JPS63270405A - Production of metal hyperfine powder - Google Patents
Production of metal hyperfine powderInfo
- Publication number
- JPS63270405A JPS63270405A JP62102567A JP10256787A JPS63270405A JP S63270405 A JPS63270405 A JP S63270405A JP 62102567 A JP62102567 A JP 62102567A JP 10256787 A JP10256787 A JP 10256787A JP S63270405 A JPS63270405 A JP S63270405A
- Authority
- JP
- Japan
- Prior art keywords
- gas
- reaction
- carbonyl compound
- powder
- metal powder
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000843 powder Substances 0.000 title claims abstract description 41
- 229910052751 metal Inorganic materials 0.000 title claims abstract description 31
- 239000002184 metal Substances 0.000 title claims abstract description 31
- 238000004519 manufacturing process Methods 0.000 title claims description 13
- 238000006243 chemical reaction Methods 0.000 claims abstract description 27
- 239000007789 gas Substances 0.000 claims abstract description 27
- 229910052723 transition metal Inorganic materials 0.000 claims abstract description 13
- -1 transition metal carbonyl compound Chemical class 0.000 claims abstract description 10
- 150000001728 carbonyl compounds Chemical class 0.000 claims abstract description 9
- 239000011261 inert gas Substances 0.000 claims abstract description 5
- 239000001257 hydrogen Substances 0.000 claims abstract description 4
- 229910052739 hydrogen Inorganic materials 0.000 claims abstract description 4
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 claims abstract description 3
- 238000000197 pyrolysis Methods 0.000 claims description 14
- 150000003624 transition metals Chemical class 0.000 claims description 5
- 238000000034 method Methods 0.000 abstract description 12
- 230000005415 magnetization Effects 0.000 abstract description 10
- 238000000354 decomposition reaction Methods 0.000 abstract description 4
- 239000012895 dilution Substances 0.000 abstract description 2
- 238000010790 dilution Methods 0.000 abstract description 2
- 230000000717 retained effect Effects 0.000 abstract description 2
- 229910017147 Fe(CO)5 Inorganic materials 0.000 abstract 1
- 150000001875 compounds Chemical class 0.000 abstract 1
- 238000007865 diluting Methods 0.000 abstract 1
- 229920006395 saturated elastomer Polymers 0.000 abstract 1
- 239000012071 phase Substances 0.000 description 10
- 238000005979 thermal decomposition reaction Methods 0.000 description 7
- 239000002245 particle Substances 0.000 description 6
- 239000002904 solvent Substances 0.000 description 5
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 4
- 239000003085 diluting agent Substances 0.000 description 4
- 230000000052 comparative effect Effects 0.000 description 3
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 2
- 229910001111 Fine metal Inorganic materials 0.000 description 2
- 238000009835 boiling Methods 0.000 description 2
- 239000007791 liquid phase Substances 0.000 description 2
- 239000000203 mixture Substances 0.000 description 2
- 229910052757 nitrogen Inorganic materials 0.000 description 2
- 239000012808 vapor phase Substances 0.000 description 2
- 229910021012 Co2(CO)8 Inorganic materials 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- 229910052786 argon Inorganic materials 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000008246 gaseous mixture Substances 0.000 description 1
- 150000002431 hydrogen Chemical class 0.000 description 1
- 238000009776 industrial production Methods 0.000 description 1
- 229910052742 iron Inorganic materials 0.000 description 1
- 230000014759 maintenance of location Effects 0.000 description 1
- 239000011259 mixed solution Substances 0.000 description 1
- 229910052750 molybdenum Inorganic materials 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
- 238000004627 transmission electron microscopy Methods 0.000 description 1
- 229910052721 tungsten Inorganic materials 0.000 description 1
Abstract
Description
【発明の詳細な説明】
〔発明の背景〕
産業上の利用分野
本発明は、金属超微粉の製法に関する。さらに詳しくは
、本発明は、遷移金属カルボニル化合物を特定の条件下
で気相熱分解することにより、高密度磁気記録媒体等に
適する優れた磁気特性、すなわち高保磁力および高飽和
磁化、を有する金属磁性超微粉の製法に関する。DETAILED DESCRIPTION OF THE INVENTION BACKGROUND OF THE INVENTION Field of Industrial Application The present invention relates to a method for producing ultrafine metal powder. More specifically, the present invention produces a metal having excellent magnetic properties suitable for high-density magnetic recording media, such as high coercive force and high saturation magnetization, by subjecting transition metal carbonyl compounds to gas phase thermal decomposition under specific conditions. Concerning a method for producing magnetic ultrafine powder.
