JPS5252899A - Apparatus for liquid phase epitaxial crystal growth - Google Patents

Apparatus for liquid phase epitaxial crystal growth

Info

Publication number
JPS5252899A
JPS5252899A JP50129087A JP12908775A JPS5252899A JP S5252899 A JPS5252899 A JP S5252899A JP 50129087 A JP50129087 A JP 50129087A JP 12908775 A JP12908775 A JP 12908775A JP S5252899 A JPS5252899 A JP S5252899A
Authority
JP
Japan
Prior art keywords
liquid phase
crystal growth
phase epitaxial
epitaxial crystal
algaas
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP50129087A
Other languages
Japanese (ja)
Other versions
JPS5628876B2 (en
Inventor
Yoshiharu Horikoshi
Yoshitaka Furukawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nippon Telegraph and Telephone Corp
Original Assignee
Nippon Telegraph and Telephone Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Telegraph and Telephone Corp filed Critical Nippon Telegraph and Telephone Corp
Priority to JP50129087A priority Critical patent/JPS5252899A/en
Publication of JPS5252899A publication Critical patent/JPS5252899A/en
Publication of JPS5628876B2 publication Critical patent/JPS5628876B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
  • Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)

Abstract

PURPOSE:To make easy external operation on crystal growth of GaAs, AlGaAs using liquid phase epitaxial method.
JP50129087A 1975-10-27 1975-10-27 Apparatus for liquid phase epitaxial crystal growth Granted JPS5252899A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP50129087A JPS5252899A (en) 1975-10-27 1975-10-27 Apparatus for liquid phase epitaxial crystal growth

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP50129087A JPS5252899A (en) 1975-10-27 1975-10-27 Apparatus for liquid phase epitaxial crystal growth

Publications (2)

Publication Number Publication Date
JPS5252899A true JPS5252899A (en) 1977-04-28
JPS5628876B2 JPS5628876B2 (en) 1981-07-04

Family

ID=15000744

Family Applications (1)

Application Number Title Priority Date Filing Date
JP50129087A Granted JPS5252899A (en) 1975-10-27 1975-10-27 Apparatus for liquid phase epitaxial crystal growth

Country Status (1)

Country Link
JP (1) JPS5252899A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5366881A (en) * 1976-11-26 1978-06-14 Mitsubishi Electric Corp Epitaxial growing apparatus in liquid phase
JPS558626U (en) * 1978-06-30 1980-01-21
US10518058B2 (en) 2003-02-21 2019-12-31 ResMed Pty Ltd Mask assembly

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6066478U (en) * 1983-10-06 1985-05-11 株式会社長尾庖丁製作所 Anti-slip device for knife handle

Cited By (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5366881A (en) * 1976-11-26 1978-06-14 Mitsubishi Electric Corp Epitaxial growing apparatus in liquid phase
JPS558626U (en) * 1978-06-30 1980-01-21
US10518058B2 (en) 2003-02-21 2019-12-31 ResMed Pty Ltd Mask assembly
US10556084B2 (en) 2003-02-21 2020-02-11 ResMed Pty Ltd Mask assembly
US10561813B2 (en) 2003-02-21 2020-02-18 Resmed Pty Ltd. Mask assembly
US11000664B2 (en) 2003-02-21 2021-05-11 ResMed Pty Ltd Mask assembly
US11077276B2 (en) 2003-02-21 2021-08-03 ResMed Pty Ltd Mask assembly
US11090455B2 (en) 2003-02-21 2021-08-17 ResMed Pty Ltd Nasal assembly
US11103666B2 (en) 2003-02-21 2021-08-31 ResMed Pty Ltd Mask assembly
US11420004B2 (en) 2003-02-21 2022-08-23 ResMed Pty Ltd Mask assembly
US11433207B2 (en) 2003-02-21 2022-09-06 ResMed Pty Ltd Mask assembly
US11497876B2 (en) 2003-02-21 2022-11-15 ResMed Pty Ltd Mask assembly
US11583652B2 (en) 2003-02-21 2023-02-21 ResMed Pty Ltd Mask assembly

Also Published As

Publication number Publication date
JPS5628876B2 (en) 1981-07-04

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