JPS6355012B2 - - Google Patents
Info
- Publication number
- JPS6355012B2 JPS6355012B2 JP12720381A JP12720381A JPS6355012B2 JP S6355012 B2 JPS6355012 B2 JP S6355012B2 JP 12720381 A JP12720381 A JP 12720381A JP 12720381 A JP12720381 A JP 12720381A JP S6355012 B2 JPS6355012 B2 JP S6355012B2
- Authority
- JP
- Japan
- Prior art keywords
- pressure
- sensitive element
- plate
- sensitive elements
- resistance value
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000000835 fiber Substances 0.000 claims description 15
- 230000005540 biological transmission Effects 0.000 claims description 8
- 230000006835 compression Effects 0.000 claims description 8
- 238000007906 compression Methods 0.000 claims description 8
- 229920000049 Carbon (fiber) Polymers 0.000 claims description 6
- 239000004917 carbon fiber Substances 0.000 claims description 6
- 238000010586 diagram Methods 0.000 description 4
- 239000000853 adhesive Substances 0.000 description 2
- 230000001070 adhesive effect Effects 0.000 description 2
- 238000001514 detection method Methods 0.000 description 2
- 238000009530 blood pressure measurement Methods 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L1/00—Measuring force or stress, in general
- G01L1/20—Measuring force or stress, in general by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids; by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Measuring Fluid Pressure (AREA)
Description
【発明の詳細な説明】
本発明は印加力に対して繊維の接触状態が変化
することに関連して抵抗値が変化する炭素繊維な
どの導電性繊維を感圧素子とする圧力センサに関
する。DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a pressure sensor that uses conductive fibers such as carbon fibers as pressure-sensitive elements whose resistance value changes in relation to changes in the contact state of the fibers in response to applied force.
従来より、この種の感圧素子を使用した圧力セ
ンサとしては、例えば本出願人が特願昭56−
67264号（特開昭57−182138号）（発明の名称「圧
力センサ」）において提案したものがある。 Conventionally, as a pressure sensor using this type of pressure sensing element, for example, the present applicant filed a patent application in 1983-
There is a proposal in No. 67264 (Japanese Unexamined Patent Publication No. 57-182138) (invention title: "Pressure sensor").
上記圧力センサは、第１図にその断面図を示す
ような基本的構成を有する。 The above-mentioned pressure sensor has a basic configuration as shown in a sectional view in FIG.
第１図において、１は感圧素子であり、炭素繊
維等の導電性繊維を平板状に配向成形したもの
で、繊維相互は複雑にからみあつている。２ａと
２ｂは感圧素子１の両面に接着された電極板であ
る。厚み方向への印加圧力に対して感圧素子１は
応力を発生するとともに応力歪を生じ、それに伴
つて繊維どうしの接触抵抗と電流経路が変化する
ことにより感圧素子１の抵抗値が変化する。抵抗
値変化は電極板２ａ，２ｂにより検出される。 In FIG. 1, reference numeral 1 denotes a pressure sensitive element, which is formed by orienting conductive fibers such as carbon fibers into a flat plate shape, and the fibers are intricately entangled with each other. 2a and 2b are electrode plates adhered to both sides of the pressure sensitive element 1. In response to the applied pressure in the thickness direction, the pressure sensitive element 1 generates stress and stress strain, and as a result, the contact resistance between the fibers and the current path change, resulting in a change in the resistance value of the pressure sensitive element 1. . Changes in resistance value are detected by electrode plates 2a and 2b.
上記第１図の圧力センサは、印加圧力に対して
その抵抗値が第２図のように変化する。 The resistance value of the pressure sensor shown in FIG. 1 changes as shown in FIG. 2 with respect to applied pressure.
しかしながら、上記の圧力センサは、炭素繊維
等の導電性繊維の機械的特性により、圧力と抵抗
値との間に関係にヒステリシスを有しており、こ
のヒステリシスを除去するのは困難であつた。 However, the above pressure sensor has hysteresis in the relationship between pressure and resistance value due to the mechanical properties of conductive fibers such as carbon fibers, and it has been difficult to eliminate this hysteresis.