従来の技術
Ｆｅ、Ｎｉ等の遷移金属カルボニル化合物の気相熱分解
により金属微粉末を得る方法は公知であって、例えば特
公昭４３−２４３１６号、同４４−１１５２９号、同５
２−３１８０９号公報等が知られている。2. Description of the Related Art Methods for obtaining fine metal powders by gas-phase thermal decomposition of carbonyl compounds of transition metals such as Fe and Ni are known, for example, as disclosed in Japanese Patent Publications No. 43-24316, No. 44-11529, No. 5
Publication No. 2-31809 and the like are known.
しかし、本発明者らの知る限りでは、これら公報のいず
れにおいても、得られる粉末の粒子径は数ミクロン程度
と大きく、本発明が目的とするような平均粒径０，５ミ
クロン以下の金属超微粉は、得られないし、更に高密度
磁気記録媒体等に適し、た高保磁力および高飽和磁化の
優れた磁気特性を有する金属超微粉も得られていない。However, as far as the present inventors know, in all of these publications, the particle size of the obtained powder is large, on the order of several microns, and the particle size of the powder obtained is large, on the order of several microns. No fine powder has been obtained, and furthermore, no ultrafine metal powder has been obtained which is suitable for high-density magnetic recording media and has excellent magnetic properties such as high coercive force and high saturation magnetization.
また、特公昭３９−１００４号、同４５−１６８６８号
、特開昭５８−１３７２０２号公報等に於いては、遷移
金属カルボニル化合物を特殊な溶媒に溶解した液相状態
で熱分解反応を行なうことにより、溶媒中に分散した金
属超微粉を得ることを提案している。In addition, in Japanese Patent Publication Nos. 39-1004, 45-16868, and 58-137202, the thermal decomposition reaction is conducted in a liquid phase state in which a transition metal carbonyl compound is dissolved in a special solvent. proposed to obtain ultrafine metal powder dispersed in a solvent.
しかし、本発明者らの知る限りでは、金属超微粉の工業
的製造において、液相法の製法では、金属超微粉は見掛
は密度が極めて低いことなどから、超微粉と溶媒との分
離プロセスが困難となったり、溶媒当りの生産量が低く
抑えられるなどして高コストになるなど、気相法の製法
に比較すると量産性、経済性の点で聞届を生ずる。However, as far as the present inventors know, in the industrial production of ultrafine metal powder, the liquid phase method requires a separation process between the ultrafine powder and the solvent because the ultrafine metal powder has an extremely low apparent density. Compared to the gas phase method, it is difficult to mass produce and is economically disadvantageous, as it is difficult to process, and the production volume per solvent is kept low, resulting in high costs.
要旨
本発明者等は、以上の状況に鑑み、気相法金属超微粉の
製法について鋭意検討の結果、本発明をなし得た。Summary In view of the above circumstances, the inventors of the present invention have completed the present invention as a result of intensive studies on the method for producing ultrafine metal powder produced by vapor phase method.
すなわち、本発明による金属超微細粉末の製造法は、遷
移金属カルボニル化合物を気相熱分解反応に付して該遷
移金属の粉末を製造する方法において、該カルボニル化
合物を不活性ガスまたは水素でその濃度を３体積％以下
に希釈した混合気体を、１００ガウス以上の磁場を印加
した反応系内に５秒以下滞留させて気相熱分解反応を行
なうこと、を特徴とするものである。That is, the method for producing ultrafine metal powder according to the present invention is a method for producing a transition metal powder by subjecting a transition metal carbonyl compound to a gas phase pyrolysis reaction, in which the carbonyl compound is dehydrated with an inert gas or hydrogen. The method is characterized in that a gaseous mixture diluted to a concentration of 3% by volume or less is retained in a reaction system to which a magnetic field of 100 Gauss or more is applied for 5 seconds or less to perform a gas phase pyrolysis reaction.
