JPS57161528A - Pressure to electricity converter - Google Patents

Pressure to electricity converter

Info

Publication number
JPS57161528A
JPS57161528A JP4913081A JP4913081A JPS57161528A JP S57161528 A JPS57161528 A JP S57161528A JP 4913081 A JP4913081 A JP 4913081A JP 4913081 A JP4913081 A JP 4913081A JP S57161528 A JPS57161528 A JP S57161528A
Authority
JP
Japan
Prior art keywords
pedestal
pressure
height
package
sectional area
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP4913081A
Other languages
Japanese (ja)
Inventor
Toshihiro Nakajima
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP4913081A priority Critical patent/JPS57161528A/en
Publication of JPS57161528A publication Critical patent/JPS57161528A/en
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/0061—Electrical connection means
    • G01L19/0084—Electrical connection means to the outside of the housing
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/14—Housings
    • G01L19/147—Details about the mounting of the sensor to support or covering means

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Measuring Fluid Pressure (AREA)
  • Pressure Sensors (AREA)

Abstract

PURPOSE:To relieve the thermal stress to be transmitted from a package to a semiconductor diaphragm in spite of decreasing of the height of a pedestal by providing a part of a small cross sectional area in some part in the height direction of the pedestal. CONSTITUTION:A pedestal 2a is provided with a part of small outside circumference in the central part, that is, a part 11 of a small cross sectional area. Thereby, the transmission of thermal stress from a package 6 side to a semiconductor diaphragm 1 is relieved and the height of the pedestal 2a is made correspondingly smaller.
JP4913081A 1981-03-30 1981-03-30 Pressure to electricity converter Pending JPS57161528A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4913081A JPS57161528A (en) 1981-03-30 1981-03-30 Pressure to electricity converter

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4913081A JPS57161528A (en) 1981-03-30 1981-03-30 Pressure to electricity converter

Publications (1)

Publication Number Publication Date
JPS57161528A true JPS57161528A (en) 1982-10-05

Family

ID=12822478

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4913081A Pending JPS57161528A (en) 1981-03-30 1981-03-30 Pressure to electricity converter

Country Status (1)

Country Link
JP (1) JPS57161528A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59155971A (en) * 1983-02-25 1984-09-05 Hitachi Ltd High pressure resistant pressure sensor
JPH0547393Y2 (en) * 1987-11-12 1993-12-14
US5289964A (en) * 1990-01-23 1994-03-01 Nippondenso Co., Ltd. Fluxless soldering process

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5365089A (en) * 1976-11-24 1978-06-10 Toshiba Corp Semiconductor pressure transducer

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5365089A (en) * 1976-11-24 1978-06-10 Toshiba Corp Semiconductor pressure transducer

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59155971A (en) * 1983-02-25 1984-09-05 Hitachi Ltd High pressure resistant pressure sensor
JPH0547393Y2 (en) * 1987-11-12 1993-12-14
US5289964A (en) * 1990-01-23 1994-03-01 Nippondenso Co., Ltd. Fluxless soldering process

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