JPS545665A - Electron beam exposure device - Google Patents

Electron beam exposure device

Info

Publication number
JPS545665A
JPS545665A JP7085677A JP7085677A JPS545665A JP S545665 A JPS545665 A JP S545665A JP 7085677 A JP7085677 A JP 7085677A JP 7085677 A JP7085677 A JP 7085677A JP S545665 A JPS545665 A JP S545665A
Authority
JP
Japan
Prior art keywords
electron beam
exposure device
beam exposure
editing
correction
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP7085677A
Other languages
Japanese (ja)
Other versions
JPS5626138B2 (en
Inventor
Hiroshi Yasuda
Haruo Tsuchikawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP7085677A priority Critical patent/JPS545665A/en
Publication of JPS545665A publication Critical patent/JPS545665A/en
Publication of JPS5626138B2 publication Critical patent/JPS5626138B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Electron Beam Exposure (AREA)

Abstract

PURPOSE: To perform the exposure while carrying out an automatic correction and editing for various patterns via a small-size and high-speed device, by securing the indication for a partial erasion or addition for the basic pattern data by means of the correction bit given from the second memory.
COPYRIGHT: (C)1979,JPO&Japio
JP7085677A 1977-06-15 1977-06-15 Electron beam exposure device Granted JPS545665A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7085677A JPS545665A (en) 1977-06-15 1977-06-15 Electron beam exposure device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7085677A JPS545665A (en) 1977-06-15 1977-06-15 Electron beam exposure device

Publications (2)

Publication Number Publication Date
JPS545665A true JPS545665A (en) 1979-01-17
JPS5626138B2 JPS5626138B2 (en) 1981-06-17

Family

ID=13443616

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7085677A Granted JPS545665A (en) 1977-06-15 1977-06-15 Electron beam exposure device

Country Status (1)

Country Link
JP (1) JPS545665A (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5630726A (en) * 1979-08-22 1981-03-27 Toshiba Corp Outputting device of exposure data
JPS56142753U (en) * 1980-03-28 1981-10-28
JPS56138925A (en) * 1980-03-31 1981-10-29 Chiyou Lsi Gijutsu Kenkyu Kumiai Manufacture of semiconductor device
JPS58199526A (en) * 1982-05-17 1983-11-19 Hitachi Ltd Method and apparatus for forming pattern

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS50145865A (en) * 1974-04-18 1975-11-22

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS50145865A (en) * 1974-04-18 1975-11-22

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5630726A (en) * 1979-08-22 1981-03-27 Toshiba Corp Outputting device of exposure data
JPS5759659B2 (en) * 1979-08-22 1982-12-15 Tokyo Shibaura Denki Kk
JPS56142753U (en) * 1980-03-28 1981-10-28
JPS56138925A (en) * 1980-03-31 1981-10-29 Chiyou Lsi Gijutsu Kenkyu Kumiai Manufacture of semiconductor device
JPS6333293B2 (en) * 1980-03-31 1988-07-05 Cho Eru Esu Ai Gijutsu Kenkyu Kumiai
JPS58199526A (en) * 1982-05-17 1983-11-19 Hitachi Ltd Method and apparatus for forming pattern

Also Published As

Publication number Publication date
JPS5626138B2 (en) 1981-06-17

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