本発明は導電性繊維を使用した圧力センサにお
ける上記事情に鑑みてなされたものであつて、圧
力と抵抗値との間に存在するヒステリシスを改善
するようにした圧力センサを提供することを目的
としている。 The present invention was made in view of the above-mentioned circumstances regarding pressure sensors using conductive fibers, and an object of the present invention is to provide a pressure sensor that improves the hysteresis that exists between pressure and resistance value. There is.
このため、本発明は、印加圧力によつて繊維ど
うしの接触状態が変化し、その接触抵抗および電
流経路の変化に関連して抵抗値が変化するように
平板状に配向形成された炭素繊維等の導電性繊維
からなる特性の互いに異なる２個の感圧素子を備
え、これら感圧素子を積層してその支持板と外部
圧力伝達部材から外部圧力が加えられる加圧板と
の間に保持するとともに、上記支持板と加圧板と
の間に圧縮バネを縮装し、前記２個の感圧素子の
一方の感圧素子と第１の可変抵抗器を接続してな
る第１の直列回路と、他方の感圧素子と第２の可
変抵抗器を接続してなる第２の直列回路とに同じ
電圧を印加し、一方の感圧素子の端子電圧と他方
の感圧素子の端子電圧の電位差により、圧力伝達
部材に加えられる圧力を検出するようにしたこと
を特徴としている。 For this reason, the present invention provides carbon fibers etc. that are oriented in a flat plate shape so that the contact state between the fibers changes depending on the applied pressure, and the resistance value changes in relation to the change in contact resistance and current path. Two pressure-sensitive elements having different characteristics made of conductive fibers are provided, and these pressure-sensitive elements are stacked and held between a support plate thereof and a pressure plate to which external pressure is applied from an external pressure transmission member. , a first series circuit in which a compression spring is compressed between the support plate and the pressure plate, and one of the two pressure-sensitive elements and a first variable resistor are connected; The same voltage is applied to the second series circuit formed by connecting the other pressure-sensitive element and the second variable resistor, and due to the potential difference between the terminal voltage of one pressure-sensitive element and the terminal voltage of the other pressure-sensitive element, , the pressure applied to the pressure transmission member is detected.
以下、添付図面を参照して本発明を詳細に説明
する。 Hereinafter, the present invention will be described in detail with reference to the accompanying drawings.
第３図において、１１および１２は第１図と同
様の感圧素子で、これら感圧素子１１および１２
は、印加圧力によつて繊維どうしの接触状態が変
化し、その接触抵抗および電流経路の変化に関連
して抵抗値が変化するように平板状に配向形成さ
れた炭素繊維等の導電性繊維からなり、その印加
圧力に対する抵抗値の変化特性は互いに相異する
ものを使用する。 In FIG. 3, 11 and 12 are pressure sensitive elements similar to those in FIG.
is made of conductive fibers such as carbon fibers that are oriented and formed into a flat plate so that the contact state between the fibers changes depending on the applied pressure, and the resistance value changes in relation to the change in contact resistance and current path. Therefore, the resistance value change characteristics with respect to the applied pressure are different from each other.
上記感圧素子１１と１２とは、第４図に示すよ
うに、電極板１３の上面および下面に夫々導電性
の接着剤により接着するとともに、上記電極板１
３と対向して、感圧素子１１の上面には電極板１
４を、また、感圧素子１２の下面には電極板１５
を夫々導電性の接着剤により接着している。 As shown in FIG. 4, the pressure-sensitive elements 11 and 12 are adhered to the upper and lower surfaces of the electrode plate 13 using a conductive adhesive, respectively.
3, on the upper surface of the pressure sensitive element 11 is an electrode plate 1.
4, and an electrode plate 15 on the bottom surface of the pressure sensitive element 12.
are adhered to each other using conductive adhesive.
上記のように、電極板１３を間にして積層した
感圧素子１１と１２は、第３図に示すように、加
圧板１６とともにケーシング１７内に収容し、該
ケーシング１７の底部の支持板１８と上記加圧板
１６との間に上記感圧素子１１と１２を保持して
いる。 As described above, the pressure sensitive elements 11 and 12 stacked with the electrode plate 13 in between are housed in the casing 17 together with the pressure plate 16, as shown in FIG. The pressure sensing elements 11 and 12 are held between the pressure plate 16 and the pressure plate 16.
