JPS5377465A - Boron deposition method - Google Patents
Boron deposition methodInfo
- Publication number
- JPS5377465A JPS5377465A JP15580176A JP15580176A JPS5377465A JP S5377465 A JPS5377465 A JP S5377465A JP 15580176 A JP15580176 A JP 15580176A JP 15580176 A JP15580176 A JP 15580176A JP S5377465 A JPS5377465 A JP S5377465A
- Authority
- JP
- Japan
- Prior art keywords
- deposition method
- boron
- boron deposition
- core tube
- gas
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Led Devices (AREA)
Abstract
PURPOSE: To obtain a layer resistance without scattering by generating an oxidizable atmosphere in a core tube after mixing H2 gas of a prescribed quantity besides led-in carrier gas and burning when nitride boron and a semiconductor substrate are provided in the core tube to deposit boron on the substrate.
COPYRIGHT: (C)1978,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP15580176A JPS5377465A (en) | 1976-12-20 | 1976-12-20 | Boron deposition method |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP15580176A JPS5377465A (en) | 1976-12-20 | 1976-12-20 | Boron deposition method |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5377465A true JPS5377465A (en) | 1978-07-08 |
JPS5538046B2 JPS5538046B2 (en) | 1980-10-02 |
Family
ID=15613733
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP15580176A Granted JPS5377465A (en) | 1976-12-20 | 1976-12-20 | Boron deposition method |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5377465A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS56169322A (en) * | 1980-05-30 | 1981-12-26 | Fujikura Ltd | Selective diffusion of boron into silicon |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4847769A (en) * | 1971-10-18 | 1973-07-06 |
-
1976
- 1976-12-20 JP JP15580176A patent/JPS5377465A/en active Granted
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4847769A (en) * | 1971-10-18 | 1973-07-06 |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS56169322A (en) * | 1980-05-30 | 1981-12-26 | Fujikura Ltd | Selective diffusion of boron into silicon |
Also Published As
Publication number | Publication date |
---|---|
JPS5538046B2 (en) | 1980-10-02 |
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