JPS5366881A - Epitaxial growing apparatus in liquid phase - Google Patents

Epitaxial growing apparatus in liquid phase

Info

Publication number
JPS5366881A
JPS5366881A JP14270876A JP14270876A JPS5366881A JP S5366881 A JPS5366881 A JP S5366881A JP 14270876 A JP14270876 A JP 14270876A JP 14270876 A JP14270876 A JP 14270876A JP S5366881 A JPS5366881 A JP S5366881A
Authority
JP
Japan
Prior art keywords
liquid phase
growing
growing apparatus
epitaxial growing
slider
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP14270876A
Other languages
Japanese (ja)
Inventor
Ryoichi Hirano
Jun Ishii
Toshio Tanaka
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP14270876A priority Critical patent/JPS5366881A/en
Publication of JPS5366881A publication Critical patent/JPS5366881A/en
Pending legal-status Critical Current

Links

Landscapes

  • Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)

Abstract

PURPOSE: To simplify the process so as to simplify whole constitution of epitaxial growing apparatus by constituting the apparatus by unification of a growing slider for forming growing space and working section for extruding molten liquid for growing so that the slider and working section are capable of being operated in enterlocked motion.
COPYRIGHT: (C)1978,JPO&Japio
JP14270876A 1976-11-26 1976-11-26 Epitaxial growing apparatus in liquid phase Pending JPS5366881A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14270876A JPS5366881A (en) 1976-11-26 1976-11-26 Epitaxial growing apparatus in liquid phase

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14270876A JPS5366881A (en) 1976-11-26 1976-11-26 Epitaxial growing apparatus in liquid phase

Publications (1)

Publication Number Publication Date
JPS5366881A true JPS5366881A (en) 1978-06-14

Family

ID=15321711

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14270876A Pending JPS5366881A (en) 1976-11-26 1976-11-26 Epitaxial growing apparatus in liquid phase

Country Status (1)

Country Link
JP (1) JPS5366881A (en)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5252899A (en) * 1975-10-27 1977-04-28 Nippon Telegr & Teleph Corp <Ntt> Apparatus for liquid phase epitaxial crystal growth
JPS52106672A (en) * 1976-03-05 1977-09-07 Nippon Telegr & Teleph Corp <Ntt> Device for liquid phase epitaxial growth

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5252899A (en) * 1975-10-27 1977-04-28 Nippon Telegr & Teleph Corp <Ntt> Apparatus for liquid phase epitaxial crystal growth
JPS52106672A (en) * 1976-03-05 1977-09-07 Nippon Telegr & Teleph Corp <Ntt> Device for liquid phase epitaxial growth

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