JPS5272173A - Semiconductor device and its production - Google Patents
Semiconductor device and its productionInfo
- Publication number
- JPS5272173A JPS5272173A JP14891075A JP14891075A JPS5272173A JP S5272173 A JPS5272173 A JP S5272173A JP 14891075 A JP14891075 A JP 14891075A JP 14891075 A JP14891075 A JP 14891075A JP S5272173 A JPS5272173 A JP S5272173A
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor device
- production
- oxidation
- treating
- cleaning
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Formation Of Insulating Films (AREA)
Abstract
PURPOSE: To improve chemical resistance and obtain a semiconductor device of less leak current by cleaning the surface of an Si substrate, then treating the surface with ethyl alcohol to provide protection thence forming a metastable oxide film on the surface through oxidation with nitric acid.
COPYRIGHT: (C)1977,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP14891075A JPS5272173A (en) | 1975-12-12 | 1975-12-12 | Semiconductor device and its production |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP14891075A JPS5272173A (en) | 1975-12-12 | 1975-12-12 | Semiconductor device and its production |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5272173A true JPS5272173A (en) | 1977-06-16 |
Family
ID=15463385
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP14891075A Pending JPS5272173A (en) | 1975-12-12 | 1975-12-12 | Semiconductor device and its production |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5272173A (en) |
-
1975
- 1975-12-12 JP JP14891075A patent/JPS5272173A/en active Pending
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