JPS6355013B2 - - Google Patents
Info
- Publication number
- JPS6355013B2 JPS6355013B2 JP12720481A JP12720481A JPS6355013B2 JP S6355013 B2 JPS6355013 B2 JP S6355013B2 JP 12720481 A JP12720481 A JP 12720481A JP 12720481 A JP12720481 A JP 12720481A JP S6355013 B2 JPS6355013 B2 JP S6355013B2
- Authority
- JP
- Japan
- Prior art keywords
- pressure
- sensitive element
- plate
- sensitive elements
- sensitive
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000000835 fiber Substances 0.000 claims description 16
- 230000006835 compression Effects 0.000 claims description 9
- 238000007906 compression Methods 0.000 claims description 9
- 230000005540 biological transmission Effects 0.000 claims description 8
- 229920000049 Carbon (fiber) Polymers 0.000 claims description 6
- 239000004917 carbon fiber Substances 0.000 claims description 6
- 238000010586 diagram Methods 0.000 description 4
- 238000001514 detection method Methods 0.000 description 3
- 230000015572 biosynthetic process Effects 0.000 description 1
- 238000009530 blood pressure measurement Methods 0.000 description 1
- 238000010304 firing Methods 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 239000002994 raw material Substances 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L1/00—Measuring force or stress, in general
- G01L1/20—Measuring force or stress, in general by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids; by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Measuring Fluid Pressure (AREA)
Description
【発明の詳細な説明】
本発明は印加力に対して繊維の接触状態が変化
することに関連して抵抗値が変化する炭素繊維な
どの導電性繊維を感圧素子とする圧力センサに関
する。DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a pressure sensor that uses conductive fibers such as carbon fibers as pressure-sensitive elements whose resistance value changes in relation to changes in the contact state of the fibers in response to applied force.
従来より、この種の感圧素子を使用した圧力セ
ンサとしては、例えば本出願人が特願和56−
67264号（特開昭57−182138号）（発明の名称「圧
力センサ」）において提案したものがある。 Conventionally, pressure sensors using this type of pressure sensitive element have been developed, for example, in Japanese Patent Application No.
There is a proposal in No. 67264 (Japanese Unexamined Patent Publication No. 57-182138) (invention title: "Pressure sensor").
上記圧力センサは、第１図にその断面図を示す
ような基本的構成を有する。 The above-mentioned pressure sensor has a basic configuration as shown in a sectional view in FIG.
第１図において、１は感圧素子であり、炭素繊
維等の導電性繊維を平板状に配向成形したもの
で、繊維相互は複雑にからみあつている。２ａと
２ｂは感圧素子１の両面に接着された電極板であ
る。厚み方向への印加圧力に対して感圧素子１は
応力を発生するとともに応力歪を生じ、それに伴
つて繊維どうしの接触抵抗と電流経路が変化する
ことにより感圧素子１の抵抗値が変化する。抵抗
値変化は電極板２ａ，２ｂにより検出される。 In FIG. 1, reference numeral 1 denotes a pressure sensitive element, which is formed by orienting conductive fibers such as carbon fibers into a flat plate shape, and the fibers are intricately entangled with each other. 2a and 2b are electrode plates adhered to both sides of the pressure sensitive element 1. In response to the applied pressure in the thickness direction, the pressure sensitive element 1 generates stress and stress strain, and as a result, the contact resistance between the fibers and the current path change, resulting in a change in the resistance value of the pressure sensitive element 1. . Changes in resistance value are detected by electrode plates 2a and 2b.
上記第１図の圧力センサは、印加圧力に対して
その抵抗値が第２図のように変化する。 The resistance value of the pressure sensor shown in FIG. 1 changes as shown in FIG. 2 with respect to applied pressure.
しかしながら、上記の圧力センサは、炭素繊維
等の導電性繊維の機械的特性により、圧力と抵抗
値との間の関係にヒステリシスを有している。 However, the above pressure sensor has hysteresis in the relationship between pressure and resistance value due to the mechanical properties of conductive fibers such as carbon fibers.
このため、圧力検出の分解能が狭く、用途も限
定されるといつた欠点があつた。 For this reason, the resolution of pressure detection is narrow and the applications are limited.
