JPS52123179A - Mos type semiconductor device and its production - Google Patents
Mos type semiconductor device and its productionInfo
- Publication number
- JPS52123179A JPS52123179A JP4045476A JP4045476A JPS52123179A JP S52123179 A JPS52123179 A JP S52123179A JP 4045476 A JP4045476 A JP 4045476A JP 4045476 A JP4045476 A JP 4045476A JP S52123179 A JPS52123179 A JP S52123179A
- Authority
- JP
- Japan
- Prior art keywords
- production
- semiconductor device
- type semiconductor
- mos type
- determining
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
PURPOSE: To obtain a MOS transistor of extremely short channel parts and small variation in threshold voltage by determining the channel length of enhancement part not in a photoetching process but in a diffusion process.
COPYRIGHT: (C)1977,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP4045476A JPS52123179A (en) | 1976-04-09 | 1976-04-09 | Mos type semiconductor device and its production |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP4045476A JPS52123179A (en) | 1976-04-09 | 1976-04-09 | Mos type semiconductor device and its production |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS52123179A true JPS52123179A (en) | 1977-10-17 |
Family
ID=12581075
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP4045476A Pending JPS52123179A (en) | 1976-04-09 | 1976-04-09 | Mos type semiconductor device and its production |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS52123179A (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS59134879A (en) * | 1983-01-21 | 1984-08-02 | Toshiba Corp | Semiconductor device |
JPS61272972A (en) * | 1985-05-28 | 1986-12-03 | Toshiba Corp | Semiconductor device and manufacture thereof |
-
1976
- 1976-04-09 JP JP4045476A patent/JPS52123179A/en active Pending
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS59134879A (en) * | 1983-01-21 | 1984-08-02 | Toshiba Corp | Semiconductor device |
JPS61272972A (en) * | 1985-05-28 | 1986-12-03 | Toshiba Corp | Semiconductor device and manufacture thereof |
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