JPS57106513A - Formation of carbon film - Google Patents

Formation of carbon film

Info

Publication number
JPS57106513A
JPS57106513A JP55180504A JP18050480A JPS57106513A JP S57106513 A JPS57106513 A JP S57106513A JP 55180504 A JP55180504 A JP 55180504A JP 18050480 A JP18050480 A JP 18050480A JP S57106513 A JPS57106513 A JP S57106513A
Authority
JP
Japan
Prior art keywords
film
ion
accelerated
irradiating
substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP55180504A
Other languages
Japanese (ja)
Other versions
JPH0244769B2 (en
Inventor
Susumu Fujimori
Kazutoshi Nagai
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nippon Telegraph and Telephone Corp
Original Assignee
Nippon Telegraph and Telephone Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Telegraph and Telephone Corp filed Critical Nippon Telegraph and Telephone Corp
Priority to JP55180504A priority Critical patent/JPS57106513A/en
Publication of JPS57106513A publication Critical patent/JPS57106513A/en
Publication of JPH0244769B2 publication Critical patent/JPH0244769B2/ja
Granted legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/0605—Carbon

Abstract

PURPOSE:To form a carbon film having physical properties similar to those of diamond by irradiating graphite as a base material with ion beams to form a film by sputtering and by irradiating the film with charged corpuscles. CONSTITUTION:A vacuum vessel is evacuated to a high vacuum, and an inert gas is introduced into an ion source 2 to produce ions by discharge. The ions are accelerated to about 5kV and extracted as ion beams 3, and by irradiating a graphite plate 4 with the beams 3, carbon atoms of the plate 4 are sputtered and deposited on a substrate 5 to form a thin film. At the same time, ion currents 9 accelerated to several 10V with an ion gun 8 are hit against the substrate 5, and the substrate 5 is further irradiated with electron currents 11 accelerated to several 10V with an electron gun 10. As a result, the depositing carbon atoms are activated and densely packed. Accordingly, a carbon film with high light transmittance, electric resistance and hardness similar to diamond is formed.
JP55180504A 1980-12-22 1980-12-22 Formation of carbon film Granted JPS57106513A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP55180504A JPS57106513A (en) 1980-12-22 1980-12-22 Formation of carbon film

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP55180504A JPS57106513A (en) 1980-12-22 1980-12-22 Formation of carbon film

Publications (2)

Publication Number Publication Date
JPS57106513A true JPS57106513A (en) 1982-07-02
JPH0244769B2 JPH0244769B2 (en) 1990-10-05

Family

ID=16084391

Family Applications (1)

Application Number Title Priority Date Filing Date
JP55180504A Granted JPS57106513A (en) 1980-12-22 1980-12-22 Formation of carbon film

Country Status (1)

Country Link
JP (1) JPS57106513A (en)

Cited By (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5879807A (en) * 1981-10-21 1983-05-13 ゼネラル・エレクトリック・カンパニイ Amorphous carbonaceous thin-film
JPS58153774A (en) * 1982-03-05 1983-09-12 Sumitomo Electric Ind Ltd Preparation of hard coating member
JPS60122796A (en) * 1983-12-06 1985-07-01 Sumitomo Electric Ind Ltd Vapor phase synthesis method of diamond
JPS60127298A (en) * 1983-12-09 1985-07-06 Sumitomo Electric Ind Ltd Gas-phase synthesis of diamond
JPS60201635A (en) * 1984-03-27 1985-10-12 Matsushita Electric Ind Co Ltd Production of rigid carbon covering film
JPS61219709A (en) * 1985-03-25 1986-09-30 Namiki Precision Jewel Co Ltd Preparation of diamondlike carbon
US4874596A (en) * 1957-06-27 1989-10-17 Lemelson Jerome H Production of crystalline structures
US4981568A (en) * 1988-09-20 1991-01-01 International Business Machines Corp. Apparatus and method for producing high purity diamond films at low temperatures
GB2269105A (en) * 1992-07-28 1994-02-02 Dr Joseph Franks Dental filling instrument with coated working surfaces
US5462772A (en) * 1957-06-27 1995-10-31 Lemelson; Jerome H. Methods for forming artificial diamond
US5616372A (en) * 1995-06-07 1997-04-01 Syndia Corporation Method of applying a wear-resistant diamond coating to a substrate
US5688557A (en) * 1995-06-07 1997-11-18 Lemelson; Jerome H. Method of depositing synthetic diamond coatings with intermediates bonding layers
US5714202A (en) * 1995-06-07 1998-02-03 Lemelson; Jerome H. Synthetic diamond overlays for gas turbine engine parts having thermal barrier coatings
US5740941A (en) * 1993-08-16 1998-04-21 Lemelson; Jerome Sheet material with coating
US5871805A (en) * 1996-04-08 1999-02-16 Lemelson; Jerome Computer controlled vapor deposition processes
US6083570A (en) * 1987-03-31 2000-07-04 Lemelson; Jerome H. Synthetic diamond coatings with intermediate amorphous metal bonding layers and methods of applying such coatings
US6904935B2 (en) 2002-12-18 2005-06-14 Masco Corporation Of Indiana Valve component with multiple surface layers
US9909677B2 (en) 2002-12-18 2018-03-06 Delta Faucet Company Faucet component with coating

