JPS5275271A - Liquid phase epitaxial growth method - Google Patents

Liquid phase epitaxial growth method

Info

Publication number
JPS5275271A
JPS5275271A JP15263775A JP15263775A JPS5275271A JP S5275271 A JPS5275271 A JP S5275271A JP 15263775 A JP15263775 A JP 15263775A JP 15263775 A JP15263775 A JP 15263775A JP S5275271 A JPS5275271 A JP S5275271A
Authority
JP
Japan
Prior art keywords
epitaxial growth
liquid phase
growth method
phase epitaxial
solute
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP15263775A
Other languages
Japanese (ja)
Other versions
JPS5741096B2 (en
Inventor
Kunio Ito
Morio Inoue
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP15263775A priority Critical patent/JPS5275271A/en
Publication of JPS5275271A publication Critical patent/JPS5275271A/en
Publication of JPS5741096B2 publication Critical patent/JPS5741096B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
  • Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
  • Semiconductor Lasers (AREA)
  • Led Devices (AREA)

Abstract

PURPOSE: To deposite solute on substrate surface by spraying a solution melted therein with a solute for epitaxial growth in mist form and applying said spray to the surface of the substrate placed perpendicularly to the mist flow.
COPYRIGHT: (C)1977,JPO&Japio
JP15263775A 1975-12-19 1975-12-19 Liquid phase epitaxial growth method Granted JPS5275271A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15263775A JPS5275271A (en) 1975-12-19 1975-12-19 Liquid phase epitaxial growth method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15263775A JPS5275271A (en) 1975-12-19 1975-12-19 Liquid phase epitaxial growth method

Publications (2)

Publication Number Publication Date
JPS5275271A true JPS5275271A (en) 1977-06-24
JPS5741096B2 JPS5741096B2 (en) 1982-09-01

Family

ID=15544739

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15263775A Granted JPS5275271A (en) 1975-12-19 1975-12-19 Liquid phase epitaxial growth method

Country Status (1)

Country Link
JP (1) JPS5275271A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58180017A (en) * 1982-04-15 1983-10-21 Agency Of Ind Science & Technol Manufacture of semiconductor thin-film
JPS6422034A (en) * 1987-07-17 1989-01-25 Fuji Electric Co Ltd Sprayer for forming cuinse2 thin-film

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0392996U (en) * 1990-01-12 1991-09-20

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58180017A (en) * 1982-04-15 1983-10-21 Agency Of Ind Science & Technol Manufacture of semiconductor thin-film
JPS6422034A (en) * 1987-07-17 1989-01-25 Fuji Electric Co Ltd Sprayer for forming cuinse2 thin-film

Also Published As

Publication number Publication date
JPS5741096B2 (en) 1982-09-01

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