JPS5229477A - Multi-layer epitaxial growth method at liquid phase - Google Patents
Multi-layer epitaxial growth method at liquid phaseInfo
- Publication number
- JPS5229477A JPS5229477A JP10492775A JP10492775A JPS5229477A JP S5229477 A JPS5229477 A JP S5229477A JP 10492775 A JP10492775 A JP 10492775A JP 10492775 A JP10492775 A JP 10492775A JP S5229477 A JPS5229477 A JP S5229477A
- Authority
- JP
- Japan
- Prior art keywords
- liquid phase
- epitaxial growth
- growth method
- layer epitaxial
- layer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
- Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
Abstract
PURPOSE: A multi-layer epitaxial growth method at liquid phase by sliding.
COPYRIGHT: (C)1977,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP10492775A JPS5229477A (en) | 1975-09-01 | 1975-09-01 | Multi-layer epitaxial growth method at liquid phase |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP10492775A JPS5229477A (en) | 1975-09-01 | 1975-09-01 | Multi-layer epitaxial growth method at liquid phase |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5229477A true JPS5229477A (en) | 1977-03-05 |
JPS5731559B2 JPS5731559B2 (en) | 1982-07-05 |
Family
ID=14393720
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP10492775A Granted JPS5229477A (en) | 1975-09-01 | 1975-09-01 | Multi-layer epitaxial growth method at liquid phase |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5229477A (en) |
-
1975
- 1975-09-01 JP JP10492775A patent/JPS5229477A/en active Granted
Also Published As
Publication number | Publication date |
---|---|
JPS5731559B2 (en) | 1982-07-05 |
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