JPS545665A - Electron beam exposure device - Google Patents
Electron beam exposure deviceInfo
- Publication number
- JPS545665A JPS545665A JP7085677A JP7085677A JPS545665A JP S545665 A JPS545665 A JP S545665A JP 7085677 A JP7085677 A JP 7085677A JP 7085677 A JP7085677 A JP 7085677A JP S545665 A JPS545665 A JP S545665A
- Authority
- JP
- Japan
- Prior art keywords
- electron beam
- exposure device
- beam exposure
- editing
- correction
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Electron Beam Exposure (AREA)
Abstract
PURPOSE: To perform the exposure while carrying out an automatic correction and editing for various patterns via a small-size and high-speed device, by securing the indication for a partial erasion or addition for the basic pattern data by means of the correction bit given from the second memory.
COPYRIGHT: (C)1979,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP7085677A JPS545665A (en) | 1977-06-15 | 1977-06-15 | Electron beam exposure device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP7085677A JPS545665A (en) | 1977-06-15 | 1977-06-15 | Electron beam exposure device |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS545665A true JPS545665A (en) | 1979-01-17 |
JPS5626138B2 JPS5626138B2 (en) | 1981-06-17 |
Family
ID=13443616
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP7085677A Granted JPS545665A (en) | 1977-06-15 | 1977-06-15 | Electron beam exposure device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS545665A (en) |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5630726A (en) * | 1979-08-22 | 1981-03-27 | Toshiba Corp | Outputting device of exposure data |
JPS56142753U (en) * | 1980-03-28 | 1981-10-28 | ||
JPS56138925A (en) * | 1980-03-31 | 1981-10-29 | Chiyou Lsi Gijutsu Kenkyu Kumiai | Manufacture of semiconductor device |
JPS58199526A (en) * | 1982-05-17 | 1983-11-19 | Hitachi Ltd | Method and apparatus for forming pattern |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS50145865A (en) * | 1974-04-18 | 1975-11-22 |
-
1977
- 1977-06-15 JP JP7085677A patent/JPS545665A/en active Granted
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS50145865A (en) * | 1974-04-18 | 1975-11-22 |
Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5630726A (en) * | 1979-08-22 | 1981-03-27 | Toshiba Corp | Outputting device of exposure data |
JPS5759659B2 (en) * | 1979-08-22 | 1982-12-15 | Tokyo Shibaura Denki Kk | |
JPS56142753U (en) * | 1980-03-28 | 1981-10-28 | ||
JPS56138925A (en) * | 1980-03-31 | 1981-10-29 | Chiyou Lsi Gijutsu Kenkyu Kumiai | Manufacture of semiconductor device |
JPS6333293B2 (en) * | 1980-03-31 | 1988-07-05 | Cho Eru Esu Ai Gijutsu Kenkyu Kumiai | |
JPS58199526A (en) * | 1982-05-17 | 1983-11-19 | Hitachi Ltd | Method and apparatus for forming pattern |
Also Published As
Publication number | Publication date |
---|---|
JPS5626138B2 (en) | 1981-06-17 |
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