JPS5366881A - Epitaxial growing apparatus in liquid phase - Google Patents
Epitaxial growing apparatus in liquid phaseInfo
- Publication number
- JPS5366881A JPS5366881A JP14270876A JP14270876A JPS5366881A JP S5366881 A JPS5366881 A JP S5366881A JP 14270876 A JP14270876 A JP 14270876A JP 14270876 A JP14270876 A JP 14270876A JP S5366881 A JPS5366881 A JP S5366881A
- Authority
- JP
- Japan
- Prior art keywords
- liquid phase
- growing
- growing apparatus
- epitaxial growing
- slider
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
Abstract
PURPOSE: To simplify the process so as to simplify whole constitution of epitaxial growing apparatus by constituting the apparatus by unification of a growing slider for forming growing space and working section for extruding molten liquid for growing so that the slider and working section are capable of being operated in enterlocked motion.
COPYRIGHT: (C)1978,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP14270876A JPS5366881A (en) | 1976-11-26 | 1976-11-26 | Epitaxial growing apparatus in liquid phase |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP14270876A JPS5366881A (en) | 1976-11-26 | 1976-11-26 | Epitaxial growing apparatus in liquid phase |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5366881A true JPS5366881A (en) | 1978-06-14 |
Family
ID=15321711
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP14270876A Pending JPS5366881A (en) | 1976-11-26 | 1976-11-26 | Epitaxial growing apparatus in liquid phase |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5366881A (en) |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5252899A (en) * | 1975-10-27 | 1977-04-28 | Nippon Telegr & Teleph Corp <Ntt> | Apparatus for liquid phase epitaxial crystal growth |
JPS52106672A (en) * | 1976-03-05 | 1977-09-07 | Nippon Telegr & Teleph Corp <Ntt> | Device for liquid phase epitaxial growth |
-
1976
- 1976-11-26 JP JP14270876A patent/JPS5366881A/en active Pending
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5252899A (en) * | 1975-10-27 | 1977-04-28 | Nippon Telegr & Teleph Corp <Ntt> | Apparatus for liquid phase epitaxial crystal growth |
JPS52106672A (en) * | 1976-03-05 | 1977-09-07 | Nippon Telegr & Teleph Corp <Ntt> | Device for liquid phase epitaxial growth |
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