JPS5377168A - Production of semiconductor device - Google Patents
Production of semiconductor deviceInfo
- Publication number
- JPS5377168A JPS5377168A JP15375076A JP15375076A JPS5377168A JP S5377168 A JPS5377168 A JP S5377168A JP 15375076 A JP15375076 A JP 15375076A JP 15375076 A JP15375076 A JP 15375076A JP S5377168 A JPS5377168 A JP S5377168A
- Authority
- JP
- Japan
- Prior art keywords
- production
- semiconductor device
- concentration
- diffuse
- impurity
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
PURPOSE: To diffuse an impurity through the oxide film formed on a substrate and form its concentration accurately to a specified concentration.
COPYRIGHT: (C)1978,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP15375076A JPS5377168A (en) | 1976-12-20 | 1976-12-20 | Production of semiconductor device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP15375076A JPS5377168A (en) | 1976-12-20 | 1976-12-20 | Production of semiconductor device |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5377168A true JPS5377168A (en) | 1978-07-08 |
Family
ID=15569287
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP15375076A Pending JPS5377168A (en) | 1976-12-20 | 1976-12-20 | Production of semiconductor device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5377168A (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS553963A (en) * | 1978-06-26 | 1980-01-12 | Ricoh Co Ltd | Ink feeder for ink jet |
JPS553962A (en) * | 1978-06-26 | 1980-01-12 | Ricoh Co Ltd | Ink cartridge for ink jet |
-
1976
- 1976-12-20 JP JP15375076A patent/JPS5377168A/en active Pending
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS553963A (en) * | 1978-06-26 | 1980-01-12 | Ricoh Co Ltd | Ink feeder for ink jet |
JPS553962A (en) * | 1978-06-26 | 1980-01-12 | Ricoh Co Ltd | Ink cartridge for ink jet |
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