JPS5735859A - Formation of mask - Google Patents
Formation of maskInfo
- Publication number
- JPS5735859A JPS5735859A JP11034380A JP11034380A JPS5735859A JP S5735859 A JPS5735859 A JP S5735859A JP 11034380 A JP11034380 A JP 11034380A JP 11034380 A JP11034380 A JP 11034380A JP S5735859 A JPS5735859 A JP S5735859A
- Authority
- JP
- Japan
- Prior art keywords
- layer
- chromium
- ion beam
- mask
- lens system
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
- G03F1/68—Preparation processes not covered by groups G03F1/20 - G03F1/50
- G03F1/76—Patterning of masks by imaging
- G03F1/78—Patterning of masks by imaging by charged particle beam [CPB], e.g. electron beam patterning of masks
Landscapes
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- General Physics & Mathematics (AREA)
- Weting (AREA)
- Preparing Plates And Mask In Photomechanical Process (AREA)
- Drying Of Semiconductors (AREA)
Abstract
PURPOSE:To form a hard mask of high accuracy free from pinholelike defects by selectively irradiating a chromium layer prepared on a substrate with alkali metallic ion beam and treating the layer with an acidic etching soln. CONSTITUTION:A glass substrate having a chromium or chromium oxide layer 6 is mounted on a sample table 7 and selectively irradiated with alkali metallic ion beam 1 from an ion beam system composed of an electrostatic lens system 2, an aperture 3, a deflecting electrode 4 and an electrostatic object lens system 5 to form a latent image on the layer 6. The layer 6 is then treated with an acidic etching soln. contg. ammonium cerium nitrate to remove the irradiated part of the layer 6 by etching, thus obtaining a hard chromium mask.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP11034380A JPS5735859A (en) | 1980-08-13 | 1980-08-13 | Formation of mask |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP11034380A JPS5735859A (en) | 1980-08-13 | 1980-08-13 | Formation of mask |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5735859A true JPS5735859A (en) | 1982-02-26 |
Family
ID=14533343
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP11034380A Pending JPS5735859A (en) | 1980-08-13 | 1980-08-13 | Formation of mask |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5735859A (en) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6462618A (en) * | 1987-09-02 | 1989-03-09 | Matsushita Electric Ind Co Ltd | Production of metallic wiring and production of thin film transistor array |
JPH0296159A (en) * | 1988-10-03 | 1990-04-06 | Sanyo Electric Co Ltd | Production of mask for photolithography |
WO2003053570A1 (en) | 2001-12-21 | 2003-07-03 | Asahi Kasei Chemicals Corporation | Oxide catalyst composition |
-
1980
- 1980-08-13 JP JP11034380A patent/JPS5735859A/en active Pending
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6462618A (en) * | 1987-09-02 | 1989-03-09 | Matsushita Electric Ind Co Ltd | Production of metallic wiring and production of thin film transistor array |
JPH0296159A (en) * | 1988-10-03 | 1990-04-06 | Sanyo Electric Co Ltd | Production of mask for photolithography |
WO2003053570A1 (en) | 2001-12-21 | 2003-07-03 | Asahi Kasei Chemicals Corporation | Oxide catalyst composition |
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