本発明は導電性繊維を使用した圧力センサにお
ける上記事情に鑑みてなされたものであつて、圧
力と抵抗値との間に存在するヒステリシスを改善
するようにした圧力センサを提供することを目的
としている。 The present invention was made in view of the above-mentioned circumstances regarding pressure sensors using conductive fibers, and an object of the present invention is to provide a pressure sensor that improves the hysteresis that exists between pressure and resistance value. There is.
このため、本発明は、印加圧力によつて繊維ど
うしの接触状態が変化し、その接触抵抗および電
流経路の変化に関連して抵抗値が変化するように
平板状に配向形成された炭素繊維等の導電性繊維
からなる特性の互いに異なる２個の感圧素子を備
え、これら感圧素子の一方に設けた孔に他方の感
圧素子を嵌入して同心状に配置し、その支持板と
外部圧力伝達部材から外部圧力が加えられる加圧
板との間に２個の上記感圧素子を保持するととも
に、上記支持板と加圧板との間に圧縮バネを縮装
し、前記２個の感圧素子の一方の感圧素子と第１
の可変抵抗器を接続してなる第１の直列回路と、
他方の感圧素子と第２の可変抵抗器を接続してな
る第２の直列回路とに同じ電圧を印加し、一方の
感圧素子の端子電圧と他方の感圧素子の端子電圧
の電位差により、圧力伝達部材に加えられる圧力
を検出するようにしたことを特徴としている。 For this reason, the present invention provides carbon fibers etc. that are oriented in a flat plate shape so that the contact state between the fibers changes depending on the applied pressure, and the resistance value changes in relation to the change in contact resistance and current path. Two pressure-sensitive elements with different characteristics are made of conductive fibers, and the other pressure-sensitive element is fitted into a hole provided in one of the pressure-sensitive elements and arranged concentrically. The two pressure-sensitive elements are held between the pressure plate to which external pressure is applied from the pressure transmission member, and a compression spring is compressed between the support plate and the pressure plate, and the two pressure-sensitive elements are compressed between the support plate and the pressure plate. One pressure sensitive element and the first
a first series circuit formed by connecting variable resistors;
The same voltage is applied to the second series circuit formed by connecting the other pressure-sensitive element and the second variable resistor, and due to the potential difference between the terminal voltage of one pressure-sensitive element and the terminal voltage of the other pressure-sensitive element, , the pressure applied to the pressure transmission member is detected.
以下、添付図面を参照して本発明を詳細に説明
する。 Hereinafter, the present invention will be described in detail with reference to the accompanying drawings.
第３図において、１１および１２は第１図と同
様の感圧素子で、これら感圧素子１１および１２
は、印加圧力によつて繊維どうしの接触状態が変
化し、その接触抵抗および電流経路の変化に関連
して抵抗値が変化するように平板状に配向形成さ
れた炭素繊維等の導電性繊維からなり、その印加
圧力に対する抵抗値の変化特性は互いに相異する
ものを使用する。 In FIG. 3, 11 and 12 are pressure sensitive elements similar to those in FIG.
is made of conductive fibers such as carbon fibers that are oriented and formed into a flat plate so that the contact state between the fibers changes depending on the applied pressure, and the resistance value changes in relation to the change in contact resistance and current path. Therefore, the resistance value changes with respect to the applied pressure are different from each other.
感圧素子１１は円板状の形状を、また、感圧素
子１２は中心部に上記感圧素子１１の径よりも
やゝ大きな径を有する孔１３を備えた円環状の形
状を夫々有しており、これら感圧素子１１および
１２の厚さは等しい。 The pressure-sensitive element 11 has a disk-like shape, and the pressure-sensitive element 12 has an annular shape with a hole 13 in the center having a diameter slightly larger than the diameter of the pressure-sensitive element 11. The pressure sensitive elements 11 and 12 have the same thickness.
感圧素子１１の上面および下面には夫々電極板
１１ａおよび１１ｂを接着するとともに、感圧素
子１２の上面および下面にも夫々電極板１２ａお
よび１２ｂを接着している。 Electrode plates 11a and 11b are bonded to the upper and lower surfaces of the pressure sensitive element 11, respectively, and electrode plates 12a and 12b are bonded to the upper and lower surfaces of the pressure sensitive element 12, respectively.
