JPS57135330A - Stress converter - Google Patents

Stress converter

Info

Publication number
JPS57135330A
JPS57135330A JP2061481A JP2061481A JPS57135330A JP S57135330 A JPS57135330 A JP S57135330A JP 2061481 A JP2061481 A JP 2061481A JP 2061481 A JP2061481 A JP 2061481A JP S57135330 A JPS57135330 A JP S57135330A
Authority
JP
Japan
Prior art keywords
adhere
stress
piezo
reliability
electrode
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2061481A
Other languages
Japanese (ja)
Inventor
Koichi Azuma
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP2061481A priority Critical patent/JPS57135330A/en
Publication of JPS57135330A publication Critical patent/JPS57135330A/en
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L1/00—Measuring force or stress, in general
    • G01L1/18—Measuring force or stress, in general using properties of piezo-resistive materials, i.e. materials of which the ohmic resistance varies according to changes in magnitude or direction of force applied to the material

Abstract

PURPOSE:To obtain a stress converter which is small in time aging and high in reliability, by laminating a prescribed semiconductor chip, etc. having an insulator, an electrode and a piezo-resistance effect, on a metallic plate whose elastic deformation is free. CONSTITUTION:Onto a metallic substrate 9 of phosphor bronze, etc., having a large elastic area, an insulating film 10 is made to adhere by means of vapor- deposition, etc. Onto this film 10, an electrode 11 is laminated and made to adhere by the same treatment, and when a semiconductor chip 1 of p silicon for converting stress, having a piezo-resistance effect is made to adhere and is formed, it is possible to obtain a stress converter which is free from time aging due to temperature, humidity, etc., and stable and high in reliability, since there is no unstable structure base such as glass fiber, epoxy resin, etc. due to adhesion.
JP2061481A 1981-02-13 1981-02-13 Stress converter Pending JPS57135330A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2061481A JPS57135330A (en) 1981-02-13 1981-02-13 Stress converter

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2061481A JPS57135330A (en) 1981-02-13 1981-02-13 Stress converter

Publications (1)

Publication Number Publication Date
JPS57135330A true JPS57135330A (en) 1982-08-20

Family

ID=12032127

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2061481A Pending JPS57135330A (en) 1981-02-13 1981-02-13 Stress converter

Country Status (1)

Country Link
JP (1) JPS57135330A (en)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS493318A (en) * 1972-05-06 1974-01-12

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS493318A (en) * 1972-05-06 1974-01-12

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