JPS58153774A - Preparation of hard coating member - Google Patents

Preparation of hard coating member

Info

Publication number
JPS58153774A
JPS58153774A JP3531182A JP3531182A JPS58153774A JP S58153774 A JPS58153774 A JP S58153774A JP 3531182 A JP3531182 A JP 3531182A JP 3531182 A JP3531182 A JP 3531182A JP S58153774 A JPS58153774 A JP S58153774A
Authority
JP
Japan
Prior art keywords
diamond
coated
coating
ion
ion implantation
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP3531182A
Other languages
Japanese (ja)
Other versions
JPH036219B2 (en
Inventor
Naoharu Fujimori
直治 藤森
Akira Doi
陽 土居
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sumitomo Electric Industries Ltd
Original Assignee
Sumitomo Electric Industries Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sumitomo Electric Industries Ltd filed Critical Sumitomo Electric Industries Ltd
Priority to JP3531182A priority Critical patent/JPS58153774A/en
Publication of JPS58153774A publication Critical patent/JPS58153774A/en
Publication of JPH036219B2 publication Critical patent/JPH036219B2/ja
Granted legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
    • C23C16/26—Deposition of carbon only
    • C23C16/27—Diamond only
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
    • C23C16/26—Deposition of carbon only
    • C23C16/27—Diamond only
    • C23C16/278—Diamond only doping or introduction of a secondary phase in the diamond

Abstract

PURPOSE:To prepare a hard coating member high in anti-wear property, by applying diamond to the surface of a matrix material from a gas phase while ion injection is applied thereto. CONSTITUTION:The surface of a matrix material comprising tool steel, high speed steel or a hard metal is coated with diamond from a gas phase by an ion beam deposition method. In this case, diamond is coated while an ion such as N<+> or An<+> is injected. By this method, because the injected ion prevents the transformation of coated diamond to carbon, a coating tool excellent in anti- wear property can be obtained.

Description

【発明の詳細な説明】 本発明は耐摩耗性に特に優れたダイヤモンド被覆層の製
造法に関する。− 切削工具、耐摩工具等に利用されている材料には、工具
鋼、高速度鋼や１種以上の炭化物を含み鉄族金属を主体
とする結合相を有する超硬合金等が利用されている。そ
して近年は耐摩耗性向上のためこれらの表面にＴｉｃ、
　ＡｌｒｈＯｓ等の硬質物質を被覆したいわゆるコーチ
ング工具が急速に脣及しつつある。DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a method for producing a diamond coating layer having particularly excellent wear resistance. - Materials used for cutting tools, wear-resistant tools, etc. include tool steel, high-speed steel, and cemented carbide containing one or more carbides and a binder phase mainly composed of iron group metals. . In recent years, these surfaces have been coated with Tic to improve wear resistance.
So-called coating tools coated with hard materials such as AlrhOs are rapidly becoming popular.

特に硬い材料を加工する場合には工具自体の硬さは重要
な性質であり、最も硬い物質であるダイヤモンドはその
意味では現在も貴重な材料である。Especially when processing hard materials, the hardness of the tool itself is an important property, and diamond, the hardest substance, is still a valuable material in that sense.

このダイヤモンド工具としては単結晶や焼結体として、
あるいは金属、他の無機化合物、有機物で固めたものが
多く用いられているが、これ等はダイヤモンド自体の原
料が高価であり、これより硬いものが無いため難加工性
であるため製造コストも高く、また形状的にも制約され
ている。This diamond tool can be used as a single crystal or a sintered body.
Alternatively, diamonds hardened with metal, other inorganic compounds, or organic substances are often used, but in these cases, the raw material of diamond itself is expensive, and since there is nothing harder than diamond, it is difficult to process, so the manufacturing cost is high. , and is also constrained in terms of shape.

