JPS6463832A - Semiconductor pressure transducer and manufacture thereof - Google Patents
Semiconductor pressure transducer and manufacture thereofInfo
- Publication number
- JPS6463832A JPS6463832A JP22017387A JP22017387A JPS6463832A JP S6463832 A JPS6463832 A JP S6463832A JP 22017387 A JP22017387 A JP 22017387A JP 22017387 A JP22017387 A JP 22017387A JP S6463832 A JPS6463832 A JP S6463832A
- Authority
- JP
- Japan
- Prior art keywords
- bonded
- base
- base stage
- seat
- manufacture
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Measuring Fluid Pressure (AREA)
Abstract
PURPOSE:To secure airtightness and to enhance accuracy, by bonding an insulator seat and a metal base stage through Au or Sn solder at a suitable applied voltage in heating at specified temperature. CONSTITUTION:A diffused strain gage is bonded on the upper surface of a silicon diaphragm 1. An insulator seat 4 comprising Pylex glass is bonded to the lower surface. A metal base stage 7 is bonded to the opposite surface of the seat 4 with respect to the surface, to which the silicon diaphragm 1 is bonded, through an Au-Su based high-melting-point solder layer 6 under the application of a voltage of 500-3,000V in heating at 150-350 deg.C. The base stage 7 is bonded to a base 10. A lead pin 8 for leading out a signal is embedded in the base 10 with a hermetic sealing material 9. A can 13 is bonded and fixed on the base 10.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP22017387A JPS6463832A (en) | 1987-09-04 | 1987-09-04 | Semiconductor pressure transducer and manufacture thereof |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP22017387A JPS6463832A (en) | 1987-09-04 | 1987-09-04 | Semiconductor pressure transducer and manufacture thereof |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS6463832A true JPS6463832A (en) | 1989-03-09 |
Family
ID=16747029
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP22017387A Pending JPS6463832A (en) | 1987-09-04 | 1987-09-04 | Semiconductor pressure transducer and manufacture thereof |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6463832A (en) |
-
1987
- 1987-09-04 JP JP22017387A patent/JPS6463832A/en active Pending
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