上記感圧素子１１は円環状の感圧素子１２の上
記孔１３に嵌入し、２つの感圧素子１１と１２と
を同心状に配置して加圧板１４とともにケーシン
グ１５内に収容し、該ケーシング１５の底部の支
持板１６と上記加圧板１４との間に上記感圧素子
１１と１２を保持している。 The pressure sensitive element 11 is fitted into the hole 13 of the annular pressure sensitive element 12, and the two pressure sensitive elements 11 and 12 are arranged concentrically and accommodated together with the pressure plate 14 in the casing 15. The pressure sensitive elements 11 and 12 are held between the support plate 16 at the bottom of the pressure plate 15 and the pressure plate 14.
上記感圧素子１１および１２の電極板１１ａお
よび１２ａは加圧板１４に、また、電極板１１ｂ
および１２ｂはケーシング１５の支持板１６に
夫々接着される。 The electrode plates 11a and 12a of the pressure sensitive elements 11 and 12 are connected to the pressure plate 14, and the electrode plate 11b
and 12b are bonded to the support plate 16 of the casing 15, respectively.
上記加圧板１４には、その上面中央部から外部
圧力伝達部材１７をケーシング１５の孔１８を通
して出没自在に突出させる一方、上記加圧板１４
と支持板１６との間には、圧縮バネ１９を縮装し
ている。 The pressure plate 14 has an external pressure transmitting member 17 protruding from the center of its upper surface through the hole 18 of the casing 15 so as to be freely retractable.
A compression spring 19 is compressed between the support plate 16 and the support plate 16.
上記圧縮バネ１９は、特願昭56−67264号にも
記載したように、感圧素子１１および１２の導電
性繊維がその機械的特性により生ずるクリープ歪
の抑制と、圧力の測定範囲の拡大を図るためのも
ので、上記圧縮バネ１９により支持板１６から離
れる向きに付勢される加圧板１４は、圧力伝達部
材１７を通して外部から加えられる圧力に対し
て、ケーシング１５内部に設けた段部２０に当て
止めされて動作範囲が制限される。 As described in Japanese Patent Application No. 56-67264, the compression spring 19 suppresses creep strain caused by the mechanical properties of the conductive fibers of the pressure sensitive elements 11 and 12, and expands the pressure measurement range. The pressure plate 14, which is biased away from the support plate 16 by the compression spring 19, responds to the pressure applied from the outside through the pressure transmission member 17 by a stepped portion 20 provided inside the casing 15. The range of motion is limited as it is stopped.
上記圧力センサは、第４図の回路に組み込まれ
て使用される。 The pressure sensor described above is used by being incorporated into the circuit shown in FIG.
第４図において、R1，R2は夫々第１および第
２の可変抵抗器としての半固定の可変抵抗器、
R11およびR12は夫々感圧素子１１および１２を
表わす抵抗であつて、これら可変抵抗器R1，R2、
抵抗R11およびR12は夫々ブリツジの各一辺をな
すように接続される。 In FIG. 4, R 1 and R 2 are semi-fixed variable resistors as the first and second variable resistors, respectively;
R 11 and R 12 are resistances representing pressure sensitive elements 11 and 12, respectively, and these variable resistors R 1 , R 2 ,
Resistors R 11 and R 12 are connected to each side of the bridge.
即ち、上記感圧素子１１と１２の間の電極板１
１ｂと１２ｂはアースに接続するとともに、感圧
素子１１の電極板１１ａと電源＋VDとの間には
可変抵抗器R1を、また、感圧素子１２の電極板
１２ａと上記電源＋VDとの間には可変抵抗器R2
を夫々接続している。上記可変抵抗器R1と感圧
素子１１とは第１の直列回路を構成し、また、上
記可変抵抗器R2と感圧素子１２とは第２の直列
回路を構成する。 That is, the electrode plate 1 between the pressure sensitive elements 11 and 12
1b and 12b are connected to ground, and a variable resistor R1 is connected between the electrode plate 11a of the pressure-sensitive element 11 and the power supply + VD , and a variable resistor R1 is connected between the electrode plate 12a of the pressure-sensitive element 12 and the power supply + VD . Between the variable resistor R 2
are connected to each other. The variable resistor R 1 and the pressure sensitive element 11 constitute a first series circuit, and the variable resistor R 2 and the pressure sensitive element 12 constitute a second series circuit.
上記電極板１１ａの電位V11と電極板１２ａの
電位V12の電位差（V11−V12）は、演算増巾器
OAと抵抗R3，R4，R5およびR6からなる周知の
演算増巾器により増巾している。 The potential difference (V 11 −V 12 ) between the potential V 11 of the electrode plate 11a and the potential V 12 of the electrode plate 12a is calculated using an operational amplifier.
