JPS5267963A - Manufacture of semiconductor unit - Google Patents
Manufacture of semiconductor unitInfo
- Publication number
- JPS5267963A JPS5267963A JP14471675A JP14471675A JPS5267963A JP S5267963 A JPS5267963 A JP S5267963A JP 14471675 A JP14471675 A JP 14471675A JP 14471675 A JP14471675 A JP 14471675A JP S5267963 A JPS5267963 A JP S5267963A
- Authority
- JP
- Japan
- Prior art keywords
- manufacture
- region
- semiconductor unit
- oxidization
- active region
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
PURPOSE: To prevent etching accuracy deterioration due to side surface etching as well as to prevent short circuit between active region substrate by covering the region forming gate insulation film and electrode take-out region with oxidization prevention film and then by forming oxidization thick film to element active region.
COPYRIGHT: (C)1977,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP14471675A JPS5267963A (en) | 1975-12-04 | 1975-12-04 | Manufacture of semiconductor unit |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP14471675A JPS5267963A (en) | 1975-12-04 | 1975-12-04 | Manufacture of semiconductor unit |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5267963A true JPS5267963A (en) | 1977-06-06 |
Family
ID=15368627
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP14471675A Pending JPS5267963A (en) | 1975-12-04 | 1975-12-04 | Manufacture of semiconductor unit |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5267963A (en) |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS544081A (en) * | 1977-06-10 | 1979-01-12 | Matsushita Electric Ind Co Ltd | Manufacture for semiconductor device |
JPS544082A (en) * | 1977-06-10 | 1979-01-12 | Matsushita Electric Ind Co Ltd | Manufacture for semiconductor device |
JPS5544451U (en) * | 1978-09-13 | 1980-03-22 | ||
JPS6114765A (en) * | 1984-06-29 | 1986-01-22 | Shindengen Electric Mfg Co Ltd | Insulated gate field effect transistor |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3698966A (en) * | 1970-02-26 | 1972-10-17 | North American Rockwell | Processes using a masking layer for producing field effect devices having oxide isolation |
JPS514837A (en) * | 1974-07-01 | 1976-01-16 | Takenaka Komuten Co | KADOSHIKI HINANBARUKONII |
-
1975
- 1975-12-04 JP JP14471675A patent/JPS5267963A/en active Pending
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3698966A (en) * | 1970-02-26 | 1972-10-17 | North American Rockwell | Processes using a masking layer for producing field effect devices having oxide isolation |
JPS514837A (en) * | 1974-07-01 | 1976-01-16 | Takenaka Komuten Co | KADOSHIKI HINANBARUKONII |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS544081A (en) * | 1977-06-10 | 1979-01-12 | Matsushita Electric Ind Co Ltd | Manufacture for semiconductor device |
JPS544082A (en) * | 1977-06-10 | 1979-01-12 | Matsushita Electric Ind Co Ltd | Manufacture for semiconductor device |
JPS5544451U (en) * | 1978-09-13 | 1980-03-22 | ||
JPS6114765A (en) * | 1984-06-29 | 1986-01-22 | Shindengen Electric Mfg Co Ltd | Insulated gate field effect transistor |
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