発明者らはダイヤモンドの持つ硬い性質を最大限に生か
す工具を検討して本発明に至ったものである。複雑な形
状のものや大型の部品にダイヤモンドの硬度を活用する
には気相から被覆することが最も適している。The inventors studied a tool that makes the most of the hard properties of diamond, and arrived at the present invention. To take advantage of diamond's hardness for complex-shaped or large parts, coating from the gas phase is most suitable.

しかしこれらの耐摩耗性を要求される工具のうち鋼など
の鉄を含む金属に対して耐摩耗性を要求される用途に対
してはダイヤモンド被覆した工具の対摩耗性は概して予
測した程の特性を示さない。However, among these tools that require wear resistance, for applications that require wear resistance for metals containing iron such as steel, the wear resistance of diamond-coated tools is generally not as good as expected. does not indicate.

これは摩耗によって温度が上がり、Ｆｅが触媒となって
ダイヤモンドがカーボンに逆変態してしまうからと考え
られる。This is thought to be because the temperature rises due to wear, and Fe acts as a catalyst, causing reverse transformation of diamond into carbon.

発明者らは上述の欠点のない耐摩耗性の高いダイヤモン
ド被覆層を母材に形成する寸法を提供するものである。The inventors have provided dimensions for forming a highly wear-resistant diamond coating on the base material without the above-mentioned disadvantages.

本発明はげ材の」−に気相からダイヤモンドを被覆する
際にその被覆層に次々とイオンを注入することに特徴が
ある。一般にイオン注入によりイオンが浸透する深さは
注入エネルギーと被注入体の性質によって決定されるが
大体において数百Ａがら数千Ａの範囲である。従ってダ
イヤモンド層ヲ被覆してしまった後からイオン注入する
のではほんの表面にのみ効果が及び被覆層全体の改良に
は結びつかない。従ってイオン注入を続けながらダイヤ
モンド被覆を行えば被覆層全体にイオン注入の効果が発
揮できる。The bald material of the present invention is characterized in that when coating diamond from the gas phase on the bald material, ions are successively implanted into the coating layer. Generally, the depth to which ions penetrate by ion implantation is determined by the implantation energy and the properties of the implanted object, but is generally in the range of several hundred to several thousand amperes. Therefore, if ions are implanted after the diamond layer has been coated, the effect will only be on the surface, and the overall coating will not be improved. Therefore, if diamond coating is performed while ion implantation is continued, the effect of ion implantation can be exerted over the entire coating layer.

このイオン注入の効果は、鉄を含んだ金属に対する耐摩
性向上にあり、これは注入したイオンがダイヤモンド被
覆層の変態を防止するためである。The effect of this ion implantation is to improve the wear resistance of metals containing iron, because the implanted ions prevent transformation of the diamond coating layer.

本発明による方法によるダイヤモンド被覆を行った工具
は鉄を含む金属のみならず銅等の他の金属に対しても高
い耐摩耗性を示す事がわかった。It has been found that tools coated with diamond according to the method of the present invention exhibit high wear resistance not only to metals containing iron but also to other metals such as copper.

又、本発明のダイヤモンド被覆を施す１仕拐としては、
工具鋼、高速度鋼、超硬合金のいずれに対しても有効で
ある。In addition, one method of applying the diamond coating of the present invention is as follows:
Effective for tool steel, high speed steel, and cemented carbide.

ダイヤモンド被覆法は公知のイオンビームディポジノシ
ョン法、プラズマＣＶＤ法やＣＶＤ法のいずれでもよい
。このうちプラズマＣＶＤ法やＣＶＤ法ではイオン注入
と使用する真空度が異なる場合が多く、被覆をたびたび
中止してイオン注入を行わなければならないが本発明の
効果には変りない。The diamond coating method may be any of the known ion beam deposition methods, plasma CVD methods, and CVD methods. Among these methods, in the plasma CVD method and the CVD method, the degree of vacuum used is often different from that of ion implantation, and the coating must be frequently stopped to perform ion implantation, but this does not change the effect of the present invention.

