JPS57194327A - Semiconductor pressure transducer for car - Google Patents

Semiconductor pressure transducer for car

Info

Publication number
JPS57194327A
JPS57194327A JP8062981A JP8062981A JPS57194327A JP S57194327 A JPS57194327 A JP S57194327A JP 8062981 A JP8062981 A JP 8062981A JP 8062981 A JP8062981 A JP 8062981A JP S57194327 A JPS57194327 A JP S57194327A
Authority
JP
Japan
Prior art keywords
pedestal
sensitive element
pressure
pressure sensitive
car
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP8062981A
Other languages
Japanese (ja)
Inventor
Norio Matsuda
Takahide Kawamura
Takao Akatsuka
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Denso Corp
Toyota Motor Corp
Original Assignee
Toyota Motor Corp
NipponDenso Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toyota Motor Corp, NipponDenso Co Ltd filed Critical Toyota Motor Corp
Priority to JP8062981A priority Critical patent/JPS57194327A/en
Publication of JPS57194327A publication Critical patent/JPS57194327A/en
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/0061—Electrical connection means
    • G01L19/0084—Electrical connection means to the outside of the housing
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/0007—Fluidic connecting means
    • G01L19/0038—Fluidic connecting means being part of the housing

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Fluid Pressure (AREA)
  • Pressure Sensors (AREA)

Abstract

PURPOSE:To obtain a semiconductor pressure transducer for a car wherein no water is collected between the pressure sensitive element and pedestal by making the size of the recess type strain inducing part of the pressure sensitive element less than that of the pressure intake of the pedestal which has the pressure intake. CONSTITUTION:On a base 3 having a pressure introducing pipe 6, a pedestal 2 is provided, and a pressure sensitive element 1 made of silicon which has the same coefficient of linear expansion with said pedestal 2 is connected to the pedestal 2 with glass, etc. The side of a recess type strain inducing part 1a formed in the pressure sensitive element 1 and functioning as a diaphragm is made less than that of the pressure intake 2b of the pedestal 2, and variation in resistance value with the strain of the pressure sensitive element 1 is led out through a bonding wire 5 and a lead pin 4. Consequently, even when steam is condensed, it is never collected between the pressure sensitive element and pedestal, there is no breakdown of the recess type strain inducing part 1a due to icing.
JP8062981A 1981-05-26 1981-05-26 Semiconductor pressure transducer for car Pending JPS57194327A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8062981A JPS57194327A (en) 1981-05-26 1981-05-26 Semiconductor pressure transducer for car

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8062981A JPS57194327A (en) 1981-05-26 1981-05-26 Semiconductor pressure transducer for car

Publications (1)

Publication Number Publication Date
JPS57194327A true JPS57194327A (en) 1982-11-29

Family

ID=13723640

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8062981A Pending JPS57194327A (en) 1981-05-26 1981-05-26 Semiconductor pressure transducer for car

Country Status (1)

Country Link
JP (1) JPS57194327A (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03123833A (en) * 1989-10-09 1991-05-27 Hitachi Ltd Semiconductor strain gauge type pressure sensor
JP2005043351A (en) * 2003-07-04 2005-02-17 Robert Bosch Gmbh Micro-machining type pressure sensor
JP2011013178A (en) * 2009-07-06 2011-01-20 Yamatake Corp Pressure sensor and method of manufacture
JP2012211892A (en) * 2011-03-23 2012-11-01 Denso Corp Pressure sensor

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03123833A (en) * 1989-10-09 1991-05-27 Hitachi Ltd Semiconductor strain gauge type pressure sensor
JP2005043351A (en) * 2003-07-04 2005-02-17 Robert Bosch Gmbh Micro-machining type pressure sensor
JP2011013178A (en) * 2009-07-06 2011-01-20 Yamatake Corp Pressure sensor and method of manufacture
JP2012211892A (en) * 2011-03-23 2012-11-01 Denso Corp Pressure sensor
US8733175B2 (en) 2011-03-23 2014-05-27 Denso Corporation Pressure sensor

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