It is amplified by a well-known operational amplifier consisting of OA and resistors R 3 , R 4 , R 5 and R 6 .
感圧センサを上記構成とすれば、圧力伝達部材
１７のケーシング１５の突出部分に印加された印
加力は、可圧板１４を通して感圧素子１１，１２
および圧縮バネ１９に伝達される。 If the pressure sensor has the above configuration, the applied force applied to the protruding portion of the casing 15 of the pressure transmitting member 17 is transmitted to the pressure sensitive elements 11 and 12 through the pressure plate 14.
and is transmitted to the compression spring 19.
このため、これら感圧素子１１，１２および圧
縮バネ１９は上記の印加力を受けて応力を発生す
るとともに応力歪を生ずる。 For this reason, the pressure sensitive elements 11, 12 and the compression spring 19 receive the above-mentioned applied force and generate stress as well as stress strain.
圧縮バネ２１に生ずる応力歪と感圧素子１１お
よび１２に生ずる応力歪は一定で、これら感圧素
子１１および１２に夫々発生した応力の和が圧力
伝達部材１７の先端部に発生する応力となつて現
れる。 The stress strain generated in the compression spring 21 and the stress strain generated in the pressure sensitive elements 11 and 12 are constant, and the sum of the stresses generated in the pressure sensitive elements 11 and 12, respectively, becomes the stress generated in the tip of the pressure transmission member 17. appears.
感圧素子１１および１２の各々の応力歪は、こ
れら感圧素子１１および１２の機械的特性により
決定され、具体的には、成生時の焼成温度や繊維
の原料の種類によつて決定される。 The stress strain of each pressure-sensitive element 11 and 12 is determined by the mechanical properties of these pressure-sensitive elements 11 and 12, and specifically, by the firing temperature during formation and the type of fiber raw material. Ru.
このため、感圧素子１１が加圧されると、その
抵抗値は、第５図に示すように、矢印A1の向き
に曲線l1に沿つて変化するのに対し、上記感圧素
子１１に印加されている力が除圧されると、感圧
素子１１の抵抗値は、矢印A1′の向きに曲線l1′に
沿つて変化し、加圧時と除圧時では、同一圧力Ｐ
に対して、感圧素子１１の抵抗値にΔR11の差が
生じる。 Therefore, when the pressure sensitive element 11 is pressurized, its resistance value changes along the curve l1 in the direction of the arrow A1 , as shown in FIG. When the force applied to the pressure sensitive element 11 is removed, the resistance value of the pressure sensitive element 11 changes along the curve l 1 ′ in the direction of the arrow A 1 ′, and the pressure remains the same when the pressure is applied and when the pressure is removed. P
In contrast, a difference of ΔR 11 occurs in the resistance value of the pressure sensitive element 11.
上記と同様に、感圧素子１２が加圧されると、
その抵抗値は、第５図に示すように、矢印A2の
向きに曲線l2に沿つて変化のに対し、上記感圧素
子１２に印加されている力が除圧されると、感圧
素子１２の抵抗値は、矢印A2′の向きに曲線l2′に
沿つて変化し、加圧時と除圧時では、同一圧力Ｐ
に対して、感圧素子１２の抵抗値にΔR12の差が
生じる。 Similarly to the above, when the pressure sensitive element 12 is pressurized,
As shown in FIG. 5, the resistance value changes along the curve l2 in the direction of the arrow A2 , but when the force applied to the pressure sensitive element 12 is removed, the pressure sensitive element The resistance value of the element 12 changes along the curve l 2 ' in the direction of the arrow A 2 ', and the same pressure P is applied during pressurization and depressurization.
In contrast, a difference of ΔR 12 occurs in the resistance value of the pressure sensitive element 12.
しかしながら、第４図の回路において、可変抵
抗器R1，R2により、抵抗R11およびR12（感圧素子
１１および１２）を夫々流れる電流I1およびI2を
調整し、印加圧力の全ての範囲でΔR11×I1＝
ΔR12×I2となるようにすれば、感圧素子１１の
電極板１１ａの電位V11と感圧素子１２の電極板
１２ａの電位V12の電位差（V11−V12）の値は、
同一の圧力Ｐに対して、次のように、加圧時と除
圧時とで等しくなる。 However, in the circuit shown in FIG. 4, the variable resistors R 1 and R 2 adjust the currents I 1 and I 2 flowing through the resistors R 11 and R 12 (pressure-sensitive elements 11 and 12), respectively, so that all of the applied pressure is ΔR 11 ×I 1 =
If ΔR 12 ×I 2 is established, the value of the potential difference (V 11 −V 12 ) between the potential V 11 of the electrode plate 11a of the pressure sensitive element 11 and the potential V 12 of the electrode plate 12a of the pressure sensitive element 12 is as follows.
