JPS6461641A - Semiconductor pressure sensor - Google Patents
Semiconductor pressure sensorInfo
- Publication number
- JPS6461641A JPS6461641A JP21952787A JP21952787A JPS6461641A JP S6461641 A JPS6461641 A JP S6461641A JP 21952787 A JP21952787 A JP 21952787A JP 21952787 A JP21952787 A JP 21952787A JP S6461641 A JPS6461641 A JP S6461641A
- Authority
- JP
- Japan
- Prior art keywords
- pressure
- diaphragm
- diaphragms
- pressure sensor
- applying
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Measuring Fluid Pressure (AREA)
Abstract
PURPOSE:To measure both absolute pressure and relative pressure at the same time by applying an equal pressure to one-side parts of two pressure sensing diaphragms and applying a fluid pressure to the other side of one diaphragm. CONSTITUTION:The two pressure sensing diaphragms 16 and 17 are formed on a semiconductor single crystal chip 15 and the diaphragm 16 is opened to a pressure connecting pipe 3 through a support wafer 13 and through-holes 14, 11, and 7 formed in the pedestal 9. Then a vacuum chamber 18 is formed between the diaphragm 17 and support wafer 13, the equal pressure is applied to one-side surfaces of the diaphragms 16 and 17, and the fluid pressure is applied to the other surface of the diaphragm 16. Consequently, the absolute value and relative value of object pressure are measured at the same time.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP21952787A JPS6461641A (en) | 1987-09-02 | 1987-09-02 | Semiconductor pressure sensor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP21952787A JPS6461641A (en) | 1987-09-02 | 1987-09-02 | Semiconductor pressure sensor |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6461641A true JPS6461641A (en) | 1989-03-08 |
Family
ID=16736877
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP21952787A Pending JPS6461641A (en) | 1987-09-02 | 1987-09-02 | Semiconductor pressure sensor |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6461641A (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0465643A (en) * | 1990-07-05 | 1992-03-02 | Mitsubishi Electric Corp | Semiconductor pressure sensor and its manufacture |
| US5663506A (en) * | 1995-08-21 | 1997-09-02 | Moore Products Co. | Capacitive temperature and pressure transducer |
| US5672808A (en) * | 1996-06-11 | 1997-09-30 | Moore Products Co. | Transducer having redundant pressure sensors |
| FR2869600A1 (en) * | 2004-04-29 | 2005-11-04 | Bosch Gmbh Robert | COMBINED RELATIVE AND ABSOLUTE PRESSURE SENSOR |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS56165361A (en) * | 1980-05-23 | 1981-12-18 | Mitsubishi Electric Corp | Semiconductor pressure converter |
| JPS5791431A (en) * | 1980-10-09 | 1982-06-07 | Gen Motors Corp | Double hollow pressure sensor |
-
1987
- 1987-09-02 JP JP21952787A patent/JPS6461641A/en active Pending
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS56165361A (en) * | 1980-05-23 | 1981-12-18 | Mitsubishi Electric Corp | Semiconductor pressure converter |
| JPS5791431A (en) * | 1980-10-09 | 1982-06-07 | Gen Motors Corp | Double hollow pressure sensor |
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0465643A (en) * | 1990-07-05 | 1992-03-02 | Mitsubishi Electric Corp | Semiconductor pressure sensor and its manufacture |
| US5663506A (en) * | 1995-08-21 | 1997-09-02 | Moore Products Co. | Capacitive temperature and pressure transducer |
| US5672808A (en) * | 1996-06-11 | 1997-09-30 | Moore Products Co. | Transducer having redundant pressure sensors |
| US5804736A (en) * | 1996-06-11 | 1998-09-08 | Moore Products Co. | Differential capacitive transducer |
| US6029524A (en) * | 1996-06-11 | 2000-02-29 | Moore Products Co. | Transducer having redundant pressure sensors |
| FR2869600A1 (en) * | 2004-04-29 | 2005-11-04 | Bosch Gmbh Robert | COMBINED RELATIVE AND ABSOLUTE PRESSURE SENSOR |
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