JPS5333581A - Production of semiconductor device - Google Patents

Production of semiconductor device

Info

Publication number: JPS5333581A
Authority: JP; Japan
Prior art keywords: production; semiconductor device; semiconductor; flatten; stepping
Prior art date: 1976-09-10
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.): Granted

Application number

JP10779376A

Other languages

English (en)

Other versions

JPS6113375B2 (ja

Inventor

Hisao Katsuto

Shinichi Muramatsu

Sukeyoshi Tsunekawa

Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)

Hitachi Ltd

Original Assignee

Hitachi Ltd

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

1976-09-10

Filing date

1976-09-10

Publication date

1978-03-29

1976-09-10 Application filed by Hitachi Ltd filed Critical Hitachi Ltd

1976-09-10 Priority to JP10779376A priority Critical patent/JPS5333581A/ja

1978-03-29 Publication of JPS5333581A publication Critical patent/JPS5333581A/ja

1986-04-12 Publication of JPS6113375B2 publication Critical patent/JPS6113375B2/ja

Status Granted legal-status Critical Current

Links

Landscapes

Weting (AREA)

JP10779376A 1976-09-10 1976-09-10 Production of semiconductor device Granted JPS5333581A (en)

Priority Applications (1)

Application Number	Priority Date	Filing Date	Title
JP10779376A JPS5333581A (en)	1976-09-10	1976-09-10	Production of semiconductor device

Applications Claiming Priority (1)

Application Number	Priority Date	Filing Date	Title
JP10779376A JPS5333581A (en)	1976-09-10	1976-09-10	Production of semiconductor device

Publications (2)

Publication Number	Publication Date
JPS5333581A true JPS5333581A (en)	1978-03-29
JPS6113375B2 JPS6113375B2 (ja)	1986-04-12

Family

ID=14468160

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
JP10779376A Granted JPS5333581A (en)	1976-09-10	1976-09-10	Production of semiconductor device

Country Status (1)

Country	Link
JP (1)	JPS5333581A (ja)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
JPS5656638A (en) *	1979-10-13	1981-05-18	Mitsubishi Electric Corp	Pattern forming method
JPS57145327A (en) *	1981-03-04	1982-09-08	Nippon Telegr & Teleph Corp <Ntt>	Manufacture of semiconductor device
JPS57149738A (en) *	1981-03-11	1982-09-16	Agency Of Ind Science & Technol	Forming method for solid film
JPS60500559A (ja) *	1983-02-25	1985-04-25	ヨハンソ−ン　ホ−カン	釣具

1976
- 1976-09-10 JP JP10779376A patent/JPS5333581A/ja active Granted

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
JPS5656638A (en) *	1979-10-13	1981-05-18	Mitsubishi Electric Corp	Pattern forming method
JPS57145327A (en) *	1981-03-04	1982-09-08	Nippon Telegr & Teleph Corp <Ntt>	Manufacture of semiconductor device
JPS57149738A (en) *	1981-03-11	1982-09-16	Agency Of Ind Science & Technol	Forming method for solid film
JPS60500559A (ja) *	1983-02-25	1985-04-25	ヨハンソ−ン　ホ−カン	釣具

Also Published As

Publication number	Publication date
JPS6113375B2 (ja)	1986-04-12

Similar Documents

Publication	Publication Date	Title
JPS51123561A (en)	1976-10-28	Production method of semicondvctor device
JPS51123562A (en)	1976-10-28	Production method of semiconductor device
JPS5333581A (en)	1978-03-29	Production of semiconductor device
JPS5237788A (en)	1977-03-23	Process for production of photovoltaic elements
JPS5239385A (en)	1977-03-26	Process for production of semiconductor device
JPS5383467A (en)	1978-07-22	Production of semiconductor device
JPS5416984A (en)	1979-02-07	Wafer locating device
JPS5618451A (en)	1981-02-21	Manufacture of substrate for semiconductor device
JPS51138163A (en)	1976-11-29	Production method of semiconductor device
JPS52137269A (en)	1977-11-16	Semiconductor device
JPS5386177A (en)	1978-07-29	Production of semiconductor device
JPS5217768A (en)	1977-02-09	Production method of semi-conductor device
JPS534477A (en)	1978-01-17	Production of semiconductor device
JPS5384485A (en)	1978-07-25	Mos-type semiconductor device
JPS539488A (en)	1978-01-27	Production of semiconductor device
JPS51132789A (en)	1976-11-18	Semiconductor apparatus with resistance element
JPS5259588A (en)	1977-05-17	Production of semiconductor element
JPS53126279A (en)	1978-11-04	Semiconductor device and production of the same
JPS5210080A (en)	1977-01-26	Method for manufacturing semiconductor device
JPS52143767A (en)	1977-11-30	Production of semiconductor device
JPS5285465A (en)	1977-07-15	Production of semiconductor device
JPS53143183A (en)	1978-12-13	Semicondutor integrated circuit device and production of the same
JPS52144975A (en)	1977-12-02	Production of semiconductor device
JPS52104072A (en)	1977-09-01	High voltage semiconductor device
JPS5347779A (en)	1978-04-28	Production of semiconductor device

Legal Events

Date	Code	Title	Description
2005-10-25	R250	Receipt of annual fees	Free format text: JAPANESE INTERMEDIATE CODE: R250
2006-10-24	R250	Receipt of annual fees	Free format text: JAPANESE INTERMEDIATE CODE: R250
2007-10-23	FPAY	Renewal fee payment (prs date is renewal date of database)	Free format text: PAYMENT UNTIL: 20081004 Year of fee payment: 6
2008-10-21	FPAY	Renewal fee payment (prs date is renewal date of database)	Free format text: PAYMENT UNTIL: 20091004 Year of fee payment: 7
2009-10-01	FPAY	Renewal fee payment (prs date is renewal date of database)	Free format text: PAYMENT UNTIL: 20091004 Year of fee payment: 7
2009-10-06	FPAY	Renewal fee payment (prs date is renewal date of database)	Year of fee payment: 8 Free format text: PAYMENT UNTIL: 20101004
2010-10-05	FPAY	Renewal fee payment (prs date is renewal date of database)	Year of fee payment: 9 Free format text: PAYMENT UNTIL: 20111004
2011-10-04	FPAY	Renewal fee payment (prs date is renewal date of database)	Year of fee payment: 10 Free format text: PAYMENT UNTIL: 20121004
2012-10-02	FPAY	Renewal fee payment (prs date is renewal date of database)	Free format text: PAYMENT UNTIL: 20131004 Year of fee payment: 11
2012-12-14	EXPY	Cancellation because of completion of term
2013-02-20	FPAY	Renewal fee payment (prs date is renewal date of database)	Free format text: PAYMENT UNTIL: 20131004 Year of fee payment: 11