JPS5536713A - Semiconductor strain gauge type absolute pressure sensor - Google Patents
Semiconductor strain gauge type absolute pressure sensorInfo
- Publication number
- JPS5536713A JPS5536713A JP10860378A JP10860378A JPS5536713A JP S5536713 A JPS5536713 A JP S5536713A JP 10860378 A JP10860378 A JP 10860378A JP 10860378 A JP10860378 A JP 10860378A JP S5536713 A JPS5536713 A JP S5536713A
- Authority
- JP
- Japan
- Prior art keywords
- thermal expansion
- pressure
- strain gauge
- semiconductor strain
- similar thermal
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Measuring Fluid Pressure (AREA)
Abstract
PURPOSE: To improve the airtightness of a semiconductor strain gauge type absolute pressure sensor by constructing respective members by materials having similar thermal expansion coefficients.
CONSTITUTION: A glass stem 1 is formed by glass member having similar thermal expansion coefficient to that of a silicon member 5 forming a semiconductor strain gauge. A pressure intake pipe 3 and leads 4 having equivalent thermal expansion coefficient are sealed in the glass stem 1, which is coated by the member 5 with a cap 10 having similar thermal expansion coefficient to that of the galss stem 1 and secured thereto. Since the respective members have similar thermal expansion coefficients, the adhered portion between the respective members is not thermally strained to a crack but retains preferable airtightness. Pressure to be measured is introduced through the pipe 3 into a diaphragm chamber 7 of the member 5 to allow a pressure-sensitive diaphragm 6 to be deformed in response to the difference between the pressure to be measured and the standard vacuum pressure in the chamber 11. This deformation is picked up by a lead 4 as electric amounts.
COPYRIGHT: (C)1980,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP10860378A JPS5536713A (en) | 1978-09-06 | 1978-09-06 | Semiconductor strain gauge type absolute pressure sensor |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP10860378A JPS5536713A (en) | 1978-09-06 | 1978-09-06 | Semiconductor strain gauge type absolute pressure sensor |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5536713A true JPS5536713A (en) | 1980-03-14 |
Family
ID=14488976
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP10860378A Pending JPS5536713A (en) | 1978-09-06 | 1978-09-06 | Semiconductor strain gauge type absolute pressure sensor |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5536713A (en) |
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS58110832U (en) * | 1982-01-25 | 1983-07-28 | 三菱電機株式会社 | pressure electrical converter |
JPS63230894A (en) * | 1987-03-19 | 1988-09-27 | Kamioka Kogyo Kk | Cathode material for electrolysis and production thereof |
JPS63262491A (en) * | 1987-04-21 | 1988-10-28 | Kamioka Kogyo Kk | Anode for electrolysis and production thereof |
JPH01172725A (en) * | 1987-12-28 | 1989-07-07 | Matsushita Electric Ind Co Ltd | Semiconductor pressure sensor |
JPH01172724A (en) * | 1987-12-28 | 1989-07-07 | Matsushita Electric Ind Co Ltd | Semiconductor pressure sensor |
-
1978
- 1978-09-06 JP JP10860378A patent/JPS5536713A/en active Pending
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS58110832U (en) * | 1982-01-25 | 1983-07-28 | 三菱電機株式会社 | pressure electrical converter |
JPS63230894A (en) * | 1987-03-19 | 1988-09-27 | Kamioka Kogyo Kk | Cathode material for electrolysis and production thereof |
JPS63262491A (en) * | 1987-04-21 | 1988-10-28 | Kamioka Kogyo Kk | Anode for electrolysis and production thereof |
JPH01172725A (en) * | 1987-12-28 | 1989-07-07 | Matsushita Electric Ind Co Ltd | Semiconductor pressure sensor |
JPH01172724A (en) * | 1987-12-28 | 1989-07-07 | Matsushita Electric Ind Co Ltd | Semiconductor pressure sensor |
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