JPS55122125A - Semiconductor pressure detector - Google Patents
Semiconductor pressure detectorInfo
- Publication number
- JPS55122125A JPS55122125A JP2866579A JP2866579A JPS55122125A JP S55122125 A JPS55122125 A JP S55122125A JP 2866579 A JP2866579 A JP 2866579A JP 2866579 A JP2866579 A JP 2866579A JP S55122125 A JPS55122125 A JP S55122125A
- Authority
- JP
- Japan
- Prior art keywords
- pressure
- pressure detecting
- detecting element
- glass
- bed
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Measuring Fluid Pressure (AREA)
Abstract
PURPOSE: To obtain a stable detection performance by joining a reference pressure communicating path, which contains a glass and a metal beds, to the surface of the reference pressure chamber of the semicondutor pressure detecting element by anodic junction process.
CONSTITUTION: The pressure detecting element 6, first glass bed 7 the coefficient of thermal expanion of which is the same at that of the said element, thin metal plate 8, the second glass bed 9 and metal bed 10 the coefficient of thermal expansion of which is less are piled up and joined to each other firm and air-tightly by anodic- junction process to obtain the pressure detecting unit 5. The pressure detecting element is a p-type semiconductor, which is obtained by concaving a flat plate of n-type silicon and treating the concaved bottom 13 by the selective diffusion method, and forms a strain sensing resistor 14. When a pressure object to be detected is led to the pressure receiving chamber 22 through the introduction hole 16, the pressure is applied to the pressure detecting element 6 through the seal diaphragm 17 and sealed liquid 18, a strain proportional to the pressure is produced in the strain sensing resistor 14, a change of the resistance value is taken from the terminal 21 to convert itself into an electric signal.
COPYRIGHT: (C)1980,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2866579A JPS55122125A (en) | 1979-03-14 | 1979-03-14 | Semiconductor pressure detector |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2866579A JPS55122125A (en) | 1979-03-14 | 1979-03-14 | Semiconductor pressure detector |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS55122125A true JPS55122125A (en) | 1980-09-19 |
Family
ID=12254797
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2866579A Pending JPS55122125A (en) | 1979-03-14 | 1979-03-14 | Semiconductor pressure detector |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS55122125A (en) |
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6085568A (en) * | 1983-10-18 | 1985-05-15 | Toyota Central Res & Dev Lab Inc | Electrostatic junction |
JPS6122222A (en) * | 1984-07-11 | 1986-01-30 | Hitachi Ltd | Semiconductor pressure transducer |
US4686764A (en) * | 1986-04-22 | 1987-08-18 | Motorola, Inc. | Membrane protected pressure sensor |
US4732042A (en) * | 1986-04-22 | 1988-03-22 | Motorola Inc. | Cast membrane protected pressure sensor |
US4842685A (en) * | 1986-04-22 | 1989-06-27 | Motorola, Inc. | Method for forming a cast membrane protected pressure sensor |
-
1979
- 1979-03-14 JP JP2866579A patent/JPS55122125A/en active Pending
Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6085568A (en) * | 1983-10-18 | 1985-05-15 | Toyota Central Res & Dev Lab Inc | Electrostatic junction |
JPS6122222A (en) * | 1984-07-11 | 1986-01-30 | Hitachi Ltd | Semiconductor pressure transducer |
JPH0546489B2 (en) * | 1984-07-11 | 1993-07-14 | Hitachi Ltd | |
US4686764A (en) * | 1986-04-22 | 1987-08-18 | Motorola, Inc. | Membrane protected pressure sensor |
US4732042A (en) * | 1986-04-22 | 1988-03-22 | Motorola Inc. | Cast membrane protected pressure sensor |
US4842685A (en) * | 1986-04-22 | 1989-06-27 | Motorola, Inc. | Method for forming a cast membrane protected pressure sensor |
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