JPS53105390A - Semiconductor device - Google Patents
Semiconductor deviceInfo
- Publication number
- JPS53105390A JPS53105390A JP1989677A JP1989677A JPS53105390A JP S53105390 A JPS53105390 A JP S53105390A JP 1989677 A JP1989677 A JP 1989677A JP 1989677 A JP1989677 A JP 1989677A JP S53105390 A JPS53105390 A JP S53105390A
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor device
- film
- manufacture
- place
- ion implantation
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
- Local Oxidation Of Silicon (AREA)
Abstract
PURPOSE: To manufacture the semiconductor device with high reliability by using the photo resist film with ion implantation, as insulating film for multi layer wiring in place of PSG film.
COPYRIGHT: (C)1978,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1989677A JPS53105390A (en) | 1977-02-25 | 1977-02-25 | Semiconductor device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1989677A JPS53105390A (en) | 1977-02-25 | 1977-02-25 | Semiconductor device |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS53105390A true JPS53105390A (en) | 1978-09-13 |
Family
ID=12011952
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1989677A Pending JPS53105390A (en) | 1977-02-25 | 1977-02-25 | Semiconductor device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS53105390A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS56112649A (en) * | 1980-02-13 | 1981-09-05 | Toshiba Corp | Quantitatively analizing method for boron |
-
1977
- 1977-02-25 JP JP1989677A patent/JPS53105390A/en active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS56112649A (en) * | 1980-02-13 | 1981-09-05 | Toshiba Corp | Quantitatively analizing method for boron |
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