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0410477U (en) * 1990-05-15 1992-01-29
JPH0525881U (en) * 1991-09-13 1993-04-02 シチズン時計株式会社 LCD TV Jeon's front cover structure

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56166370A (en) * 1980-05-27 1981-12-21 Mitsubishi Metal Corp Surface coated tool member of superior abrasion resistance and corrosion resistance

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56166370A (en) * 1980-05-27 1981-12-21 Mitsubishi Metal Corp Surface coated tool member of superior abrasion resistance and corrosion resistance

Cited By (21)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4874596A (en) * 1957-06-27 1989-10-17 Lemelson Jerome H Production of crystalline structures
US5462772A (en) * 1957-06-27 1995-10-31 Lemelson; Jerome H. Methods for forming artificial diamond
JPS5879807A (en) * 1981-10-21 1983-05-13 ゼネラル・エレクトリック・カンパニイ Amorphous carbonaceous thin-film
JPH036219B2 (en) * 1982-03-05 1991-01-29 Sumitomo Electric Industries
JPS58153774A (en) * 1982-03-05 1983-09-12 Sumitomo Electric Ind Ltd Preparation of hard coating member
JPS60122796A (en) * 1983-12-06 1985-07-01 Sumitomo Electric Ind Ltd Vapor phase synthesis method of diamond
JPS60127298A (en) * 1983-12-09 1985-07-06 Sumitomo Electric Ind Ltd Gas-phase synthesis of diamond
JPS60201635A (en) * 1984-03-27 1985-10-12 Matsushita Electric Ind Co Ltd Production of rigid carbon covering film
JPS61219709A (en) * 1985-03-25 1986-09-30 Namiki Precision Jewel Co Ltd Preparation of diamondlike carbon
US6083570A (en) * 1987-03-31 2000-07-04 Lemelson; Jerome H. Synthetic diamond coatings with intermediate amorphous metal bonding layers and methods of applying such coatings
US4981568A (en) * 1988-09-20 1991-01-01 International Business Machines Corp. Apparatus and method for producing high purity diamond films at low temperatures
GB2269105A (en) * 1992-07-28 1994-02-02 Dr Joseph Franks Dental filling instrument with coated working surfaces
GB2269105B (en) * 1992-07-28 1996-05-08 Dr Joseph Franks Instrument tip for dental filling instrument
US5740941A (en) * 1993-08-16 1998-04-21 Lemelson; Jerome Sheet material with coating
US5794801A (en) * 1993-08-16 1998-08-18 Lemelson; Jerome Material compositions
US5616372A (en) * 1995-06-07 1997-04-01 Syndia Corporation Method of applying a wear-resistant diamond coating to a substrate
US5688557A (en) * 1995-06-07 1997-11-18 Lemelson; Jerome H. Method of depositing synthetic diamond coatings with intermediates bonding layers
US5714202A (en) * 1995-06-07 1998-02-03 Lemelson; Jerome H. Synthetic diamond overlays for gas turbine engine parts having thermal barrier coatings
US5871805A (en) * 1996-04-08 1999-02-16 Lemelson; Jerome Computer controlled vapor deposition processes
US6904935B2 (en) 2002-12-18 2005-06-14 Masco Corporation Of Indiana Valve component with multiple surface layers
US9909677B2 (en) 2002-12-18 2018-03-06 Delta Faucet Company Faucet component with coating

Also Published As

Publication number Publication date
JPH0244769B2 (en) 1990-10-05

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