
- 1987-09-02 JP JP21952087A patent/JPS6461635A/en active Pending
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