又注入するイオンとしては通常Ｎ＋やＮ＋が使用される
が他のイオン、でも本質的に」１記の効果に変りない。Although N+ and N+ are usually used as ions to be implanted, other ions may be used, but the effect essentially remains the same as described in 1.

次に、実施例によって説明する。Next, an example will be explained.

実施例１ ダイス鋼（ＳＫＤＩＩ）　　にイオンビームデボジノン
シフ法によって３０分で１μのダイヤモンド被覆を行っ
た。この時、同時にＮを１００ＫｅＶにて１０　”　ｄ
　ｏ　ｓ　ｅ／１ｙｎ２、ｓｅｃ　　にてイオン注入を
行いながら被覆した。この本発明品をイオン注入を施さ
ないでＩ　／Ｚのダイヤモンドを被覆して比較品とした
。Example 1 Die steel (SKDII) was coated with diamond to a thickness of 1 μm in 30 minutes by the ion beam devoginon-Schiff method. At this time, at the same time, N was 10”d at 100KeV.
The coating was performed while performing ion implantation at o se/1yn2, sec. This inventive product was coated with I/Z diamond without ion implantation to provide a comparative product.

これ等を７００°Ｃで外径５ｍｍφのステンレスＵ’ｆ
Ｊとこすり合せにより耐摩耗性を比較した。ステンレス
はＩＱＩ（ｇ／ｍｍ”の圧力でダイヤモンド被覆層面に
押し付は最大３　ｍｌｓ　ｅ　ｃの往復運動により２０
時間のテストを行った。この結果、本発明品が０．０５
ｍｍの摩耗深さであったのに対し、比較品は０．２３ｍ
ｍの摩耗深さであった。These were heated to 700°C using stainless steel U'f with an outer diameter of 5 mmφ.
Abrasion resistance was compared by rubbing with J. Stainless steel is pressed against the diamond coating layer surface at a pressure of IQI (g/mm") by a reciprocating motion of up to 3 mls e c.
We did a time test. As a result, the product of the present invention was 0.05
The wear depth of the comparison product was 0.23 mm, while the wear depth was 0.23 mm.
The wear depth was m.

実施例２゜ ｌ５ＯＰ３０に公知ＣＶＤ法にて２時間で２μのダイヤ
モンド被覆を行った。この時同時にＡｒを２００ＫｅＶ
にてＩ　Ｏ”　ｄ　ｏ　ｓ　ｅ／１ｙｎ２、Ｓｅｃ　に
てイオン注入しながら被覆したが、ＣＶＤとイオン注入
は同時に行えないので１０分のＣＶＤの後イオン注入を
行うことを１２回くり返した。一方イオン注入を全く行
わないものを比較品として作成した。Example 2 A diamond coating of 2 μm was applied to ゜15OP30 in 2 hours by a known CVD method. At the same time, Ar is applied at 200KeV.
Coating was performed while ion implantation was carried out at IO" do se/1yn2, Sec. However, since CVD and ion implantation cannot be performed at the same time, ion implantation was performed after 10 minutes of CVD, which was repeated 12 times. On the other hand, A comparative product was created without any ion implantation.

これ等を実施例１の摩耗テストを行ったところ、本発明
品がが０．００７７７Ｚ７７Ｚの摩耗深さであったのに
対し、比較品は旧Ｏｍｍの摩耗深さであった。When these were subjected to the wear test of Example 1, the product of the present invention had a wear depth of 0.00777Z77Z, while the comparison product had a wear depth of the old Omm.