効果
本発明方法によれば、極めて微細な、たとえば長軸径０
．５ミクロン以下、短軸径０．１ミクロン以下、の遷移
金属粉末が得られる。そして、この遷移金属粉末は、磁
気特性がすぐれている。Effects According to the method of the present invention, extremely fine, for example, major axis diameter 0
．． A transition metal powder with a diameter of 5 microns or less and a minor axis diameter of 0.1 microns or less is obtained. This transition metal powder has excellent magnetic properties.
本発明方法は、磁場の印加下に行なうという点を除けば
通常の熱分解法と同じであるから、前記した公知改良法
に認められるような問題点は存在しない。Since the method of the present invention is the same as a conventional pyrolysis method except that it is carried out under the application of a magnetic field, it does not have the problems found in the known improved methods described above.
特定の希釈された条件での熱分解を特定の強さの磁場の
印加下に行なうことによって超微粉が得られ、しかもそ
れが磁気特性のすぐれたものであるということは思いが
けなかったことと思料される。It was unexpected that ultrafine powder could be obtained by performing pyrolysis under specific diluted conditions and under the application of a magnetic field of a specific strength, and that it also had excellent magnetic properties. be done.
遷移金属カルボニル化合物
本発明に於いて使用される遷移金属カルボニル化合物は
、Ｆ ｅ、、Ｎ ｊＳＣｏ、 Ｗ、 Ｍｏ等のカルボニ
ル化合物及びこれらの混合物であり、好ましくは低沸点
のＦ ｅ （ＣＯ） ｃ、およびＮ ｉ（ＣＯ） ４で
ある。Transition metal carbonyl compounds The transition metal carbonyl compounds used in the present invention are carbonyl compounds such as Fe, NjSCo, W, Mo, etc., and mixtures thereof, preferably Fe(CO)c having a low boiling point. , and N i (CO) 4.
高沸点のＣｏ５Ｗ等のカルボニル化合物は、それ自身の
熱分解に加えて、これをＦ ｅ （ＣＯ） ５あるいは
Ｎ ｉ （ＣＯ） ４に少量溶解させて、反応系に供
給することで溶媒金属との合金粒子を得ることもできる
。In addition to thermally decomposing the high-boiling point carbonyl compound such as Co5W, it can be dissolved in a small amount in Fe (CO) 5 or Ni (CO) 4 and supplied to the reaction system to dissolve the solvent metal. It is also possible to obtain alloy particles of
熱分解
本発明による熱分解は、操作上は、特定の磁場を熱分解
帯域に印加するという点を除けば、従来のそれと本質的
には異ならない。Pyrolysis Pyrolysis according to the invention does not differ essentially from conventional ones in operation, except that a specific magnetic field is applied to the pyrolysis zone.
第１図は、そのような本発明による熱分解の要旨を説明
するものである。FIG. 1 explains the gist of such thermal decomposition according to the present invention.
第１図において、金属カルボニル化合物を導入管１より
混合室２に装入する。これに、希釈ガス導入管３より希
釈ガスを導入して、所定濃度の金属カルボニル化合物混
合ガスを得る。In FIG. 1, a metal carbonyl compound is introduced into a mixing chamber 2 through an introduction pipe 1. A diluent gas is introduced into this through the diluent gas introduction pipe 3 to obtain a metal carbonyl compound mixed gas having a predetermined concentration.
希釈ガスとしては、窒素、ア゛ルゴン等の不活性ガスま
たは水素及びそれらの混合気体が使用される。希釈ガス
中の遷移金属カルボニル化合物の濃度は、３体積％以下
、好ましくは１．５〜０．０１体積％の範囲、である。As the diluent gas, an inert gas such as nitrogen or argon, hydrogen, or a mixture thereof is used. The concentration of the transition metal carbonyl compound in the diluent gas is 3% by volume or less, preferably in the range of 1.5 to 0.01% by volume.
