JPS5275271A - Liquid phase epitaxial growth method - Google Patents
Liquid phase epitaxial growth methodInfo
- Publication number
- JPS5275271A JPS5275271A JP15263775A JP15263775A JPS5275271A JP S5275271 A JPS5275271 A JP S5275271A JP 15263775 A JP15263775 A JP 15263775A JP 15263775 A JP15263775 A JP 15263775A JP S5275271 A JPS5275271 A JP S5275271A
- Authority
- JP
- Japan
- Prior art keywords
- epitaxial growth
- liquid phase
- growth method
- phase epitaxial
- solute
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
- Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
- Semiconductor Lasers (AREA)
- Led Devices (AREA)
Abstract
PURPOSE: To deposite solute on substrate surface by spraying a solution melted therein with a solute for epitaxial growth in mist form and applying said spray to the surface of the substrate placed perpendicularly to the mist flow.
COPYRIGHT: (C)1977,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP15263775A JPS5275271A (en) | 1975-12-19 | 1975-12-19 | Liquid phase epitaxial growth method |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP15263775A JPS5275271A (en) | 1975-12-19 | 1975-12-19 | Liquid phase epitaxial growth method |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5275271A true JPS5275271A (en) | 1977-06-24 |
JPS5741096B2 JPS5741096B2 (en) | 1982-09-01 |
Family
ID=15544739
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP15263775A Granted JPS5275271A (en) | 1975-12-19 | 1975-12-19 | Liquid phase epitaxial growth method |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5275271A (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS58180017A (en) * | 1982-04-15 | 1983-10-21 | Agency Of Ind Science & Technol | Manufacture of semiconductor thin-film |
JPS6422034A (en) * | 1987-07-17 | 1989-01-25 | Fuji Electric Co Ltd | Sprayer for forming cuinse2 thin-film |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0392996U (en) * | 1990-01-12 | 1991-09-20 |
-
1975
- 1975-12-19 JP JP15263775A patent/JPS5275271A/en active Granted
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS58180017A (en) * | 1982-04-15 | 1983-10-21 | Agency Of Ind Science & Technol | Manufacture of semiconductor thin-film |
JPS6422034A (en) * | 1987-07-17 | 1989-01-25 | Fuji Electric Co Ltd | Sprayer for forming cuinse2 thin-film |
Also Published As
Publication number | Publication date |
---|---|
JPS5741096B2 (en) | 1982-09-01 |
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