JPS5379A - Manufacture of mos semiconductor device - Google Patents
Manufacture of mos semiconductor deviceInfo
- Publication number
- JPS5379A JPS5379A JP7481776A JP7481776A JPS5379A JP S5379 A JPS5379 A JP S5379A JP 7481776 A JP7481776 A JP 7481776A JP 7481776 A JP7481776 A JP 7481776A JP S5379 A JPS5379 A JP S5379A
- Authority
- JP
- Japan
- Prior art keywords
- manufacture
- semiconductor device
- mos semiconductor
- resistance
- poly
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
PURPOSE: To obtain a self-matching type MOS device which features a high gate voltage-resistance and low diffusion resistance, by laminating poly Si onto the source/drain and resistance layer regions and giving a thermal oxidation to the poly Si.
COPYRIGHT: (C)1978,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP7481776A JPS5379A (en) | 1976-06-23 | 1976-06-23 | Manufacture of mos semiconductor device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP7481776A JPS5379A (en) | 1976-06-23 | 1976-06-23 | Manufacture of mos semiconductor device |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5379A true JPS5379A (en) | 1978-01-05 |
Family
ID=13558234
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP7481776A Pending JPS5379A (en) | 1976-06-23 | 1976-06-23 | Manufacture of mos semiconductor device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5379A (en) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6184263B1 (en) | 1996-08-29 | 2001-02-06 | Xerox Corporation | Blends containing photosensitive high performance aromatic ether curable polymers |
US6203143B1 (en) | 1996-08-29 | 2001-03-20 | Xerox Corporation | Hydroxyalkylated high performance curable polymers |
US6323301B1 (en) | 1996-08-29 | 2001-11-27 | Xerox Corporation | High performance UV and heat crosslinked or chain extended polymers |
-
1976
- 1976-06-23 JP JP7481776A patent/JPS5379A/en active Pending
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6184263B1 (en) | 1996-08-29 | 2001-02-06 | Xerox Corporation | Blends containing photosensitive high performance aromatic ether curable polymers |
US6203143B1 (en) | 1996-08-29 | 2001-03-20 | Xerox Corporation | Hydroxyalkylated high performance curable polymers |
US6323301B1 (en) | 1996-08-29 | 2001-11-27 | Xerox Corporation | High performance UV and heat crosslinked or chain extended polymers |
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