JPS5269583A - Manufacture of insulation gate type semiconductor device - Google Patents

Manufacture of insulation gate type semiconductor device

Info

Publication number
JPS5269583A
JPS5269583A JP14502375A JP14502375A JPS5269583A JP S5269583 A JPS5269583 A JP S5269583A JP 14502375 A JP14502375 A JP 14502375A JP 14502375 A JP14502375 A JP 14502375A JP S5269583 A JPS5269583 A JP S5269583A
Authority
JP
Japan
Prior art keywords
manufacture
semiconductor device
type semiconductor
gate type
insulation gate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP14502375A
Other languages
Japanese (ja)
Inventor
Tatsu Ito
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP14502375A priority Critical patent/JPS5269583A/en
Publication of JPS5269583A publication Critical patent/JPS5269583A/en
Pending legal-status Critical Current

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  • Weting (AREA)

Abstract

PURPOSE: After selective etching performed for formation od impurity diffusion window at source and drain sections, the eaves-like area of growind gate electrode is etched and removed using etching method of low etching directivity. As a result, the gate breakage of MOS. IC os Si gate structure can be avoided.
COPYRIGHT: (C)1977,JPO&Japio
JP14502375A 1975-12-08 1975-12-08 Manufacture of insulation gate type semiconductor device Pending JPS5269583A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14502375A JPS5269583A (en) 1975-12-08 1975-12-08 Manufacture of insulation gate type semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14502375A JPS5269583A (en) 1975-12-08 1975-12-08 Manufacture of insulation gate type semiconductor device

Publications (1)

Publication Number Publication Date
JPS5269583A true JPS5269583A (en) 1977-06-09

Family

ID=15375630

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14502375A Pending JPS5269583A (en) 1975-12-08 1975-12-08 Manufacture of insulation gate type semiconductor device

Country Status (1)

Country Link
JP (1) JPS5269583A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6297332A (en) * 1986-10-24 1987-05-06 Matsushita Electric Ind Co Ltd Etching method

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6297332A (en) * 1986-10-24 1987-05-06 Matsushita Electric Ind Co Ltd Etching method
JPH0257701B2 (en) * 1986-10-24 1990-12-05 Matsushita Electric Ind Co Ltd

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