JPS57154878A - Semiconductor sensor - Google Patents

Semiconductor sensor

Info

Publication number
JPS57154878A
JPS57154878A JP3936981A JP3936981A JPS57154878A JP S57154878 A JPS57154878 A JP S57154878A JP 3936981 A JP3936981 A JP 3936981A JP 3936981 A JP3936981 A JP 3936981A JP S57154878 A JPS57154878 A JP S57154878A
Authority
JP
Japan
Prior art keywords
diameter
specified
circular groove
exceed
joint
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP3936981A
Other languages
Japanese (ja)
Other versions
JPS6336155B2 (en
Inventor
Masanori Tanabe
Satoshi Shimada
Motohisa Nishihara
Kazuji Yamada
Yoshitaka Matsuoka
Michitaka Shimazoe
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP3936981A priority Critical patent/JPS57154878A/en
Publication of JPS57154878A publication Critical patent/JPS57154878A/en
Publication of JPS6336155B2 publication Critical patent/JPS6336155B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0051—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance
    • G01L9/0052—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance of piezoresistive elements
    • G01L9/0054—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance of piezoresistive elements integral with a semiconducting diaphragm

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Fluid Pressure (AREA)
  • Pressure Sensors (AREA)

Abstract

PURPOSE:To augment the reliability when an overload is impressed by a method wherein a ratio B/A comprising the diameter B of the central thick wall of a pressure sensing element and the outside diameter A of a circular groove is specified to exceed 0.5 and the hole diameter C of a high-insulating material is specified to be B<C<A. CONSTITUTION:The diaphragm type pressure sensing element 1, the high-insulating material 2 with the thermal expansion coefficient similar to that of said element 1 and the metal supporter 3 are provided. The piezo resistor element 5 is mounted respectively on the inside and outside periphery of the thin wall layer corresponding to the circular groove. Then the ratio B/A comprising the diameter B of the central thick wall of said element 1 and the outside diameter A of the circular groove is specified to exceed 0.5 and said element 5 is full-bridge mounted to secure good convertible sensitivity against the low pressure exceeding 1kgf/cm<2>. On the other hand, the stress is concentrated in the joint of a diaphragm and glass section to prevent the joint from exfoliating by means of specifying the diameter Ag of the pierced hole of the glass section to be B<Ag'<A.
JP3936981A 1981-03-20 1981-03-20 Semiconductor sensor Granted JPS57154878A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3936981A JPS57154878A (en) 1981-03-20 1981-03-20 Semiconductor sensor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3936981A JPS57154878A (en) 1981-03-20 1981-03-20 Semiconductor sensor

Publications (2)

Publication Number Publication Date
JPS57154878A true JPS57154878A (en) 1982-09-24
JPS6336155B2 JPS6336155B2 (en) 1988-07-19

Family

ID=12551133

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3936981A Granted JPS57154878A (en) 1981-03-20 1981-03-20 Semiconductor sensor

Country Status (1)

Country Link
JP (1) JPS57154878A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6320457U (en) * 1986-07-23 1988-02-10

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0389830A (en) * 1989-09-01 1991-04-15 Matsushita Electric Ind Co Ltd Brush holding structure

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6320457U (en) * 1986-07-23 1988-02-10
JPH056672Y2 (en) * 1986-07-23 1993-02-19

Also Published As

Publication number Publication date
JPS6336155B2 (en) 1988-07-19

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