JPS5267963A - Manufacture of semiconductor unit - Google Patents

Manufacture of semiconductor unit

Info

Publication number
JPS5267963A
JPS5267963A JP14471675A JP14471675A JPS5267963A JP S5267963 A JPS5267963 A JP S5267963A JP 14471675 A JP14471675 A JP 14471675A JP 14471675 A JP14471675 A JP 14471675A JP S5267963 A JPS5267963 A JP S5267963A
Authority
JP
Japan
Prior art keywords
manufacture
region
semiconductor unit
oxidization
active region
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP14471675A
Other languages
Japanese (ja)
Inventor
Isao Okura
Masashi Omori
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP14471675A priority Critical patent/JPS5267963A/en
Publication of JPS5267963A publication Critical patent/JPS5267963A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE: To prevent etching accuracy deterioration due to side surface etching as well as to prevent short circuit between active region substrate by covering the region forming gate insulation film and electrode take-out region with oxidization prevention film and then by forming oxidization thick film to element active region.
COPYRIGHT: (C)1977,JPO&Japio
JP14471675A 1975-12-04 1975-12-04 Manufacture of semiconductor unit Pending JPS5267963A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14471675A JPS5267963A (en) 1975-12-04 1975-12-04 Manufacture of semiconductor unit

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14471675A JPS5267963A (en) 1975-12-04 1975-12-04 Manufacture of semiconductor unit

Publications (1)

Publication Number Publication Date
JPS5267963A true JPS5267963A (en) 1977-06-06

Family

ID=15368627

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14471675A Pending JPS5267963A (en) 1975-12-04 1975-12-04 Manufacture of semiconductor unit

Country Status (1)

Country Link
JP (1) JPS5267963A (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS544081A (en) * 1977-06-10 1979-01-12 Matsushita Electric Ind Co Ltd Manufacture for semiconductor device
JPS544082A (en) * 1977-06-10 1979-01-12 Matsushita Electric Ind Co Ltd Manufacture for semiconductor device
JPS5544451U (en) * 1978-09-13 1980-03-22
JPS6114765A (en) * 1984-06-29 1986-01-22 Shindengen Electric Mfg Co Ltd Insulated gate field effect transistor

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3698966A (en) * 1970-02-26 1972-10-17 North American Rockwell Processes using a masking layer for producing field effect devices having oxide isolation
JPS514837A (en) * 1974-07-01 1976-01-16 Takenaka Komuten Co KADOSHIKI HINANBARUKONII

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3698966A (en) * 1970-02-26 1972-10-17 North American Rockwell Processes using a masking layer for producing field effect devices having oxide isolation
JPS514837A (en) * 1974-07-01 1976-01-16 Takenaka Komuten Co KADOSHIKI HINANBARUKONII

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS544081A (en) * 1977-06-10 1979-01-12 Matsushita Electric Ind Co Ltd Manufacture for semiconductor device
JPS544082A (en) * 1977-06-10 1979-01-12 Matsushita Electric Ind Co Ltd Manufacture for semiconductor device
JPS5544451U (en) * 1978-09-13 1980-03-22
JPS6114765A (en) * 1984-06-29 1986-01-22 Shindengen Electric Mfg Co Ltd Insulated gate field effect transistor

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