JPS535569A - Liquid-phase epitaxial growth method - Google Patents
Liquid-phase epitaxial growth methodInfo
- Publication number
- JPS535569A JPS535569A JP8049476A JP8049476A JPS535569A JP S535569 A JPS535569 A JP S535569A JP 8049476 A JP8049476 A JP 8049476A JP 8049476 A JP8049476 A JP 8049476A JP S535569 A JPS535569 A JP S535569A
- Authority
- JP
- Japan
- Prior art keywords
- liquid
- epitaxial growth
- growth method
- phase epitaxial
- growth
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
- Led Devices (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
Abstract
PURPOSE: To have a continuous growth of different epitaxial layers without taking in and out of the substrate by dividing the growth boat in the upper, middle and lower parts with two upper and lower sliding plates containing small holes.
COPYRIGHT: (C)1978,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP8049476A JPS535569A (en) | 1976-07-05 | 1976-07-05 | Liquid-phase epitaxial growth method |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP8049476A JPS535569A (en) | 1976-07-05 | 1976-07-05 | Liquid-phase epitaxial growth method |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS535569A true JPS535569A (en) | 1978-01-19 |
JPS5514530B2 JPS5514530B2 (en) | 1980-04-17 |
Family
ID=13719844
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP8049476A Granted JPS535569A (en) | 1976-07-05 | 1976-07-05 | Liquid-phase epitaxial growth method |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS535569A (en) |
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5717127A (en) * | 1980-07-04 | 1982-01-28 | Mitsubishi Electric Corp | Boat for liquid-phase epitaxial growth |
JPS5912633U (en) * | 1982-07-14 | 1984-01-26 | 日本写真印刷株式会社 | Transfer foil feeding device |
JPS61227054A (en) * | 1985-04-02 | 1986-10-09 | Chuo Tsusho Kk | Controller for supply and feed of marking material in marking machine |
JPS6273625A (en) * | 1985-09-26 | 1987-04-04 | Mitsubishi Electric Corp | Liquid-phase epitaxial growth device |
US5326716A (en) * | 1986-02-11 | 1994-07-05 | Max Planck-Gesellschaft Zur Foerderung Der Wissenschaften E.V. | Liquid phase epitaxial process for producing three-dimensional semiconductor structures by liquid phase expitaxy |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS59127101U (en) * | 1983-02-16 | 1984-08-27 | 積水樹脂株式会社 | tape measure |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS49121462U (en) * | 1973-02-16 | 1974-10-17 |
-
1976
- 1976-07-05 JP JP8049476A patent/JPS535569A/en active Granted
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS49121462U (en) * | 1973-02-16 | 1974-10-17 |
Cited By (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5717127A (en) * | 1980-07-04 | 1982-01-28 | Mitsubishi Electric Corp | Boat for liquid-phase epitaxial growth |
JPS5912633U (en) * | 1982-07-14 | 1984-01-26 | 日本写真印刷株式会社 | Transfer foil feeding device |
JPH0321959Y2 (en) * | 1982-07-14 | 1991-05-14 | ||
JPS61227054A (en) * | 1985-04-02 | 1986-10-09 | Chuo Tsusho Kk | Controller for supply and feed of marking material in marking machine |
JPH0311627B2 (en) * | 1985-04-02 | 1991-02-18 | Chuo Tsusho Kk | |
JPS6273625A (en) * | 1985-09-26 | 1987-04-04 | Mitsubishi Electric Corp | Liquid-phase epitaxial growth device |
US5326716A (en) * | 1986-02-11 | 1994-07-05 | Max Planck-Gesellschaft Zur Foerderung Der Wissenschaften E.V. | Liquid phase epitaxial process for producing three-dimensional semiconductor structures by liquid phase expitaxy |
US5397736A (en) * | 1986-02-11 | 1995-03-14 | Max-Planck-Gesellschaft Zur Foerderung Der Wissenschaften | Liquid epitaxial process for producing three-dimensional semiconductor structures |
Also Published As
Publication number | Publication date |
---|---|
JPS5514530B2 (en) | 1980-04-17 |
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