For the same pressure P, it becomes equal when pressurizing and when depressurizing, as follows.
即ち、上記圧力Ｐに対して、加圧時には、
V11−V12＝R11×I1−R12×I2
となり、除圧時には、
V11−V12＝（R11＋ΔR11）I1−（R12＋ΔR12）I2＝R11
×I1−R12×I2
となる。 That is, for the above pressure P, when pressurizing, V 11 −V 12 = R 11 ×I 1 −R 12 ×I 2 , and when depressurizing, V 11 −V 12 = (R 11 +ΔR 11 )I 1 −(R 12 +ΔR 12 )I 2 =R 11
×I 1 −R 12 ×I 2 .
従つて、上記電位差（V11−V12）を増巾した
演算増巾器OAの出力V0は、第６図に示すよう
に、第３図の圧力センサに加えられる圧力に対し
て、ヒステリシスを殆どなくすことができる。 Therefore, as shown in FIG. 6, the output V 0 of the operational amplifier OA that amplifies the potential difference (V 11 −V 12 ) has hysteresis with respect to the pressure applied to the pressure sensor in FIG. 3. can be almost eliminated.
なお、第３図に示す圧力センサは、圧力伝達部
材１７に加えられる力あるいは荷重を測定する場
合等に使用されるが、液体圧もしくは気体圧等を
測定する場合には、第７図に示すように、第３図
の圧力センサのケーシング１５の圧力伝達部材１
７の突出端面にスリバチ状の凹部３１を設け、該
凹部３１の開口端面にダイヤフラム３２を接着す
るとともに、該ダイヤフラム３２を上記圧力伝達
部材１７の先端面に接着したものを使用すること
ができる。 The pressure sensor shown in FIG. 3 is used when measuring the force or load applied to the pressure transmission member 17, but when measuring liquid pressure or gas pressure, etc., the pressure sensor shown in FIG. 7 is used. As shown in FIG. 3, the pressure transmission member 1 of the casing 15 of the pressure sensor is
A slit-like recess 31 is provided on the protruding end surface of the pressure transmitting member 17, a diaphragm 32 is bonded to the open end surface of the recess 31, and the diaphragm 32 is bonded to the tip surface of the pressure transmitting member 17.
本発明は上記実施例に限定されるものではな
く、本発明の要旨の範囲内で種々の構成とするこ
とができる。 The present invention is not limited to the above-mentioned embodiments, and various configurations can be made within the scope of the gist of the present invention.
以上、詳細に説明したことからも明らかなよう
に、本発明は、導電性繊維を平板状に配向形成し
た互いに特性の異なる２個の感圧素子を支持板と
加圧板との間に同心状に配置するとともに、これ
ら２個の感圧素子を差動的に組み合せて各感圧素
子が有しているヒステリシスを相殺するようにし
たから、圧力センサに加えられる同一の圧力に対
する出力の差は殆どなくなり、ヒステリシスが大
巾に改善され、圧力センサの用途も拡大される。 As is clear from the above detailed explanation, the present invention provides two pressure-sensitive elements having different characteristics each formed by orienting conductive fibers in a flat plate shape between a support plate and a pressure plate in a concentric manner. , and by differentially combining these two pressure sensing elements to cancel out the hysteresis of each pressure sensing element, the difference in output for the same pressure applied to the pressure sensor is Hysteresis is almost completely eliminated, hysteresis is greatly improved, and the applications of pressure sensors are expanded.