上記感圧素子１１の電極板１４は加圧板１６
に、また、上記感圧素子１２の電極板１５はケー
シング１７の支持板１８に夫々接着される。 The electrode plate 14 of the pressure sensitive element 11 is a pressure plate 16
Furthermore, the electrode plates 15 of the pressure-sensitive element 12 are adhered to the support plates 18 of the casing 17, respectively.
上記加圧板１６には、その上面中央部から外部
圧力伝達部材１９をケーシング１７の孔２０を通
して出没自在に突出させる一方、上記加圧板１６
と支持板１８との間は、圧縮バネ２１を縮装して
いる。 The pressure plate 16 has an external pressure transmitting member 19 protruding from the center of its upper surface through the hole 20 of the casing 17 so as to be freely retractable.
A compression spring 21 is compressed between the support plate 18 and the support plate 18 .
上記圧縮バネ２１は、特願昭56−67264号にも
記載したように、感圧素子１１および１２の導電
性繊維がその機械的特性により生ずるクリープ歪
の制抑と、圧力の測定範囲の拡大を図るためのも
ので、上記圧縮バネ２１により支持板１８から離
れる向きに付勢される加圧板１６は、圧力伝達部
材１９を通して外部から加えられる圧力に対し
て、ケーシング１７内部に設けた段部２２に当て
止めされて動作範囲が制限される。 As described in Japanese Patent Application No. 56-67264, the compression spring 21 is designed to suppress creep strain caused by the mechanical properties of the conductive fibers of the pressure-sensitive elements 11 and 12, and to expand the pressure measurement range. The pressure plate 16, which is urged away from the support plate 18 by the compression spring 21, responds to the pressure applied from the outside through the pressure transmission member 19 by a stepped portion provided inside the casing 17. 22, and the range of motion is limited.
上記圧力センサは、第５図の回路に組み込まれ
る。 The pressure sensor is incorporated into the circuit of FIG.
第５図において、R1，R2は夫々第１および第
２の可変抵抗器としての半固定の可変抵抗器、
R11およびR12は夫々感圧素子１１および１２を
表わす抵抗であつて、これら可変抵抗器R1，R2、
抵抗R11およびR12は夫々ブリツジの各一辺をな
すように接続される。 In FIG. 5, R 1 and R 2 are semi-fixed variable resistors as the first and second variable resistors, respectively;
R 11 and R 12 are resistances representing pressure sensitive elements 11 and 12, respectively, and these variable resistors R 1 , R 2 ,
Resistors R 11 and R 12 are connected to each side of the bridge.
即ち、上記感圧素子１１と１２の間の電極板１
３はアースに接続するとともに、感圧素子１１の
電極板１４と電源＋VDとの間には可変抵抗器R1
を、また、感圧素子１２の電極板１５と上記電源
＋VDとの間には可変抵抗器R2を夫々接続してい
る。上記可変抵抗器R1と感圧素子１１とは第１
の直列回路を構成し、また、上記可変抵抗器R2
と感圧素子１２とは第２の直列回路を構成する。 That is, the electrode plate 1 between the pressure sensitive elements 11 and 12
3 is connected to the ground, and a variable resistor R 1 is connected between the electrode plate 14 of the pressure sensitive element 11 and the power supply +V D.
In addition, a variable resistor R 2 is connected between the electrode plate 15 of the pressure sensitive element 12 and the power supply +V D , respectively. The variable resistor R 1 and the pressure sensitive element 11 are the first
and also the above variable resistor R 2
and pressure sensitive element 12 constitute a second series circuit.
上記電極板１４の電位V11と電極板１５の電位
V12の電位差（V11−V12）は、演算増巾器OAと
抵抗R3，R4，R5およびR6からなる周知の減算増
巾器により増巾している。 Potential V 11 of the electrode plate 14 and potential of the electrode plate 15
The potential difference of V 12 (V 11 −V 12 ) is amplified by a well-known subtractive amplifier consisting of an operational amplifier OA and resistors R 3 , R 4 , R 5 and R 6 .