希釈濃度が、３体積％超過では粒径が大きく成長するの
で、本発明が目的とする高保磁力を有する磁性超微粉は
得られない。If the dilution concentration exceeds 3% by volume, the particle size will increase, making it impossible to obtain the magnetic ultrafine powder having the high coercive force that is the object of the present invention.
混合ガスは、管路３を経て反応管４へ送る。反応管内で
の滞留時間は、５秒以下、好ましくは２秒以下、である
。滞留時間が５秒超過となると粒子径が大きくなって、
本発明の目的とする磁性金属超微粉は得られない。本発
明でいう「滞留」はこのような短時間であるから、熱分
解は実質的には混合ガスを反応帯域を連続的に通過させ
て行なうということもできる。The mixed gas is sent to the reaction tube 4 via the pipe line 3. The residence time in the reaction tube is 5 seconds or less, preferably 2 seconds or less. When the residence time exceeds 5 seconds, the particle size increases,
The ultrafine magnetic metal powder targeted by the present invention cannot be obtained. Since "retention" in the present invention is defined as such a short time, it can be said that thermal decomposition is substantially carried out by continuously passing the mixed gas through the reaction zone.
反応系への磁場の印加は、永久磁石、電磁石、ソレノイ
ドコイル等の装置５のいずれもが使用可能である。印加
する磁場は、１００ガウス以上、好ましくは３００〜１
５００ガウスの範囲、である。磁場を印加することで、
保磁力を大きくし、しかも生成する金属超微粉の粒子径
を制御することもできる。Any device 5 such as a permanent magnet, an electromagnet, or a solenoid coil can be used to apply the magnetic field to the reaction system. The magnetic field to be applied is 100 Gauss or more, preferably 300 to 1
500 Gauss range. By applying a magnetic field,
It is also possible to increase the coercive force and control the particle size of the produced ultrafine metal powder.
分解温度は、３００℃以上、好ましくは４００℃以上、
が好ましい。３００℃未満の条件に於いても金属超微粉
は得られるが、目的とする高保磁力の磁性金属超微粉は
得られない。The decomposition temperature is 300°C or higher, preferably 400°C or higher,
is preferred. Although ultrafine metal powder can be obtained under conditions of less than 300°C, ultrafine magnetic metal powder with the desired high coercive force cannot be obtained.
熱分解によって生成した金属微粉は、管路５を得て捕収
室６へ送って回収する。Fine metal powder generated by thermal decomposition is sent to a collection chamber 6 through a pipe 5 and collected.
図示の装置は各種の改変が可能であることはいうまでも
ない。従って、たとえば、混合ガスの反応室への送入を
下向きに行なうこともできる。It goes without saying that the illustrated device can be modified in various ways. Thus, for example, the mixed gas can also be introduced downward into the reaction chamber.
上記の条件により、金属超微粉を生成させることで、保
磁力５００〜１２００エルステツド、飽和磁化１２０〜
２００ ｅ ｍ ｕ ／ ｇの磁気特性を宜する金属超
微粉が得られる。By producing ultrafine metal powder under the above conditions, the coercive force is 500 to 1200 oersted, and the saturation magnetization is 120 to 1200 oersted.
Ultrafine metal powder with magnetic properties of 200 emu/g is obtained.
本発明で得られる金属超微粉は高密度記録媒体として好
ましいものであるが、金属超微粉を要する分野は、これ
に限るものではないし、本発明による超微粉の用途もそ
れに限られるものでない。Although the ultrafine metal powder obtained by the present invention is preferable as a high-density recording medium, the field requiring ultrafine metal powder is not limited to this, and the use of the ultrafine powder according to the present invention is not limited thereto.
実験例
実施例−１
図に示すような反応装置において、内径２７ＩＩｌ１１
１長さ１ｍの反応管に４５０ガウスの磁場を印加し、窒
素で希釈した１、５体積％のＦｅ（Ｃｏ）５混合気体を
反応温度６００℃／滞留時間０．８秒の条件で供給して
、気相熱分解反応を行なった。Experimental Examples Example-1 In a reactor as shown in the figure, the inner diameter is 27IIl11.
