JPS5359368A - Plasma etching - Google Patents

Plasma etching

Info

Publication number
JPS5359368A
JPS5359368A JP13404576A JP13404576A JPS5359368A JP S5359368 A JPS5359368 A JP S5359368A JP 13404576 A JP13404576 A JP 13404576A JP 13404576 A JP13404576 A JP 13404576A JP S5359368 A JPS5359368 A JP S5359368A
Authority
JP
Japan
Prior art keywords
plasma etching
plasma
specially
organic compound
including organic
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP13404576A
Other languages
Japanese (ja)
Inventor
Hiroshi Yanagisawa
Yoshifumi Kawamoto
Toshiharu Matsuzawa
Kikuo Doda
Tetsukazu Hashimoto
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP13404576A priority Critical patent/JPS5359368A/en
Publication of JPS5359368A publication Critical patent/JPS5359368A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE: To perform minute processing by plasma-etching PSG films in an atmosphere including organic compound having specially F, H and O.
COPYRIGHT: (C)1978,JPO&Japio
JP13404576A 1976-11-10 1976-11-10 Plasma etching Pending JPS5359368A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13404576A JPS5359368A (en) 1976-11-10 1976-11-10 Plasma etching

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13404576A JPS5359368A (en) 1976-11-10 1976-11-10 Plasma etching

Publications (1)

Publication Number Publication Date
JPS5359368A true JPS5359368A (en) 1978-05-29

Family

ID=15119067

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13404576A Pending JPS5359368A (en) 1976-11-10 1976-11-10 Plasma etching

Country Status (1)

Country Link
JP (1) JPS5359368A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5945946A (en) * 1982-09-06 1984-03-15 Toyota Central Res & Dev Lab Inc Manufacture of porous hollow glass fiber
JPS59111562U (en) * 1983-05-14 1984-07-27 石川　四郎 bench
JPS6077429A (en) * 1983-10-04 1985-05-02 Asahi Glass Co Ltd Dry etching method

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5945946A (en) * 1982-09-06 1984-03-15 Toyota Central Res & Dev Lab Inc Manufacture of porous hollow glass fiber
JPS6257588B2 (en) * 1982-09-06 1987-12-01 Toyoda Chuo Kenkyusho Kk
JPS59111562U (en) * 1983-05-14 1984-07-27 石川　四郎 bench
JPS6077429A (en) * 1983-10-04 1985-05-02 Asahi Glass Co Ltd Dry etching method
JPH0343776B2 (en) * 1983-10-04 1991-07-03 Asahi Garasu Kk

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