第１図は従来の圧力センサの基本的構成を示す
断面図、第２図は第１図の圧力センサの印加力と
抵抗値の関係を示す特性図、第３図は本発明に係
る圧力センサの大略の構造を示す断面図、第４図
は第３図の圧力センサに使用される圧力検出用の
回路図、第５図は第３図の圧力センサに使用され
る２つの感圧素子の印加力に対する印加力と抵抗
値との関係を夫々示す特性図、第６図は第４図の
圧力検出用の回路の出力説明図、第７図は第３図
の変形例の断面図である。
１１，１２……感圧素子（１１ａ，１１ｂ，１
２ａ，１２ｂ……電極板）、１３……孔、１４…
…加圧板、１５……ケーシング、１６……支持
板、１７……圧力伝達部材、１９……圧縮バネ、
３１……凹部、３２……ダイヤフラム。
Fig. 1 is a sectional view showing the basic configuration of a conventional pressure sensor, Fig. 2 is a characteristic diagram showing the relationship between applied force and resistance value of the pressure sensor of Fig. 1, and Fig. 3 is a pressure sensor according to the present invention. Figure 4 is a circuit diagram for pressure detection used in the pressure sensor in Figure 3, and Figure 5 is a cross-sectional view showing the general structure of the pressure sensor in Figure 3. Characteristic diagrams showing the relationship between applied force and resistance value, FIG. 6 is an explanatory diagram of the output of the pressure detection circuit in FIG. 4, and FIG. 7 is a cross-sectional view of a modification of FIG. 3. . 11, 12...Pressure sensitive elements (11a, 11b, 1
2a, 12b...electrode plate), 13...hole, 14...
... Pressure plate, 15 ... Casing, 16 ... Support plate, 17 ... Pressure transmission member, 19 ... Compression spring,
31... recess, 32... diaphragm.
Claims (1)
化し、その接触抵抗および電流経路の変化に関連
して抵抗値が変化するように平板状に配向形成さ
れた炭素繊維等の導電性繊維からなる特性の互い
に異なる２個の感圧素子を備え、これら感圧素子
の一方に設けた孔に他方の感圧素子を嵌入して同
心状に配置し、その支持板と外部圧力伝達部材か
ら外部圧力が加えられる加圧板との間に２個の上
記感圧素子を保持するとともに、上記支持板と加
圧板との間に圧縮バネを縮装し、前記２個の感圧
素子の一方の感圧素子と第１の可変抵抗器を接続
してなる第１の直列回路と、他方の感圧素子と第
２の可変抵抗器を接続してなる第２の直列回路と
に同じ電圧を印加し、一方の感圧素子の端子電圧
と他方の感圧素子の端子電圧の電位差により、圧
力伝達部材に加えられる圧力を検出するようにし
たことを特徴とする圧力センサ。1 Consisting of conductive fibers such as carbon fibers that are oriented in a flat plate shape so that the contact state between the fibers changes depending on the applied pressure, and the resistance value changes in relation to the change in contact resistance and current path. Two pressure-sensitive elements with different characteristics are provided, and the other pressure-sensitive element is fitted into a hole provided in one of the pressure-sensitive elements and arranged concentrically, and external pressure is transmitted from the support plate and the external pressure transmission member. The two pressure-sensitive elements are held between the pressure plate to which the pressure is applied, and a compression spring is compressed between the support plate and the pressure plate, so that one of the two pressure-sensitive elements is Applying the same voltage to a first series circuit formed by connecting the element and the first variable resistor and a second series circuit formed by connecting the other pressure-sensitive element and the second variable resistor, A pressure sensor characterized in that pressure applied to a pressure transmitting member is detected by a potential difference between a terminal voltage of one pressure sensitive element and a terminal voltage of the other pressure sensitive element.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12720481A JPS5828635A (en) | 1981-08-12 | 1981-08-12 | Pressure sensor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12720481A JPS5828635A (en) | 1981-08-12 | 1981-08-12 | Pressure sensor |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5828635A JPS5828635A (en) | 1983-02-19 |
| JPS6355013B2 true JPS6355013B2 (en) | 1988-11-01 |
Family
ID=14954286
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12720481A Granted JPS5828635A (en) | 1981-08-12 | 1981-08-12 | Pressure sensor |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5828635A (en) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH06743Y2 (en) * | 1988-01-12 | 1994-01-05 | エスエムシー株式会社 | Fluid pressure confirmation sensor |
| JP4627661B2 (en) * | 2005-01-25 | 2011-02-09 | 国立大学法人岐阜大学 | Pressure sensor for catheter |
| GB2565564B (en) * | 2017-08-16 | 2020-04-08 | Peratech Holdco Ltd | Detecting force |
-
1981
- 1981-08-12 JP JP12720481A patent/JPS5828635A/en active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5828635A (en) | 1983-02-19 |
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