JPS5627630A - Pressure sensitive element - Google Patents
Pressure sensitive elementInfo
- Publication number
- JPS5627630A JPS5627630A JP10446079A JP10446079A JPS5627630A JP S5627630 A JPS5627630 A JP S5627630A JP 10446079 A JP10446079 A JP 10446079A JP 10446079 A JP10446079 A JP 10446079A JP S5627630 A JPS5627630 A JP S5627630A
- Authority
- JP
- Japan
- Prior art keywords
- sensitive element
- pressure sensitive
- diaphragms
- whose linear
- disphragms
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Measuring Fluid Pressure (AREA)
Abstract
PURPOSE: To reduce the deflection amount change of a pressure sensitive element on account of temperature changes by mounting and fixing disphragms made of a material whose linear expansion coefficient is almost equal to its temperature coefficient of Young's modulus on a spacer.
CONSTITUTION: A pressure sensitive element is formed by mounting and fixing disphragms 6, 6a made of glass, ceramics or metal whose linear expansion coefficient is almost equal to its temperatyre coefficeint of Young's modulus on a spacer 2 made of a material whose linear temperature coefficient is as small as possible. When the diaphragms 6, 6a are not conductive, the diaphragms 6, 6a are provided with electrodes on their inner surfaces. By so doing, pressure applied to the diaphragms 6, 6a is measured from a capacity change between the diaphragms 6, 6a, and because no deflection change is caused by temperature changes, a pressure sensitive element with high accuracy can easily be obtained.
COPYRIGHT: (C)1981,JPO&Japio
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10446079A JPS5627630A (en) | 1979-08-16 | 1979-08-16 | Pressure sensitive element |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10446079A JPS5627630A (en) | 1979-08-16 | 1979-08-16 | Pressure sensitive element |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS5627630A true JPS5627630A (en) | 1981-03-18 |
Family
ID=14381200
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10446079A Pending JPS5627630A (en) | 1979-08-16 | 1979-08-16 | Pressure sensitive element |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5627630A (en) |
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS58140445U (en) * | 1982-03-18 | 1983-09-21 | 株式会社コスモ計器 | Capacitive pressure detector |
| JPS58206941A (en) * | 1982-04-30 | 1983-12-02 | Yokogawa Hokushin Electric Corp | Pressure sensor |
| JPS59171826A (en) * | 1983-03-22 | 1984-09-28 | Copal Takeda Medical Kenkyusho:Kk | Temperature compensator for electrostatic capacitance type pressure sensor |
| JPS60501177A (en) * | 1983-03-24 | 1985-07-25 | ツィ−グラ−、カ−ルハインツ | pressure sensor |
| JPH0187230U (en) * | 1987-11-30 | 1989-06-08 | ||
| US7373834B2 (en) | 2005-10-27 | 2008-05-20 | Nec Lcd Technologies, Ltd | Pressure sensor |
-
1979
- 1979-08-16 JP JP10446079A patent/JPS5627630A/en active Pending
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS58140445U (en) * | 1982-03-18 | 1983-09-21 | 株式会社コスモ計器 | Capacitive pressure detector |
| JPS6326745Y2 (en) * | 1982-03-18 | 1988-07-20 | ||
| JPS58206941A (en) * | 1982-04-30 | 1983-12-02 | Yokogawa Hokushin Electric Corp | Pressure sensor |
| JPS59171826A (en) * | 1983-03-22 | 1984-09-28 | Copal Takeda Medical Kenkyusho:Kk | Temperature compensator for electrostatic capacitance type pressure sensor |
| JPS60501177A (en) * | 1983-03-24 | 1985-07-25 | ツィ−グラ−、カ−ルハインツ | pressure sensor |
| JPH0187230U (en) * | 1987-11-30 | 1989-06-08 | ||
| US7373834B2 (en) | 2005-10-27 | 2008-05-20 | Nec Lcd Technologies, Ltd | Pressure sensor |
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