JPS4847769A - - Google Patents
Info
- Publication number
- JPS4847769A JPS4847769A JP8228171A JP8228171A JPS4847769A JP S4847769 A JPS4847769 A JP S4847769A JP 8228171 A JP8228171 A JP 8228171A JP 8228171 A JP8228171 A JP 8228171A JP S4847769 A JPS4847769 A JP S4847769A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP8228171A JPS4847769A (en) | 1971-10-18 | 1971-10-18 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP8228171A JPS4847769A (en) | 1971-10-18 | 1971-10-18 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS4847769A true JPS4847769A (en) | 1973-07-06 |
Family
ID=13770111
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP8228171A Pending JPS4847769A (en) | 1971-10-18 | 1971-10-18 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS4847769A (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5377465A (en) * | 1976-12-20 | 1978-07-08 | Sanyo Electric Co Ltd | Boron deposition method |
JPH0414218A (en) * | 1990-05-07 | 1992-01-20 | Fuji Electric Co Ltd | Manufacture of semiconductor element |
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1971
- 1971-10-18 JP JP8228171A patent/JPS4847769A/ja active Pending
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5377465A (en) * | 1976-12-20 | 1978-07-08 | Sanyo Electric Co Ltd | Boron deposition method |
JPS5538046B2 (en) * | 1976-12-20 | 1980-10-02 | ||
JPH0414218A (en) * | 1990-05-07 | 1992-01-20 | Fuji Electric Co Ltd | Manufacture of semiconductor element |
JP2730262B2 (en) * | 1990-05-07 | 1998-03-25 | 富士電機株式会社 | Method for manufacturing semiconductor device |