1 A magnetic field of 450 Gauss was applied to a reaction tube with a length of 1 m, and a 1.5% by volume Fe(Co) mixed gas diluted with nitrogen was supplied at a reaction temperature of 600°C and a residence time of 0.8 seconds. Then, a gas phase pyrolysis reaction was carried out.
生成物の転化率は、供給Ｆ ｅ （Ｃｏ） ｃ、に対し
て３５％であった。The product conversion was 35% based on the feed Fe(Co)c.
生成物の形状は、透過電子顕微鏡の観察により、直鎖状
をした金属超微粉（長軸径：約０．５ミクロン、短軸径
：約０．０４ミクロン）であった。The shape of the product was found to be linear ultrafine metal powder (long axis diameter: about 0.5 micron, short axis diameter: about 0.04 micron) as observed by transmission electron microscopy.
比表面積は１９ゴ／ｇ、磁気特性は振動型磁力計による
測定により、保磁力８５０エルステツド、飽和磁化１６
０ ｅ ｍ ｕ ／ ｇであった。The specific surface area is 19g/g, and the magnetic properties are measured using a vibrating magnetometer, with a coercive force of 850 oersted and a saturation magnetization of 16
It was 0 emu/g.
実施例−２
実施例−１における金属粉の製造において、Ｆ ｅ （
Ｃｏ） ｃ、に替えてＣｏ２（ＣＯ）８／Ｆ ｅ （Ｃ
ｏ） ｃ、＝１／ ２０ （モル比）の混合溶液を反応
に供した他は実施例−１と全く同様にして気相熱分解反
応を行なった。Example-2 In the production of metal powder in Example-1, F e (
Co) c, instead of Co2(CO)8/F e (C
o) A gas phase thermal decomposition reaction was carried out in exactly the same manner as in Example-1, except that a mixed solution of c, = 1/20 (molar ratio) was subjected to the reaction.
生成したＦｅ−Ｃｏ超微粉の転化率は３８％であり、比
表面積１８ｒｆ／ｇ、保磁力１０８０エルステツド、飽
和磁化１５５ｅｍｕ／ｚであった。The conversion rate of the produced ultrafine Fe--Co powder was 38%, the specific surface area was 18 rf/g, the coercive force was 1080 oersted, and the saturation magnetization was 155 emu/z.
実施例−３
実施例−１における金属粉の製造において、反応温度を
３００℃に変更した他は実施例−１と全く同様にして気
相熱分解反応を行なった。Example 3 In producing the metal powder in Example 1, a gas phase pyrolysis reaction was carried out in the same manner as in Example 1, except that the reaction temperature was changed to 300°C.
生成物の転化率は１５％であり、比表面積１２ｒｔｒ／
ｇ、保磁力５５０エルステツド、飽和磁化１６０ ｅ
ｍ ｕ ／ ｇであった＠比較例−１
実施例−１における金属粉の製造において、接触時間を
８秒に変更した他は実施例−１と全く同様にして気相熱
分解反応を行なった。The conversion rate of the product is 15%, and the specific surface area is 12 rtr/
g, coercive force 550 oersted, saturation magnetization 160 e
m u / g @ Comparative Example-1 In the production of metal powder in Example-1, a gas phase pyrolysis reaction was carried out in exactly the same manner as in Example-1, except that the contact time was changed to 8 seconds. .
生成物の比表面積は６ｒｒ？／ｇであり、保磁力３５０
エルステツド、飽和磁化１５３ ｅ ｍ ｕ ／ ｇで
あった。Is the specific surface area of the product 6rr? /g, and the coercive force is 350
The saturation magnetization was 153 emu/g.
比較例−２
実施例−１における金属粉の製造において、反応系へ供
給するＦ ｅ （ＣＯ） ５の濃度を５体積％に変更し
た他は実施例−１と全く同様にして気相熱分解反応を行
なった。Comparative Example-2 In the production of metal powder in Example-1, gas phase pyrolysis was carried out in the same manner as in Example-1, except that the concentration of Fe (CO) 5 supplied to the reaction system was changed to 5% by volume. The reaction was carried out.
