JPS53105390A - Semiconductor device - Google Patents

Semiconductor device

Info

Publication number
JPS53105390A
JPS53105390A JP1989677A JP1989677A JPS53105390A JP S53105390 A JPS53105390 A JP S53105390A JP 1989677 A JP1989677 A JP 1989677A JP 1989677 A JP1989677 A JP 1989677A JP S53105390 A JPS53105390 A JP S53105390A
Authority
JP
Japan
Prior art keywords
semiconductor device
film
manufacture
place
ion implantation
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1989677A
Other languages
Japanese (ja)
Inventor
Katsuyuki Inayoshi
Masanao Itoga
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP1989677A priority Critical patent/JPS53105390A/en
Publication of JPS53105390A publication Critical patent/JPS53105390A/en
Pending legal-status Critical Current

Links

Landscapes

  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
  • Local Oxidation Of Silicon (AREA)

Abstract

PURPOSE: To manufacture the semiconductor device with high reliability by using the photo resist film with ion implantation, as insulating film for multi layer wiring in place of PSG film.
COPYRIGHT: (C)1978,JPO&Japio
JP1989677A 1977-02-25 1977-02-25 Semiconductor device Pending JPS53105390A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1989677A JPS53105390A (en) 1977-02-25 1977-02-25 Semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1989677A JPS53105390A (en) 1977-02-25 1977-02-25 Semiconductor device

Publications (1)

Publication Number Publication Date
JPS53105390A true JPS53105390A (en) 1978-09-13

Family

ID=12011952

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1989677A Pending JPS53105390A (en) 1977-02-25 1977-02-25 Semiconductor device

Country Status (1)

Country Link
JP (1) JPS53105390A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56112649A (en) * 1980-02-13 1981-09-05 Toshiba Corp Quantitatively analizing method for boron

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56112649A (en) * 1980-02-13 1981-09-05 Toshiba Corp Quantitatively analizing method for boron

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