JPS5487484A - Manufacture of semiconductor device - Google Patents
Manufacture of semiconductor deviceInfo
- Publication number
- JPS5487484A JPS5487484A JP15585077A JP15585077A JPS5487484A JP S5487484 A JPS5487484 A JP S5487484A JP 15585077 A JP15585077 A JP 15585077A JP 15585077 A JP15585077 A JP 15585077A JP S5487484 A JPS5487484 A JP S5487484A
- Authority
- JP
- Japan
- Prior art keywords
- polysilicon
- gate
- source
- manufacture
- semiconductor device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Electrodes Of Semiconductors (AREA)
Abstract
PURPOSE: To reduce capacities between gate and source-drain regions of a Si gate MOS by preventing the terminal of gate polysilicon from overlapping with that of the source-drain region.
CONSTITUTION: On gate oxidized film 8, gate polysilicon 7 is formed and then, the source-drain region is formed. Next, oxidizing polysilicon reduce polysilicon 7 in size, and the terminal of the remaining polysilicon agrees with that of the source- drain diffusion region, so that no overlap will be formed.
COPYRIGHT: (C)1979,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP15585077A JPS5487484A (en) | 1977-12-23 | 1977-12-23 | Manufacture of semiconductor device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP15585077A JPS5487484A (en) | 1977-12-23 | 1977-12-23 | Manufacture of semiconductor device |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5487484A true JPS5487484A (en) | 1979-07-11 |
Family
ID=15614859
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP15585077A Pending JPS5487484A (en) | 1977-12-23 | 1977-12-23 | Manufacture of semiconductor device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5487484A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS57139905A (en) * | 1981-02-23 | 1982-08-30 | Murata Manufacturing Co | Slider for variable resistor |
-
1977
- 1977-12-23 JP JP15585077A patent/JPS5487484A/en active Pending
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS57139905A (en) * | 1981-02-23 | 1982-08-30 | Murata Manufacturing Co | Slider for variable resistor |
JPS6122841B2 (en) * | 1981-02-23 | 1986-06-03 | Murata Manufacturing Co |
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