JPS6461635A - Semiconductor pressure sensor - Google Patents
Semiconductor pressure sensorInfo
- Publication number
- JPS6461635A JPS6461635A JP21952087A JP21952087A JPS6461635A JP S6461635 A JPS6461635 A JP S6461635A JP 21952087 A JP21952087 A JP 21952087A JP 21952087 A JP21952087 A JP 21952087A JP S6461635 A JPS6461635 A JP S6461635A
- Authority
- JP
- Japan
- Prior art keywords
- chip
- pressure
- semiconductor
- pipe
- sealing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Measuring Fluid Pressure (AREA)
Abstract
PURPOSE:To simplify the structure of the semiconductor pressure sensor, to eliminate heat influence to a chip, and to improve pressure detection characteristics by forming a pressure conducting pipe of a material which is close in coefficient of heat expansion to a semiconductor chip and sealing the chip directly to the upper end of the pipe. CONSTITUTION:The pressure conducting pipe 2 is formed of the material whose coefficient of heat expansion approximates to that of the semiconductor single crystal chip 4 where a pressure sensing diaphragm 6 is formed. Then the semiconductor chip 4 is joined directly with the upper end of the pressure conducting pipe 2 by sealing and the pipe 2 and stem 1 are sealed hermetically with sealing glass 14. Consequently, the structure is simplified greatly, the temperature influence to the chip 4 in case of temperature variation is eliminated, and variation difference of the heat stress of the diaphragm to electrodes is eliminated to improve the pressure detection characteristics.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP21952087A JPS6461635A (en) | 1987-09-02 | 1987-09-02 | Semiconductor pressure sensor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP21952087A JPS6461635A (en) | 1987-09-02 | 1987-09-02 | Semiconductor pressure sensor |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6461635A true JPS6461635A (en) | 1989-03-08 |
Family
ID=16736758
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP21952087A Pending JPS6461635A (en) | 1987-09-02 | 1987-09-02 | Semiconductor pressure sensor |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6461635A (en) |
-
1987
- 1987-09-02 JP JP21952087A patent/JPS6461635A/en active Pending
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