JPS5377168A - Production of semiconductor device - Google Patents

Production of semiconductor device

Info

Publication number
JPS5377168A
JPS5377168A JP15375076A JP15375076A JPS5377168A JP S5377168 A JPS5377168 A JP S5377168A JP 15375076 A JP15375076 A JP 15375076A JP 15375076 A JP15375076 A JP 15375076A JP S5377168 A JPS5377168 A JP S5377168A
Authority
JP
Japan
Prior art keywords
production
semiconductor device
concentration
diffuse
impurity
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP15375076A
Other languages
Japanese (ja)
Inventor
Shigenori Yokoyama
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Home Electronics Ltd
NEC Corp
Original Assignee
NEC Home Electronics Ltd
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Home Electronics Ltd, Nippon Electric Co Ltd filed Critical NEC Home Electronics Ltd
Priority to JP15375076A priority Critical patent/JPS5377168A/en
Publication of JPS5377168A publication Critical patent/JPS5377168A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE: To diffuse an impurity through the oxide film formed on a substrate and form its concentration accurately to a specified concentration.
COPYRIGHT: (C)1978,JPO&Japio
JP15375076A 1976-12-20 1976-12-20 Production of semiconductor device Pending JPS5377168A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15375076A JPS5377168A (en) 1976-12-20 1976-12-20 Production of semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15375076A JPS5377168A (en) 1976-12-20 1976-12-20 Production of semiconductor device

Publications (1)

Publication Number Publication Date
JPS5377168A true JPS5377168A (en) 1978-07-08

Family

ID=15569287

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15375076A Pending JPS5377168A (en) 1976-12-20 1976-12-20 Production of semiconductor device

Country Status (1)

Country Link
JP (1) JPS5377168A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS553963A (en) * 1978-06-26 1980-01-12 Ricoh Co Ltd Ink feeder for ink jet
JPS553962A (en) * 1978-06-26 1980-01-12 Ricoh Co Ltd Ink cartridge for ink jet

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS553963A (en) * 1978-06-26 1980-01-12 Ricoh Co Ltd Ink feeder for ink jet
JPS553962A (en) * 1978-06-26 1980-01-12 Ricoh Co Ltd Ink cartridge for ink jet

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