JPS5750424A - Manufacture of semiconductor device - Google Patents
Manufacture of semiconductor deviceInfo
- Publication number
- JPS5750424A JPS5750424A JP55126215A JP12621580A JPS5750424A JP S5750424 A JPS5750424 A JP S5750424A JP 55126215 A JP55126215 A JP 55126215A JP 12621580 A JP12621580 A JP 12621580A JP S5750424 A JPS5750424 A JP S5750424A
- Authority
- JP
- Japan
- Prior art keywords
- layers
- insulating
- openings
- regions
- type impurity
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/544—Marks applied to semiconductor devices or parts, e.g. registration marks, alignment structures, wafer maps
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2223/00—Details relating to semiconductor or other solid state devices covered by the group H01L23/00
- H01L2223/544—Marks applied to semiconductor devices or parts
- H01L2223/54453—Marks applied to semiconductor devices or parts for use prior to dicing
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/0001—Technical content checked by a classifier
- H01L2924/0002—Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00
Landscapes
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Abstract
PURPOSE:To determine the relative positions of different conduction type impurity diffusion layers accurately by mounting a means opening the first and second diffusion layer regions at the same time when opening the insulating layers of regions capable of functioning as the different conduction type impurity diffusion layers. CONSTITUTION:The insulting layers of the first and second regions among the insulating layers formed on a semiconductor base are simultaneously removed and opened, insulating thin layers are shaped in these openings, and the insulating layers are opened again and the first diffusion layers are formed. The means is mounted which opens the second diffusion layer regions by forming and removing the insulating layer. When manufacturing the complementary type semiconductor device, the insulating thin layers 2'' are shaped to the openings 3'' of the insulating layer 2, the N type impurity diffusion layers 4 are molded to the openings 3''' obtained by selectively removing the insulating layers 2'', and the insulating layers 2''' are formed on the layers. The insulating layers on the base are removed extending over the whole surface, and only the openings 3<4>' of the regions capable of functioning as the P type impurity diffusion layers are shaped.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP55126215A JPS5750424A (en) | 1980-09-11 | 1980-09-11 | Manufacture of semiconductor device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP55126215A JPS5750424A (en) | 1980-09-11 | 1980-09-11 | Manufacture of semiconductor device |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5750424A true JPS5750424A (en) | 1982-03-24 |
Family
ID=14929575
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP55126215A Pending JPS5750424A (en) | 1980-09-11 | 1980-09-11 | Manufacture of semiconductor device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5750424A (en) |
Cited By (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH02305465A (en) * | 1989-05-19 | 1990-12-19 | Sanyo Electric Co Ltd | Manufacture of semiconductor integrated circuit |
JPH02305467A (en) * | 1989-05-19 | 1990-12-19 | Sanyo Electric Co Ltd | Manufacture of semiconductor integrate circuit |
JPH02305462A (en) * | 1989-05-19 | 1990-12-19 | Sanyo Electric Co Ltd | Manufacture of semiconductor integrated circuit |
JPH02305461A (en) * | 1989-05-19 | 1990-12-19 | Sanyo Electric Co Ltd | Manufacture of semiconductor integrated circuit |
JPH02305463A (en) * | 1989-05-19 | 1990-12-19 | Sanyo Electric Co Ltd | Manufacture of semiconductor integrated circuit |
JPH02305464A (en) * | 1989-05-19 | 1990-12-19 | Sanyo Electric Co Ltd | Manufacture of semiconductor integrated circuit |
JPH02305466A (en) * | 1989-05-19 | 1990-12-19 | Sanyo Electric Co Ltd | Manufacture of semiconductor integrated circuit |
-
1980
- 1980-09-11 JP JP55126215A patent/JPS5750424A/en active Pending
Cited By (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH02305465A (en) * | 1989-05-19 | 1990-12-19 | Sanyo Electric Co Ltd | Manufacture of semiconductor integrated circuit |
JPH02305467A (en) * | 1989-05-19 | 1990-12-19 | Sanyo Electric Co Ltd | Manufacture of semiconductor integrate circuit |
JPH02305462A (en) * | 1989-05-19 | 1990-12-19 | Sanyo Electric Co Ltd | Manufacture of semiconductor integrated circuit |
JPH02305461A (en) * | 1989-05-19 | 1990-12-19 | Sanyo Electric Co Ltd | Manufacture of semiconductor integrated circuit |
JPH02305463A (en) * | 1989-05-19 | 1990-12-19 | Sanyo Electric Co Ltd | Manufacture of semiconductor integrated circuit |
JPH02305464A (en) * | 1989-05-19 | 1990-12-19 | Sanyo Electric Co Ltd | Manufacture of semiconductor integrated circuit |
JPH02305466A (en) * | 1989-05-19 | 1990-12-19 | Sanyo Electric Co Ltd | Manufacture of semiconductor integrated circuit |
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