JPS5674836A - Production of magnetic recording medium - Google Patents

Production of magnetic recording medium

Info

Publication number
JPS5674836A
JPS5674836A JP14988779A JP14988779A JPS5674836A JP S5674836 A JPS5674836 A JP S5674836A JP 14988779 A JP14988779 A JP 14988779A JP 14988779 A JP14988779 A JP 14988779A JP S5674836 A JPS5674836 A JP S5674836A
Authority
JP
Japan
Prior art keywords
cluster
oxygen
electrode
crucible
accelerated
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP14988779A
Other languages
Japanese (ja)
Other versions
JPS6037525B2 (en
Inventor
Shinsaku Nakada
Toshinori Takagi
Yoichi Mikami
Kazuhiro Fukaya
Masahiro Hotta
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sekisui Chemical Co Ltd
Original Assignee
Sekisui Chemical Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sekisui Chemical Co Ltd filed Critical Sekisui Chemical Co Ltd
Priority to JP14988779A priority Critical patent/JPS6037525B2/en
Publication of JPS5674836A publication Critical patent/JPS5674836A/en
Publication of JPS6037525B2 publication Critical patent/JPS6037525B2/en
Expired legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/0021—Reactive sputtering or evaporation

Abstract

PURPOSE:To obtain a magnetic recording medium which has the magnetic properties suited to the high-density recording and can withstand the repetitive use, by introducing the oxygen gas only in the early process when a ferromagnetic thin film is formed on the base material by the cluster ion beam deposit method. CONSTITUTION:A high vaccum state is secured within the vaccum tank 1 via the exhaustion port 13, and then the electric conduction is given to the electrode 213. Then the sealed-up crucible 211 is heated up to increase the vapor pressure of the ferromagnetic evaporation source material 6 within the crucible 211 as well as tube 3. The vapor of the material 6 is jetted into the tank 1 through the jetting hole 212 and then receives an over-cooling by the heat insulation expansion, thus forming a cluster. The heat electron discharged from the filament 221 of the ionizing device 22 is accelerated by the mesh-type electrode 222 to have a collision against the cluster and the oxygen molecule and then to be ionized. The cluster ion and the oxygen ion generated are accelerated by the acceleration electrode 23 and then jetted onto the base component 5 to form a thin layer of the metal oxide on the component 5. The introduction of oxygen is discontinued when the thickness of the thin layer reaches the prescribed value, and then only the cluster ion beam deposit is carried out.
JP14988779A 1979-11-19 1979-11-19 Method for manufacturing magnetic recording media Expired JPS6037525B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14988779A JPS6037525B2 (en) 1979-11-19 1979-11-19 Method for manufacturing magnetic recording media

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14988779A JPS6037525B2 (en) 1979-11-19 1979-11-19 Method for manufacturing magnetic recording media

Publications (2)

Publication Number Publication Date
JPS5674836A true JPS5674836A (en) 1981-06-20
JPS6037525B2 JPS6037525B2 (en) 1985-08-27

Family

ID=15484800

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14988779A Expired JPS6037525B2 (en) 1979-11-19 1979-11-19 Method for manufacturing magnetic recording media

Country Status (1)

Country Link
JP (1) JPS6037525B2 (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5812317A (en) * 1981-07-15 1983-01-24 Sony Corp Manufacture of thin film magnetic medium
JPH0377385A (en) * 1989-08-19 1991-04-02 Ckd Corp Manufacture of magnetic resistor element
US6375790B1 (en) 1999-07-19 2002-04-23 Epion Corporation Adaptive GCIB for smoothing surfaces

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5812317A (en) * 1981-07-15 1983-01-24 Sony Corp Manufacture of thin film magnetic medium
JPH033369B2 (en) * 1981-07-15 1991-01-18 Sony Corp
JPH0377385A (en) * 1989-08-19 1991-04-02 Ckd Corp Manufacture of magnetic resistor element
US6375790B1 (en) 1999-07-19 2002-04-23 Epion Corporation Adaptive GCIB for smoothing surfaces

Also Published As

Publication number Publication date
JPS6037525B2 (en) 1985-08-27

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