JPS52123179A - Mos type semiconductor device and its production - Google Patents

Mos type semiconductor device and its production

Info

Publication number
JPS52123179A
JPS52123179A JP4045476A JP4045476A JPS52123179A JP S52123179 A JPS52123179 A JP S52123179A JP 4045476 A JP4045476 A JP 4045476A JP 4045476 A JP4045476 A JP 4045476A JP S52123179 A JPS52123179 A JP S52123179A
Authority
JP
Japan
Prior art keywords
production
semiconductor device
type semiconductor
mos type
determining
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP4045476A
Other languages
Japanese (ja)
Inventor
Takeshi Kimura
Michihiro Inoue
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP4045476A priority Critical patent/JPS52123179A/en
Publication of JPS52123179A publication Critical patent/JPS52123179A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE: To obtain a MOS transistor of extremely short channel parts and small variation in threshold voltage by determining the channel length of enhancement part not in a photoetching process but in a diffusion process.
COPYRIGHT: (C)1977,JPO&Japio
JP4045476A 1976-04-09 1976-04-09 Mos type semiconductor device and its production Pending JPS52123179A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4045476A JPS52123179A (en) 1976-04-09 1976-04-09 Mos type semiconductor device and its production

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4045476A JPS52123179A (en) 1976-04-09 1976-04-09 Mos type semiconductor device and its production

Publications (1)

Publication Number Publication Date
JPS52123179A true JPS52123179A (en) 1977-10-17

Family

ID=12581075

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4045476A Pending JPS52123179A (en) 1976-04-09 1976-04-09 Mos type semiconductor device and its production

Country Status (1)

Country Link
JP (1) JPS52123179A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59134879A (en) * 1983-01-21 1984-08-02 Toshiba Corp Semiconductor device
JPS61272972A (en) * 1985-05-28 1986-12-03 Toshiba Corp Semiconductor device and manufacture thereof

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59134879A (en) * 1983-01-21 1984-08-02 Toshiba Corp Semiconductor device
JPS61272972A (en) * 1985-05-28 1986-12-03 Toshiba Corp Semiconductor device and manufacture thereof

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