JPS5487484A - Manufacture of semiconductor device - Google Patents

Manufacture of semiconductor device

Info

Publication number
JPS5487484A
JPS5487484A JP15585077A JP15585077A JPS5487484A JP S5487484 A JPS5487484 A JP S5487484A JP 15585077 A JP15585077 A JP 15585077A JP 15585077 A JP15585077 A JP 15585077A JP S5487484 A JPS5487484 A JP S5487484A
Authority
JP
Japan
Prior art keywords
polysilicon
gate
source
manufacture
semiconductor device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP15585077A
Other languages
Japanese (ja)
Inventor
Yasuo Ono
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp, Nippon Electric Co Ltd filed Critical NEC Corp
Priority to JP15585077A priority Critical patent/JPS5487484A/en
Publication of JPS5487484A publication Critical patent/JPS5487484A/en
Pending legal-status Critical Current

Links

Landscapes

  • Electrodes Of Semiconductors (AREA)

Abstract

PURPOSE: To reduce capacities between gate and source-drain regions of a Si gate MOS by preventing the terminal of gate polysilicon from overlapping with that of the source-drain region.
CONSTITUTION: On gate oxidized film 8, gate polysilicon 7 is formed and then, the source-drain region is formed. Next, oxidizing polysilicon reduce polysilicon 7 in size, and the terminal of the remaining polysilicon agrees with that of the source- drain diffusion region, so that no overlap will be formed.
COPYRIGHT: (C)1979,JPO&Japio
JP15585077A 1977-12-23 1977-12-23 Manufacture of semiconductor device Pending JPS5487484A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15585077A JPS5487484A (en) 1977-12-23 1977-12-23 Manufacture of semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15585077A JPS5487484A (en) 1977-12-23 1977-12-23 Manufacture of semiconductor device

Publications (1)

Publication Number Publication Date
JPS5487484A true JPS5487484A (en) 1979-07-11

Family

ID=15614859

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15585077A Pending JPS5487484A (en) 1977-12-23 1977-12-23 Manufacture of semiconductor device

Country Status (1)

Country Link
JP (1) JPS5487484A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57139905A (en) * 1981-02-23 1982-08-30 Murata Manufacturing Co Slider for variable resistor

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57139905A (en) * 1981-02-23 1982-08-30 Murata Manufacturing Co Slider for variable resistor
JPS6122841B2 (en) * 1981-02-23 1986-06-03 Murata Manufacturing Co

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