JPS5355991A - Manufacture of dielectric separation substrate - Google Patents
Manufacture of dielectric separation substrateInfo
- Publication number
- JPS5355991A JPS5355991A JP13106476A JP13106476A JPS5355991A JP S5355991 A JPS5355991 A JP S5355991A JP 13106476 A JP13106476 A JP 13106476A JP 13106476 A JP13106476 A JP 13106476A JP S5355991 A JPS5355991 A JP S5355991A
- Authority
- JP
- Japan
- Prior art keywords
- manufacture
- dielectric separation
- separation substrate
- single crystal
- film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Element Separation (AREA)
Abstract
PURPOSE: To secure an easing and absorption of the stress which is applied to the single crystal island from an insulator film and and a supporter layer, by providing a buffer film such as non-single crystal semiconductir film between the semiconductor single crystal island and the insulator film of a dielectric separation wafer.
COPYRIGHT: (C)1978,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP13106476A JPS5355991A (en) | 1976-10-30 | 1976-10-30 | Manufacture of dielectric separation substrate |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP13106476A JPS5355991A (en) | 1976-10-30 | 1976-10-30 | Manufacture of dielectric separation substrate |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5355991A true JPS5355991A (en) | 1978-05-20 |
Family
ID=15049153
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP13106476A Pending JPS5355991A (en) | 1976-10-30 | 1976-10-30 | Manufacture of dielectric separation substrate |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5355991A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH02295153A (en) * | 1989-05-09 | 1990-12-06 | Mitsubishi Electric Corp | Semiconductor device |
-
1976
- 1976-10-30 JP JP13106476A patent/JPS5355991A/en active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH02295153A (en) * | 1989-05-09 | 1990-12-06 | Mitsubishi Electric Corp | Semiconductor device |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JPS5351970A (en) | Manufacture for semiconductor substrate | |
JPS5355986A (en) | Manufacture of semiconductor device | |
JPS52156580A (en) | Semiconductor integrated circuit device and its production | |
JPS5247673A (en) | Process for production of silicon crystal film | |
JPS5355991A (en) | Manufacture of dielectric separation substrate | |
JPS5294782A (en) | Insulation gate type ic | |
JPS542070A (en) | Manufacture for semiconductor element | |
JPS52119084A (en) | Manufacture of semiconductor integrated circuit | |
JPS543473A (en) | Manufacture of semiconductor device | |
JPS5317068A (en) | Semiconductor device and its production | |
JPS5267963A (en) | Manufacture of semiconductor unit | |
JPS5214379A (en) | Method for production of insulated gate semiconductor integrated circuit device | |
JPS51145267A (en) | Manufacture of semiconductor device | |
JPS52101979A (en) | Semiconductor device | |
JPS5282083A (en) | Production of semiconductor device | |
JPS5246777A (en) | Semiconductor device | |
JPS5268371A (en) | Semiconductor device | |
JPS5236983A (en) | Mos type semiconductor integrated circuit device and process for produ ction of same | |
JPS53105385A (en) | Manufacture for semiconductor | |
JPS5323584A (en) | Production of semiconductor device | |
JPS5399881A (en) | Manufacture of dielectric separation substrate | |
JPS5352379A (en) | Production of dielectric isolated ic substrate | |
JPS51147259A (en) | Manufacturing process of semiconductor device | |
JPS5258372A (en) | Semiconductor device and its production | |
JPS52113688A (en) | Production of semiconductor device |