Claims (1)

【特許請求の範囲】 （１）母材表面に気相よりダイヤモンドを被覆するにあ
たり、ダイヤモンド被覆と同時にイオン注入を行うこと
を特徴とする硬質被覆部材の製造法。 （２、特許請求の範囲第（１）項において、注入するイ
オンが窒素又はアルゴンであることを特徴とする硬質被
覆部材の製造法。 （３）被覆すべき母材が、工具鋼、高速度鋼もしくは超
硬合金であることを特徴とする特許請求の範囲第（１）
項記載の硬質被覆部材の製造法。[Scope of Claims] (1) A method for producing a hard coated member, characterized in that when coating the surface of a base material with diamond in a vapor phase, ion implantation is performed simultaneously with diamond coating. (2. A method for manufacturing a hard coated member according to claim (1), characterized in that the ions to be implanted are nitrogen or argon. (3) The base material to be coated is tool steel, high speed Claim No. (1) characterized in that the material is steel or cemented carbide.
A method for producing a hard coated member as described in Section 1.
JP3531182A 1982-03-05 1982-03-05 Preparation of hard coating member Granted JPS58153774A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3531182A JPS58153774A (en) 1982-03-05 1982-03-05 Preparation of hard coating member

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3531182A JPS58153774A (en) 1982-03-05 1982-03-05 Preparation of hard coating member

Publications (2)

Publication Number Publication Date
JPS58153774A true JPS58153774A (en) 1983-09-12
JPH036219B2 JPH036219B2 (en) 1991-01-29

Family

ID=12438252

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3531182A Granted JPS58153774A (en) 1982-03-05 1982-03-05 Preparation of hard coating member

Country Status (1)

Country Link
JP (1) JPS58153774A (en)

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0166708A2 (en) * 1984-06-27 1986-01-02 Santrade Ltd. Body with superhard coating
US4650156A (en) * 1984-05-30 1987-03-17 Fuji Koki Manufacturing Co., Ltd. Sealed type motor-operated flow control valve
US4707384A (en) * 1984-06-27 1987-11-17 Santrade Limited Method for making a composite body coated with one or more layers of inorganic materials including CVD diamond
JPS6341419U (en) * 1986-09-03 1988-03-18
JPS63128169A (en) * 1986-11-18 1988-05-31 Ulvac Corp Ion plating device
JPS63128170A (en) * 1986-11-18 1988-05-31 Ulvac Corp Ion plating device
JPH02126843A (en) * 1988-07-11 1990-05-15 Idemitsu Petrochem Co Ltd Dental tool
US5672382A (en) * 1985-12-24 1997-09-30 Sumitomo Electric Industries, Ltd. Composite powder particle, composite body and method of preparation

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5763675U (en) * 1980-09-29 1982-04-15
JPS57106513A (en) * 1980-12-22 1982-07-02 Nippon Telegr & Teleph Corp <Ntt> Formation of carbon film

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5763675U (en) * 1980-09-29 1982-04-15
JPS57106513A (en) * 1980-12-22 1982-07-02 Nippon Telegr & Teleph Corp <Ntt> Formation of carbon film

Cited By (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4650156A (en) * 1984-05-30 1987-03-17 Fuji Koki Manufacturing Co., Ltd. Sealed type motor-operated flow control valve
US4703545A (en) * 1984-05-30 1987-11-03 Fuji Koki Manufacturing Co., Ltd. Method for assembling a sealed type motor-operated flow control valve
EP0166708A2 (en) * 1984-06-27 1986-01-02 Santrade Ltd. Body with superhard coating
US4707384A (en) * 1984-06-27 1987-11-17 Santrade Limited Method for making a composite body coated with one or more layers of inorganic materials including CVD diamond
US5672382A (en) * 1985-12-24 1997-09-30 Sumitomo Electric Industries, Ltd. Composite powder particle, composite body and method of preparation
JPS6341419U (en) * 1986-09-03 1988-03-18
JPS63128169A (en) * 1986-11-18 1988-05-31 Ulvac Corp Ion plating device
JPS63128170A (en) * 1986-11-18 1988-05-31 Ulvac Corp Ion plating device
JPH0559984B2 (en) * 1986-11-18 1993-09-01 Ulvac Corp
JPH02126843A (en) * 1988-07-11 1990-05-15 Idemitsu Petrochem Co Ltd Dental tool

Also Published As

Publication number Publication date
JPH036219B2 (en) 1991-01-29

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