JPS5269583A - Manufacture of insulation gate type semiconductor device - Google Patents
Manufacture of insulation gate type semiconductor deviceInfo
- Publication number
- JPS5269583A JPS5269583A JP14502375A JP14502375A JPS5269583A JP S5269583 A JPS5269583 A JP S5269583A JP 14502375 A JP14502375 A JP 14502375A JP 14502375 A JP14502375 A JP 14502375A JP S5269583 A JPS5269583 A JP S5269583A
- Authority
- JP
- Japan
- Prior art keywords
- manufacture
- semiconductor device
- type semiconductor
- gate type
- insulation gate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Weting (AREA)
Abstract
PURPOSE: After selective etching performed for formation od impurity diffusion window at source and drain sections, the eaves-like area of growind gate electrode is etched and removed using etching method of low etching directivity. As a result, the gate breakage of MOS. IC os Si gate structure can be avoided.
COPYRIGHT: (C)1977,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP14502375A JPS5269583A (en) | 1975-12-08 | 1975-12-08 | Manufacture of insulation gate type semiconductor device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP14502375A JPS5269583A (en) | 1975-12-08 | 1975-12-08 | Manufacture of insulation gate type semiconductor device |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5269583A true JPS5269583A (en) | 1977-06-09 |
Family
ID=15375630
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP14502375A Pending JPS5269583A (en) | 1975-12-08 | 1975-12-08 | Manufacture of insulation gate type semiconductor device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5269583A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6297332A (en) * | 1986-10-24 | 1987-05-06 | Matsushita Electric Ind Co Ltd | Etching method |
-
1975
- 1975-12-08 JP JP14502375A patent/JPS5269583A/en active Pending
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6297332A (en) * | 1986-10-24 | 1987-05-06 | Matsushita Electric Ind Co Ltd | Etching method |
JPH0257701B2 (en) * | 1986-10-24 | 1990-12-05 | Matsushita Electric Ind Co Ltd |
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