JPS5737854A - Semiconductor device - Google Patents
Semiconductor deviceInfo
- Publication number
- JPS5737854A JPS5737854A JP11343280A JP11343280A JPS5737854A JP S5737854 A JPS5737854 A JP S5737854A JP 11343280 A JP11343280 A JP 11343280A JP 11343280 A JP11343280 A JP 11343280A JP S5737854 A JPS5737854 A JP S5737854A
- Authority
- JP
- Japan
- Prior art keywords
- wiring
- sio2
- melted
- mutually
- film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
Abstract
PURPOSE:To ensure the conduction at a desired position by a method wherein wiring is stacked through a layer insulating film, partially heated and mutually melted. CONSTITUTION:The Al wiring 3 is formed on a SiO2 film 2 on an Si substrate 1. SiO2 4 is shaped through a CVD method, and the Al wiring 5 is stacked. The wiring is irradiated by a CO2 laser in vacuum, and an irradiating area is determined from a diameter of the beams and the desired conductive area. The one parts of the Al wiring 3, the SiO2 4 and the Al wiring 5 respectively are melted mutually by partial heating through irradiation, and a conductive passage 7 is shaped. When the layer insulating film 4 is made of an inorganic substance such as SiO2, both Al layers are melted mutually or evaporated and conducted when the film 4 is under a melted condition. When it is made of an organic substance such as polymidide, they are carbonized and conducted. According to this constitution, the opening of an intermediate window at an undesired position is prevented, and the shortening of a processing period and the improvement of yield are attained.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP11343280A JPS5737854A (en) | 1980-08-20 | 1980-08-20 | Semiconductor device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP11343280A JPS5737854A (en) | 1980-08-20 | 1980-08-20 | Semiconductor device |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5737854A true JPS5737854A (en) | 1982-03-02 |
Family
ID=14612070
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP11343280A Pending JPS5737854A (en) | 1980-08-20 | 1980-08-20 | Semiconductor device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5737854A (en) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS63142658A (en) * | 1986-12-04 | 1988-06-15 | Sony Corp | Connection of wiring |
US5333031A (en) * | 1991-08-21 | 1994-07-26 | Minolta Camera Kabushiki Kaisha | Camera having a liquid crystal focusing screen |
US5903788A (en) * | 1993-01-07 | 1999-05-11 | Minolta Co., Ltd. | Camera |
-
1980
- 1980-08-20 JP JP11343280A patent/JPS5737854A/en active Pending
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS63142658A (en) * | 1986-12-04 | 1988-06-15 | Sony Corp | Connection of wiring |
US5333031A (en) * | 1991-08-21 | 1994-07-26 | Minolta Camera Kabushiki Kaisha | Camera having a liquid crystal focusing screen |
US5903788A (en) * | 1993-01-07 | 1999-05-11 | Minolta Co., Ltd. | Camera |
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