感圧センサを上記構成とすれば、圧力伝達部材
１９のケーシング１７の突出部分に印加された印
加圧は、加圧板１６を通して感圧素子１１，１２
および圧縮バネ２１に伝達される。 If the pressure-sensitive sensor has the above configuration, the applied pressure applied to the protruding portion of the casing 17 of the pressure transmission member 19 is transmitted to the pressure-sensitive elements 11 and 12 through the pressure plate 16.
and is transmitted to the compression spring 21.
このため、これら感圧素子１１，１２および圧
縮バネ２１は上記の印加力を受けて応力を発生す
るとともに応力歪を生ずる。 For this reason, the pressure sensitive elements 11, 12 and the compression spring 21 receive the above applied force and generate stress as well as stress strain.
圧縮バネ２１に生ずる応力歪と感圧素子１１お
よび１２に生ずる応力歪は同じ大きさで、また、
これら感圧素子１１と１２は積層されているた
め、発生する応力は同じであるが、各々の応力歪
は、感圧素子１１と１２の機械的特性により決定
される。 The stress strain occurring in the compression spring 21 and the stress strain occurring in the pressure sensitive elements 11 and 12 are of the same magnitude, and
Since these pressure sensitive elements 11 and 12 are laminated, the stress generated is the same, but each stress strain is determined by the mechanical characteristics of the pressure sensitive elements 11 and 12.
このため、感圧素子１１が加圧されると、その
抵抗値は、第６図に示すように、矢印A1の向き
に曲線l1に沿つて変化するのに対し、上記感圧素
子１１に印加されている力が除圧されると、感圧
素子１１の抵抗値は、矢印A′1の向きに曲線l′1に
沿つて変化し、加圧時と除圧時では、同一圧力Ｐ
に対して、感圧素子１１の抵抗値にΔR11の差が
生じる。 Therefore, when the pressure sensitive element 11 is pressurized, its resistance value changes along the curve l1 in the direction of the arrow A1 , as shown in FIG. When the force applied to the pressure sensitive element 11 is removed, the resistance value of the pressure sensitive element 11 changes along the curve l' 1 in the direction of the arrow A' 1 , and the same pressure is applied when the pressure is applied and when the pressure is removed. P
In contrast, a difference of ΔR 11 occurs in the resistance value of the pressure sensitive element 11.
上記と同様に、感圧素子１２が加圧されると、
その抵抗値は、第６図に示すように、矢印A2の
向きに曲線l2に沿つて変化のに対し、上記感圧素
子１２に印加されている力が除圧されると、感圧
素子１２の抵抗値は、矢印A′2の向きに曲線l′2に
沿つて変化し、加圧時と除圧時では、同一圧力Ｐ
に対して、感圧素子１２の抵抗値にΔR12の差が
生じる。 Similarly to the above, when the pressure sensitive element 12 is pressurized,
As shown in FIG. 6, the resistance value changes along the curve l2 in the direction of the arrow A2 , but when the force applied to the pressure sensitive element 12 is removed, the pressure sensitive element The resistance value of the element 12 changes along the curve l' 2 in the direction of the arrow A' 2 , and the same pressure P is applied during pressurization and depressurization.
In contrast, a difference of ΔR 12 occurs in the resistance value of the pressure sensitive element 12.
しかしながら、第５図の回路において、可変抵
抗器R1，R2により、抵抗R11およびR12（感圧素子
１１および１２）を夫々流れる電流I1およびI2を
調整し、印加圧力の全ての範囲でΔR11×I1×
ΔR12×I2となるようにすれば、感圧素子１１の
電極板１４の電位V11と感圧素子１２の電極板１
５の電位V12の電位差（V11−V12）の値は、同一
の圧力Ｐに対して、次のように、加圧時と除圧時
とで等しくなる。 However, in the circuit shown in FIG. 5, the variable resistors R 1 and R 2 adjust the currents I 1 and I 2 flowing through the resistors R 11 and R 12 (pressure-sensitive elements 11 and 12), respectively, so that all of the applied pressure is ΔR 11 ×I 1 ×
If ΔR 12 ×I 2 is set, the potential V 11 of the electrode plate 14 of the pressure-sensitive element 11 and the electrode plate 1 of the pressure-sensitive element 12
The value of the potential difference (V 11 −V 12 ) of the potential V 12 in No. 5 is equal when the pressure is applied and when the pressure is removed for the same pressure P, as follows.
