JPS56124236A - Method for selective thermal oxidized film formation on semiconductor substrate - Google Patents
Method for selective thermal oxidized film formation on semiconductor substrateInfo
- Publication number
- JPS56124236A JPS56124236A JP2642580A JP2642580A JPS56124236A JP S56124236 A JPS56124236 A JP S56124236A JP 2642580 A JP2642580 A JP 2642580A JP 2642580 A JP2642580 A JP 2642580A JP S56124236 A JPS56124236 A JP S56124236A
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor substrate
- selectively
- oxidized film
- film formation
- selective thermal
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02107—Forming insulating materials on a substrate
- H01L21/02225—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer
- H01L21/02227—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a process other than a deposition process
- H01L21/0223—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a process other than a deposition process formation by oxidation, e.g. oxidation of the substrate
- H01L21/02233—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a process other than a deposition process formation by oxidation, e.g. oxidation of the substrate of the semiconductor substrate or a semiconductor layer
- H01L21/02236—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a process other than a deposition process formation by oxidation, e.g. oxidation of the substrate of the semiconductor substrate or a semiconductor layer group IV semiconductor
- H01L21/02238—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a process other than a deposition process formation by oxidation, e.g. oxidation of the substrate of the semiconductor substrate or a semiconductor layer group IV semiconductor silicon in uncombined form, i.e. pure silicon
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02107—Forming insulating materials on a substrate
- H01L21/02225—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer
- H01L21/02227—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a process other than a deposition process
- H01L21/02255—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a process other than a deposition process formation by thermal treatment
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Local Oxidation Of Silicon (AREA)
Abstract
PURPOSE:To obtain the SiO2 film selectively on the irradiation region only for the subject semiconductor substrate by a method wherein a laser beam is irradiated on an Si substrate in the gaseous atmosphere containing an O2. CONSTITUTION:The Si substrate 11 is placed on a cooling plate 12 and the CO2 laser beam 14 is irradiated selectively in the gaseous atmosphere containing the O2. The irradiation may be performed continuously or intermittently. A spot of about 20mum is suitable and the irradiation region is heated up to approximately 1,600 deg.C or above. At this time, an oxidized film 15 can be formed selectively and in a short time as well when the gaseous atmosphere is maintained at 1 atmosphere or above. Through this constitution, the SiO2 can be selectively formed by performing a partial heating without heating the impurity layer 16.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2642580A JPS56124236A (en) | 1980-03-03 | 1980-03-03 | Method for selective thermal oxidized film formation on semiconductor substrate |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2642580A JPS56124236A (en) | 1980-03-03 | 1980-03-03 | Method for selective thermal oxidized film formation on semiconductor substrate |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS56124236A true JPS56124236A (en) | 1981-09-29 |
Family
ID=12193161
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2642580A Pending JPS56124236A (en) | 1980-03-03 | 1980-03-03 | Method for selective thermal oxidized film formation on semiconductor substrate |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS56124236A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0196155A2 (en) * | 1985-03-23 | 1986-10-01 | Stc Plc | Method of forming an oxide film on a semiconductor substrate |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5235596A (en) * | 1975-09-12 | 1977-03-18 | Hitachi Ltd | Burglar watch system |
JPS5421172A (en) * | 1977-07-18 | 1979-02-17 | Nec Corp | Manufacture for semiconductor device |
-
1980
- 1980-03-03 JP JP2642580A patent/JPS56124236A/en active Pending
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5235596A (en) * | 1975-09-12 | 1977-03-18 | Hitachi Ltd | Burglar watch system |
JPS5421172A (en) * | 1977-07-18 | 1979-02-17 | Nec Corp | Manufacture for semiconductor device |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0196155A2 (en) * | 1985-03-23 | 1986-10-01 | Stc Plc | Method of forming an oxide film on a semiconductor substrate |
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