生成物の比表面積は３．２ｒｒｒ／ｇであり、保磁力２
５０エルステツド、飽和磁化１７０ｅｍｕ／ｇであった
〇
比較例−３
実施例−１における金属粉の製造において、印加磁場を
５０ガウスに変更した他は実施例−１と全く同様にして
気相熱分解反応を行なった。The specific surface area of the product is 3.2 rrr/g, and the coercive force is 2
50 oersted and saturation magnetization was 170 emu/g. Comparative Example-3 Vapor phase pyrolysis was carried out in the same manner as in Example-1 except that the applied magnetic field was changed to 50 Gauss in the production of metal powder in Example-1. The reaction was carried out.
生成物の比表面積は８．５ｒｆ／ｇであり、保磁力は４
７０エルステツド、飽和磁化は１４８ｅ ｍ ｕ ／
ｇであった。The specific surface area of the product is 8.5 rf/g, and the coercive force is 4
70 oersted, saturation magnetization is 148 e m u /
It was g.
図面は、本発明方法を実施する装置の一具体例を模式的
に示す説明図である。The drawing is an explanatory view schematically showing a specific example of an apparatus for carrying out the method of the present invention.
Claims (1)
該遷移金属の粉末を製造する方法において、該カルボニ
ル化合物を不活性ガスまたは水素で希釈してその濃度を
３体積％以下とした混合気体を、１００ガウス以上の磁
場を印加した反応系内に５秒以下滞留させて気相熱分解
反応を行なうことを特徴とする、金属超微細粉末の製造
法。In a method for producing a transition metal powder by subjecting a transition metal carbonyl compound to a gas phase pyrolysis reaction, the carbonyl compound is diluted with an inert gas or hydrogen to obtain a mixed gas with a concentration of 3% by volume or less. , a method for producing ultrafine metal powder, which comprises retaining the powder for 5 seconds or less in a reaction system to which a magnetic field of 100 Gauss or more is applied to carry out a gas phase pyrolysis reaction.
Priority Applications (4)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP62102567A JPS63270405A (en) | 1987-04-25 | 1987-04-25 | Production of metal hyperfine powder |
| US07/184,280 US4808216A (en) | 1987-04-25 | 1988-04-21 | Process for producing ultrafine metal powder |
| DE8888303689T DE3867896D1 (en) | 1987-04-25 | 1988-04-25 | METHOD FOR PRODUCING ULTRAFINE METAL POWDER. |
| EP88303689A EP0290177B1 (en) | 1987-04-25 | 1988-04-25 | Process for producing ultrafine metal powder |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP62102567A JPS63270405A (en) | 1987-04-25 | 1987-04-25 | Production of metal hyperfine powder |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63270405A true JPS63270405A (en) | 1988-11-08 |
Family
ID=14330798
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP62102567A Pending JPS63270405A (en) | 1987-04-25 | 1987-04-25 | Production of metal hyperfine powder |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63270405A (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20010099547A (en) * | 2000-04-27 | 2001-11-09 | 허승헌 | A design of a nanometer size metal, nonmetal, and alloy particle generator |
| US6468446B1 (en) * | 1998-05-12 | 2002-10-22 | American Air Liquide, Inc. | Generation of metal-carbonyl standards for the calibration of spectroscopic systems |
| KR100572245B1 (en) * | 2003-11-05 | 2006-04-19 | 한국기계연구원 | Manufacturing method of nano iron powder with polymer coating layer |
| JP4932718B2 (en) * | 2004-09-03 | 2012-05-16 | ヴァーレ、インコ、リミテッド | Method for producing metal powder |
-
1987
- 1987-04-25 JP JP62102567A patent/JPS63270405A/en active Pending
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6468446B1 (en) * | 1998-05-12 | 2002-10-22 | American Air Liquide, Inc. | Generation of metal-carbonyl standards for the calibration of spectroscopic systems |
| KR20010099547A (en) * | 2000-04-27 | 2001-11-09 | 허승헌 | A design of a nanometer size metal, nonmetal, and alloy particle generator |
| KR100572245B1 (en) * | 2003-11-05 | 2006-04-19 | 한국기계연구원 | Manufacturing method of nano iron powder with polymer coating layer |
| JP4932718B2 (en) * | 2004-09-03 | 2012-05-16 | ヴァーレ、インコ、リミテッド | Method for producing metal powder |
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