JPS6445039A - Manufacture of electron tube cathode device - Google Patents
Manufacture of electron tube cathode deviceInfo
- Publication number
- JPS6445039A JPS6445039A JP20254187A JP20254187A JPS6445039A JP S6445039 A JPS6445039 A JP S6445039A JP 20254187 A JP20254187 A JP 20254187A JP 20254187 A JP20254187 A JP 20254187A JP S6445039 A JPS6445039 A JP S6445039A
- Authority
- JP
- Japan
- Prior art keywords
- layer
- mask layer
- lead
- guided
- base metal
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
PURPOSE:To form a guided metallic layer with a solid and fine pattern on a base metal by using a mask layer which has a heat-resisting property and besides etching properties dissimilar to those of the base metal and the guided metallic layer. CONSTITUTION:A lead guided part 4 is exposed from a base metal layer 10 formed on a substrate 1, with a mask layer 11 and an etching mask layer 12 in between. The base metal layer 10 and the mask layer 11 are dissimilar in their etching properties to each other. The etching mask layer 12 is removed in a following process, and the whole surface including the lead guided part 4 is coated with a lead guided metallic layer 17. Dissimilarity in their etching properties between the mask layer 11 and the lead guided metallic layer 17 is utilized to remove only the mask layer 11 and concurrently the lead guided metallic layer on the mask layer 11 is removed. The mask layer is characteristic of enduring heat generated in the case that the lead is solidly fixed with the lead guided metallic layer 17, and it holds a fine pattern in the fixing process.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP20254187A JPS6445039A (en) | 1987-08-13 | 1987-08-13 | Manufacture of electron tube cathode device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP20254187A JPS6445039A (en) | 1987-08-13 | 1987-08-13 | Manufacture of electron tube cathode device |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS6445039A true JPS6445039A (en) | 1989-02-17 |
Family
ID=16459210
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP20254187A Pending JPS6445039A (en) | 1987-08-13 | 1987-08-13 | Manufacture of electron tube cathode device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6445039A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5790620A (en) * | 1995-01-31 | 1998-08-04 | Kabushiki Kaisha Toshiba | Underwater laser processing method and apparatus |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5227260A (en) * | 1975-08-25 | 1977-03-01 | Sony Corp | Cathode manufacturing process |
JPS5498179A (en) * | 1978-01-20 | 1979-08-02 | Nippon Telegr & Teleph Corp <Ntt> | Preparation of minute circuits and elements |
JPS6047452A (en) * | 1983-08-25 | 1985-03-14 | Mitsubishi Electric Corp | Manufacture of au bonding pad |
-
1987
- 1987-08-13 JP JP20254187A patent/JPS6445039A/en active Pending
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5227260A (en) * | 1975-08-25 | 1977-03-01 | Sony Corp | Cathode manufacturing process |
JPS5498179A (en) * | 1978-01-20 | 1979-08-02 | Nippon Telegr & Teleph Corp <Ntt> | Preparation of minute circuits and elements |
JPS6047452A (en) * | 1983-08-25 | 1985-03-14 | Mitsubishi Electric Corp | Manufacture of au bonding pad |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5790620A (en) * | 1995-01-31 | 1998-08-04 | Kabushiki Kaisha Toshiba | Underwater laser processing method and apparatus |
US6084202A (en) * | 1995-01-31 | 2000-07-04 | Kabushiki Kaisha Toshiba | Underwater laser processing method and apparatus |
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