JPS6240852U - - Google Patents
Info
- Publication number
- JPS6240852U JPS6240852U JP13229585U JP13229585U JPS6240852U JP S6240852 U JPS6240852 U JP S6240852U JP 13229585 U JP13229585 U JP 13229585U JP 13229585 U JP13229585 U JP 13229585U JP S6240852 U JPS6240852 U JP S6240852U
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- thin film
- semiconductor thin
- interlayer insulating
- insulating film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000010409 thin film Substances 0.000 claims description 5
- 239000004065 semiconductor Substances 0.000 claims description 4
- 239000000758 substrate Substances 0.000 claims description 4
- 239000010408 film Substances 0.000 claims description 3
- 239000011229 interlayer Substances 0.000 claims description 3
- 230000000903 blocking effect Effects 0.000 claims description 2
- 239000010410 layer Substances 0.000 claims description 2
- 239000012535 impurity Substances 0.000 claims 1
- 150000002500 ions Chemical class 0.000 claims 1
- 238000004519 manufacturing process Methods 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Liquid Crystal (AREA)
- Solid State Image Pick-Up Elements (AREA)
- Non-Adjustable Resistors (AREA)
Description
第１図はこの考案の一実施例を示す断面図、第
２図ａ〜ｅはその製造工程を工程順に示す断面図
、第３図ａ〜ｅは従来例をその製造工程を工程順
に示す断面図である。 ６…基板、８…ブロツキング層兼用層間絶縁膜
、９…ａ―Ｓｉ薄膜（半導体薄膜）。
２図ａ〜ｅはその製造工程を工程順に示す断面図
、第３図ａ〜ｅは従来例をその製造工程を工程順
に示す断面図である。 ６…基板、８…ブロツキング層兼用層間絶縁膜
、９…ａ―Ｓｉ薄膜（半導体薄膜）。
Claims (1)
- 基板上に半導体薄膜を形成するとともに多層配
線用の層間絶縁膜を形成する半導体薄膜デバイス
において、前記基板からの不純物イオンに対する
ブロツクキング層を兼用する層間絶縁膜をこの基
板上に設けたことを特徴とする半導体薄膜デバイ
ス。
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13229585U JPS6240852U (ja) | 1985-08-29 | 1985-08-29 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13229585U JPS6240852U (ja) | 1985-08-29 | 1985-08-29 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6240852U true JPS6240852U (ja) | 1987-03-11 |
Family
ID=31031541
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13229585U Pending JPS6240852U (ja) | 1985-08-29 | 1985-08-29 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6240852U (ja) |
-
1985
- 1985-08-29 JP JP13229585U patent/JPS6240852U/ja active Pending