即ち、上記圧力Ｐに対して、加圧時には、 V11−V12＝R11×I1−R12×I2 となり、除圧時には、 V11−V12＝（R11＋ΔR11）I1−（R12＋ΔR12）I2 ＝R11×I1−R12×I2 となる。 That is, for the above pressure P, when pressurizing, V 11 −V 12 = R 11 ×I 1 −R 12 ×I 2 , and when depressurizing, V 11 −V 12 = (R 11 +ΔR 11 )I 1 −(R 12 +ΔR 12 )I 2 =R 11 ×I 1 −R 12 ×I 2 .
従つて、上記電位差（V11−V12）を増巾した
演算増巾器OAの出力V0は、第７図に示すよう
に、第３図の圧力センサに加えられる圧力に対し
て、ヒステリシスを殆どなくすことができる。 Therefore, as shown in FIG. 7, the output V 0 of the operational amplifier OA that amplifies the potential difference (V 11 −V 12 ) has hysteresis with respect to the pressure applied to the pressure sensor in FIG. 3. can be almost eliminated.
なお、第３図に示す圧力センサは、圧力伝達部
材１９に加えられる力あるいは荷重を測定する場
合等に使用されるが、液体圧もしくは気体圧等を
測定する場合には、第８図に示すように、第３図
の圧力センサのケーシング１７の圧力伝達部材１
９の突出端面にスリバチ状の凹部３１を設け、該
凹部３１の開口端面にダイヤフラム３２を接着す
るとともに、該ダイヤフラム３２を上記圧力伝達
部材１９の先端面に接着したものを使用すること
ができる。 The pressure sensor shown in FIG. 3 is used when measuring the force or load applied to the pressure transmission member 19, but when measuring liquid pressure or gas pressure, etc., the pressure sensor shown in FIG. 8 is used. As shown, the pressure transmitting member 1 of the casing 17 of the pressure sensor shown in FIG.
A slit-shaped recess 31 is provided on the protruding end surface of the pressure transmitting member 19, a diaphragm 32 is bonded to the open end surface of the recess 31, and the diaphragm 32 is bonded to the tip surface of the pressure transmitting member 19.
本発明は上記実施例に限定されるものではな
く、本発明の要旨の範囲内で種々の構成とするこ
とができる。 The present invention is not limited to the above-mentioned embodiments, and various configurations can be made within the scope of the gist of the present invention.
以上、詳細に説明したことからも明らかなよう
に、本発明は、導電性繊維を平板状に配向形成し
た互いに特性の異なる２個の感圧素子を差動的に
組み合わせて各感圧素子が有しているヒステリシ
スを相殺するようにしたから、圧力センサに加え
られる同一の圧力に対する出力の差は殆どなくな
り、圧力センサのヒステリシスを大巾に改善する
ことができる。 As is clear from the detailed explanation above, the present invention is a method of differentially combining two pressure-sensitive elements each having different characteristics, which are formed by orienting conductive fibers in a flat plate shape. Since the existing hysteresis is canceled out, there is almost no difference in output for the same pressure applied to the pressure sensor, and the hysteresis of the pressure sensor can be greatly improved.
第１図は従来の圧力センサの基本的構成を示す
断面図、第２図は第１図の圧力センサの印加力と
抵抗値の関係を示す特性図、第３図は本発明に係
る圧力センサの大略の構造を示す断面図、第４図
は第３図の圧力センサに使用される感圧素子の断
面図、第５図は第３図の圧力センサに使用される
圧力検出用の回路図、第６図は第３図の圧力セン
サに使用される２つの感圧素子の印加力に対する
印加力と抵抗値との関係を夫々示す特性図、第７
図は第５図の圧力検出用の回路の出力説明図、第
８図は第３図の変形例の断面図である。
１１，１２……感圧素子、１３，１４，１５…
…電極板、１６……加圧板、１７……ケーシン
グ、１８……支持板、１９……圧力伝達部材、３
１……凹部、３２……ダイヤフラム。
Fig. 1 is a sectional view showing the basic configuration of a conventional pressure sensor, Fig. 2 is a characteristic diagram showing the relationship between applied force and resistance value of the pressure sensor of Fig. 1, and Fig. 3 is a pressure sensor according to the present invention. 4 is a cross-sectional view of a pressure-sensitive element used in the pressure sensor of FIG. 3, and FIG. 5 is a circuit diagram for pressure detection used in the pressure sensor of FIG. 3. , FIG. 6 is a characteristic diagram showing the relationship between the applied force and the resistance value of the two pressure sensitive elements used in the pressure sensor of FIG. 3, respectively.
