JPS5559724A - Spinner device - Google Patents
Spinner deviceInfo
- Publication number
- JPS5559724A JPS5559724A JP13163578A JP13163578A JPS5559724A JP S5559724 A JPS5559724 A JP S5559724A JP 13163578 A JP13163578 A JP 13163578A JP 13163578 A JP13163578 A JP 13163578A JP S5559724 A JPS5559724 A JP S5559724A
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- treatment liquid
- nozzle
- liquid
- tangent
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP13163578A JPS5559724A (en) | 1978-10-27 | 1978-10-27 | Spinner device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP13163578A JPS5559724A (en) | 1978-10-27 | 1978-10-27 | Spinner device |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5559724A true JPS5559724A (en) | 1980-05-06 |
Family
ID=15062651
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP13163578A Pending JPS5559724A (en) | 1978-10-27 | 1978-10-27 | Spinner device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5559724A (ja) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP1020894A2 (de) * | 1999-01-15 | 2000-07-19 | SEZ Semiconductor-Equipment Zubehör für die Halbleiterfertigung AG | Vorrichtung zur Ätzbehandlung eines scheibenförmigen Gegenstandes |
-
1978
- 1978-10-27 JP JP13163578A patent/JPS5559724A/ja active Pending
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP1020894A2 (de) * | 1999-01-15 | 2000-07-19 | SEZ Semiconductor-Equipment Zubehör für die Halbleiterfertigung AG | Vorrichtung zur Ätzbehandlung eines scheibenförmigen Gegenstandes |
EP1020894A3 (de) * | 1999-01-15 | 2004-10-27 | Sez Ag | Vorrichtung zur Ätzbehandlung eines scheibenförmigen Gegenstandes |
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