This figure is an explanatory diagram of the output of the pressure detection circuit of FIG. 5, and FIG. 8 is a sectional view of a modification of FIG. 3. 11, 12... pressure sensitive element, 13, 14, 15...
... Electrode plate, 16 ... Pressure plate, 17 ... Casing, 18 ... Support plate, 19 ... Pressure transmission member, 3
1... recess, 32... diaphragm.
Claims (1)
化し、その接触抵抗および電流経路の変化に関連
して抵抗値が変化するように平板状に配向形成さ
れた炭素繊維等の導電性繊維からなる特性の互い
に異なる２個の感圧素子を備え、これら感圧素子
を積層してその支持板と外部圧力伝達部材から外
部圧力が加えられる加圧板との間に保持するとと
もに、上記支持板と加圧板との間に圧縮バネを縮
装し、前記２個の感圧素子の一方の感圧素子と第
１の可変抵抗器を接続してなる第１の直列回路
と、他方の感圧素子と第２の可変抵抗器を接続し
てなる第２の直列回路とに同じ電圧を印加し、一
方の感圧素子の端子電圧と他方の感圧素子の端子
電圧の電位差により、圧力伝達部材に加えられる
圧力を検出するようにしたことを特徴とする圧力
センサ。1 Consisting of conductive fibers such as carbon fibers that are oriented in a flat plate shape so that the contact state between the fibers changes depending on the applied pressure, and the resistance value changes in relation to the change in contact resistance and current path. Two pressure-sensitive elements having different characteristics are provided, and these pressure-sensitive elements are stacked and held between a support plate thereof and a pressure plate to which external pressure is applied from an external pressure transmission member, and A first series circuit in which a compression spring is compressed between the pressure plate and one of the two pressure-sensitive elements and a first variable resistor is connected; and the other pressure-sensitive element. The same voltage is applied to the second series circuit formed by connecting the second variable resistor, and the potential difference between the terminal voltage of one pressure-sensitive element and the terminal voltage of the other pressure-sensitive element causes a voltage to be applied to the pressure transmission member. A pressure sensor is characterized in that it detects the pressure exerted by the pressure.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12720381A JPS5828634A (en) | 1981-08-12 | 1981-08-12 | Pressure sensor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12720381A JPS5828634A (en) | 1981-08-12 | 1981-08-12 | Pressure sensor |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5828634A JPS5828634A (en) | 1983-02-19 |
| JPS6355012B2 true JPS6355012B2 (en) | 1988-11-01 |
Family
ID=14954260
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12720381A Granted JPS5828634A (en) | 1981-08-12 | 1981-08-12 | Pressure sensor |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5828634A (en) |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01271799A (en) * | 1988-04-25 | 1989-10-30 | Suzuki Gakki Seisakusho:Kk | Electronic instrument with semiconductor pressure sensor |
| JPH01271797A (en) * | 1988-04-25 | 1989-10-30 | Suzuki Gakki Seisakusho:Kk | Electronic keyboard wind instrument |
| JPH01271798A (en) * | 1988-04-25 | 1989-10-30 | Suzuki Gakki Seisakusho:Kk | Electronic wind instrument |
| JP2009042042A (en) * | 2007-08-08 | 2009-02-26 | Tokai Univ | Sensor module and force sensor |
| JP2021004820A (en) * | 2019-06-27 | 2021-01-14 | 地方独立行政法人東京都立産業技術研究センター | Contact pressure sensor and contact pressure measurement system |
-
1981
- 1981-08-12 JP JP12720381A patent/JPS5828634A/en active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5828634A (en) | 1983-02-19 |
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